Patents by Inventor Ye Yang

Ye Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100123897
    Abstract: We disclose measurement systems and methods for measuring analytes in target regions of samples that also include features overlying the target regions. The systems include: (a) a light source; (b) a detection system; (c) a set of at least first, second, and third light ports which transmit light from the light source to a sample and receive and direct light reflected from the sample to the detection system, generating a first set of data including information corresponding to both an internal target within the sample and features overlying the internal target, and a second set of data including information corresponding to features overlying the internal target; and (d) a processor configured to remove information characteristic of the overlying features from the first set of data using the first and second sets of data to produce corrected information representing the internal target.
    Type: Application
    Filed: September 28, 2009
    Publication date: May 20, 2010
    Inventors: Ye Yang, Babs R. Soller, Olusola O. Soyemi, Michael A. Shear
  • Patent number: 7714287
    Abstract: An electron beam apparatus is configured for dark field imaging of a substrate surface. Dark field is defined as an operational mode where the image contrast is sensitive to topographical features on the surface. A source generates a primary electron beam, and scan deflectors are configured to deflect the primary electron beam so as to scan the primary electron beam over the substrate surface whereby secondary and/or backscattered electrons are emitted from the substrate surface, said emitted electrons forming a scattered electron beam. A beam separator is configured to separate the scattered electron beam from the primary electron beam. The apparatus includes a cooperative arrangement which includes at least a ring-like element, a first grid, and a second grid. The ring-like element and the first and second grids each comprises conductive material. A segmented detector assembly is positioned to receive the scattered electron beam after the scattered electron beam passes through the cooperative arrangement.
    Type: Grant
    Filed: August 19, 2008
    Date of Patent: May 11, 2010
    Assignee: KLA-Tencor Corporation
    Inventors: Edward M. James, Ye Yang, Mark Lin, Alexander J. Gubbens, Paul Petric
  • Patent number: 7616303
    Abstract: We disclose measurement systems and methods for measuring analytes in target regions of samples that also include features overlying the target regions. The systems include: (a) a light source; (b) a detection system; (c) a set of at least first, second, and third light ports which transmit light from the light source to a sample and receive and direct light reflected from the sample to the detection system, generating a first set of data including information corresponding to both an internal target within the sample and features overlying the internal target, and a second set of data including information corresponding to features overlying the internal target; and (d) a processor configured to remove information characteristic of the overlying features from the first set of data using the first and second sets of data to produce corrected information representing the internal target.
    Type: Grant
    Filed: April 25, 2006
    Date of Patent: November 10, 2009
    Assignee: University of Massachusetts
    Inventors: Ye Yang, Babs R. Soller, Olusola O. Soyemi, Michael A. Shear
  • Patent number: 7560703
    Abstract: A signal conduction channel having a first element that receives electrons at a first end from a vacuum environment, produces photons as the electrons are received, and propagates the photons along a length of the first element to a distal second end, and a second element that receives the photons from the second end of the first element, converts the photons to electrons, and multiplies the electrons, where no additional element is disposed between the second end of the first element and the second element, except optionally at least one of a photon-conductive epoxy, a lens, and an optical coupling plate that touches both the second end of the first element and the second element.
    Type: Grant
    Filed: July 2, 2007
    Date of Patent: July 14, 2009
    Assignee: KLA-Tencor Corporation
    Inventors: David A. Soltz, Ye Yang, Mark C. Lin, Laurence S. Horndon, Edward G. Solomon, Joseph A. Heanue, John F. Heanue, M. Nasser Ghodsi
  • Patent number: 7532919
    Abstract: Methods and systems for calculating tissue oxygenation, e.g., oxygen saturation, in a target tissue are disclosed. In some embodiments, the methods include: (a) directing incident radiation to a target tissue and determining reflectance spectra of the target tissue by measuring intensities of reflected radiation from the target tissue at a plurality of radiation wavelengths; (b) correcting the measured intensities of the reflectance spectra to reduce contributions thereto from skin and fat layers through which the incident radiation propagates; (c) determining oxygen saturation in the target tissue based on the corrected reflectance spectra; and (d) outputting the determined value of oxygen saturation.
    Type: Grant
    Filed: May 30, 2007
    Date of Patent: May 12, 2009
    Assignee: University of Massachusetts
    Inventors: Olusola O. Soyemi, Babs R. Soller, Ye Yang
  • Patent number: 7488938
    Abstract: One embodiment relates to a method of electron beam imaging of a target area of a substrate. During an imaging phase, an electron beam is controllably scanned over the target area of the substrate, and extracted secondary electrons are detected. An electric field at a surface of the substrate is changed from an original electric field after the imaging phase. During a charge control phase, the electron beam is controllably scanned over the target area of the substrate. The electric field at the surface of the substrate is reverted back to the original electric field after the charge control phase. The imaging and charge control frames are interleaved. Other embodiments and features are also disclosed.
    Type: Grant
    Filed: August 23, 2006
    Date of Patent: February 10, 2009
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Alexander Jozef Gubbens, Mark Borowicz, Ye Yang
  • Publication number: 20080097173
    Abstract: Methods and systems for calculating tissue oxygenation, e.g., oxygen saturation, in a target tissue are disclosed. In some embodiments, the methods include: (a) directing incident radiation to a target tissue and determining reflectance spectra of the target tissue by measuring intensities of reflected radiation from the target tissue at a plurality of radiation wavelengths; (b) correcting the measured intensities of the reflectance spectra to reduce contributions thereto from skin and fat layers through which the incident radiation propagates; (c) determining oxygen saturation in the target tissue based on the corrected reflectance spectra; and (d) outputting the determined value of oxygen saturation.
    Type: Application
    Filed: May 30, 2007
    Publication date: April 24, 2008
    Inventors: Olusola Soyemi, Babs Soller, Ye Yang
  • Publication number: 20070038041
    Abstract: We disclose measurement systems and methods for measuring analytes in target regions of samples that also include features overlying the target regions. The systems include: (a) a light source; (b) a detection system; (c) a set of at least first, second, and third light ports which transmit light from the light source to a sample and receive and direct light reflected from the sample to the detection system, generating a first set of data including information corresponding to both an internal target within the sample and features overlying the internal target, and a second set of data including information corresponding to features overlying the internal target; and (d) a processor configured to remove information characteristic of the overlying features from the first set of data using the first and second sets of data to produce corrected information representing the internal target.
    Type: Application
    Filed: April 25, 2006
    Publication date: February 15, 2007
    Inventors: Ye Yang, Babs Soller, Olusola Soyemi, Michael Shear