Patents by Inventor Yayori Toriu

Yayori Toriu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mask pattern verification method
    Patent number: 10606165
    Abstract: According to one embodiment, a mask pattern verification method includes: calculating mask pattern data; calculating an optical image and a resist image; calculating a first feature amount and a second feature amount, using a plurality of algorithms; in each of the plurality of algorithms, comparing the first feature amount with a first threshold, and detecting a critical point candidate in a first pattern; in each of the plurality of algorithms, comparing the second feature amount with a second threshold, and detecting a critical point in the first pattern; and selecting at least one of the plurality of algorithms, and displaying a detection result of the critical point corresponding to a selected algorithm.
    Type: Grant
    Filed: August 9, 2018
    Date of Patent: March 31, 2020
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Yayori Toriu, Masanari Kajiwara, Fumiharu Nakajima
  • MASK PATTERN VERIFICATION METHOD
    Publication number: 20190243232
    Abstract: According to one embodiment, a mask pattern verification method includes: calculating mask pattern data; calculating an optical image and a resist image; calculating a first feature amount and a second feature amount, using a plurality of algorithms; in each of the plurality of algorithms, comparing the first feature amount with a first threshold, and detecting a critical point candidate in a first pattern; in each of the plurality of algorithms, comparing the second feature amount with a second threshold, and detecting a critical point in the first pattern; and selecting at least one of the plurality of algorithms, and displaying a detection result of the critical point corresponding to a selected algorithm.
    Type: Application
    Filed: August 9, 2018
    Publication date: August 8, 2019
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventors: Yayori TORIU, Masanari KAJIWARA, Fumiharu NAKAJIMA