Abstract: A method comprises dispensing a first solvent on a semiconductor substrate; dispensing a first layer of a high-viscosity polymer on the first solvent; dispensing a second solvent on the first layer of high-viscosity polymer; and spinning the semiconductor substrate after dispensing the second solvent, so as to spread the high-viscosity polymer to a periphery of the semiconductor substrate.

Abstract: A system and method are disclosed for processing semiconductors. An embodiment comprises a reaction chamber for processing wafers and having walls tapering at an angle that is greater than 0 degrees and less than about 35 degrees from a first end optionally having a diameter of 341 to 380 millimeters to a second end optionally having a diameter of 300 to 340 millimeters at a second end, with gas flow from the first end to the second end, and having at least one deposition injector near the first end of the reaction chamber and having a plurality of injector openings that disperse injection material across a cross section of the reaction chamber for forming a deposition layer.

Abstract: The invention provides a ribbonlike light illumination apparatus, comprising a ribbonlike member, a plurality of heat-dissipating fins, and a plurality of light devices. The ribbonlike member has a first surface and a second surface. The heat-dissipating fins are disposed on the first surface. The light devices are demountably mounted on the second surface. The ribbonlike light illumination apparatus of the invention may be installed in an advertisement box. A more uniform light source than conventional fluorescent lamps can be achieved by adjusting the distances between the light devices on the ribbonlike member. Besides, the ribbonlike light illumination apparatus of the invention has properties of longer life and saves more power than conventional fluorescent lamps.