Abstract: A haptic actuator may include a housing having opposing first and second ends and first and second coils carried by the housing adjacent respective first and second ends thereof. Each coil may have a respective passageway therethrough. The actuator may include a field member including first and second masses adjacent respective first and second ends of the housing, and a permanent magnet having first and second ends coupled to respective ones of the first and second masses. The actuator may also include first and second flexures mounting respective first and second masses to the respective first and second ends of the housing so that the field member is reciprocally movable within the passageways of the coils responsive to powering the coils and so that the ends of the permanent magnet are within respective passageways of the coils when the coils are unpowered.

Abstract: Embodiments are disclosed for a haptic engine module that includes AROD magnets. The AROD magnets comprise two adjacent magnets with opposite polarization and adjacent coils above and/or below the magnets. The magnets and coils are adjacent in along direction, which is the direction that is perpendicular to the vibration direction (the direction of the Lorentz force) and to the polarization direction (the direction of magnetic flux). When in operation, excitation current flows in the two coils in opposite directions. The haptic engine module can be embedded in an electronic device with an extreme aspect ratio (e.g., a touch bar of a notebook computer) to provide haptic force (e.g., vibration, click) that can be felt by a user holding or touching the electronic device.

Abstract: Embodiments are disclosed for a haptic engine module that includes AROD magnets. The AROD magnets comprise two adjacent magnets with opposite polarization and adjacent coils above and/or below the magnets. The magnets and coils are adjacent in along direction, which is the direction that is perpendicular to the vibration direction (the direction of the Lorentz force) and to the polarization direction (the direction of magnetic flux). When in operation, excitation current flows in the two coils in opposite directions. The haptic engine module can be embedded in an electronic device with an extreme aspect ratio (e.g., a touch bar of a notebook computer) to provide haptic force (e.g., vibration, click) that can be felt by a user holding or touching the electronic device.

Abstract: A haptic actuator may include a housing having opposing first and second ends and first and second coils carried by the housing adjacent respective first and second ends thereof. Each coil may have a respective passageway therethrough. The actuator may include a field member including first and second masses adjacent respective first and second ends of the housing, and a permanent magnet having first and second ends coupled to respective ones of the first and second masses. The actuator may also include first and second flexures mounting respective first and second masses to the respective first and second ends of the housing so that the field member is reciprocally movable within the passageways of the coils responsive to powering the coils and so that the ends of the permanent magnet are within respective passageways of the coils when the coils are unpowered.

Abstract: Disclosed are embodiments of magnetic virtual springs for haptic systems. In an embodiment, a haptic system comprises: a magnetic housing having a surface with a surface profile; a mechanical spring system disposed in the housing, the mechanical spring system including one or more mechanical springs; a mass disposed within the housing and mechanically coupled to the mechanical spring system, the mass including or coupled to a magnet, the surface profile causing a magnetic force component to be generated in at least one direction that varies with the magnet position, the magnetic force component combining with a mechanical force component provided by the mechanical springs.

Abstract: Haptic feedback can be provided to a user via an input device to give a user a richer interaction experience with the input device and host device. The input device can include a magnet and a host device can include an array of coils. The coils can be driven to generate a magnetic field (or one or more magnetic fields) that can exert a force on the input device to provide haptic feedback. In some examples, the haptic feedback can be a push force pushing the input device away from the device or a pull force pulling the input device toward the device. In some examples, the haptic feedback can guide the input device using lateral forces. The haptic feedback described herein can be used for writing, drawing or actuating virtual input controls in a user interface.

Abstract: Disclosed are embodiments of magnetic virtual springs for haptic systems. In an embodiment, a haptic system comprises: a magnetic housing having a surface with a surface profile; a mechanical spring system disposed in the housing, the mechanical spring system including one or more mechanical springs; a mass disposed within the housing and mechanically coupled to the mechanical spring system, the mass including or coupled to a magnet, the surface profile causing a magnetic force component to be generated in at least one direction that varies with the magnet position, the magnetic force component combining with a mechanical force component provided by the mechanical springs.

Abstract: Haptic feedback can be provided to a user via an input device to give a user a richer interaction experience with the input device and host device. The input device can include a magnet and a host device can include an array of coils. The coils can be driven to generate a magnetic field (or one or more magnetic fields) that can exert a force on the input device to provide haptic feedback. In some examples, the haptic feedback can be a push force pushing the input device away from the device or a pull force pulling the input device toward the device. In some examples, the haptic feedback can guide the input device using lateral forces. The haptic feedback described herein can be used for writing, drawing or actuating virtual input controls in a user interface.

Abstract: A haptic actuator may include first and second bodies movable along an arcuate path of travel. The haptic actuator may also include a biasing member coupled between the first and second bodies. At least one electrical coil may be configured to move the first and second bodies to produce a haptic effect.

Abstract: A haptic actuator may include first and second bodies movable along an arcuate path of travel. The haptic actuator may also include a biasing member coupled between the first and second bodies. At least one electrical coil may be configured to move the first and second bodies to produce a haptic effect.

Abstract: An electronic device that is operable to provide electrical haptic output includes a touch surface and multiple haptic cells disposed on the touch surface. The multiple haptic cells include capacitors that are operable to store charges independently of each other and independently provide haptic output when touched by a body by discharging the stored charge to create a current. In this way, a wide variety of dynamically configurable haptic outputs can be provided without moving parts and without consuming the space and/or power used for haptic actuators that vibrate and/or otherwise move a mass.

Abstract: A linear haptic actuator may include an actuator housing and at least one coil carried by the actuator housing. The linear haptic actuator may also include field members moveable along a path of travel within the actuator housing in response to the at least one coil and a respective end biasing member between each end field member and adjacent portions of the actuator housing. A respective internal biasing member may be between adjacent field members.

Abstract: An electronic device that is operable to provide electrical haptic output includes a touch surface and multiple haptic cells disposed on the touch surface. The multiple haptic cells include capacitors that are operable to store charges independently of each other and independently provide haptic output when touched by a body by discharging the stored charge to create a current. In this way, a wide variety of dynamically configurable haptic outputs can be provided without moving parts and without consuming the space and/or power used for haptic actuators that vibrate and/or otherwise move a mass.

Abstract: A linear haptic actuator may include an actuator housing and at least one coil carried by the actuator housing. The linear haptic actuator may also include field members moveable along a path of travel within the actuator housing in response to the at least one coil and a respective end biasing member between each end field member and adjacent portions of the actuator housing. A respective internal biasing member may be between adjacent field members.

Abstract: A haptic actuator may include a housing, at least one coil carried by the housing, and a field member having opposing first and second sides. The haptic actuator may also include a respective at least one flexure mounting each of the first and second sides of the field member to be reciprocally movable within the housing responsive to the at least one coil. Each flexure may include two diverging arms joined together at proximal ends and having spaced distal ends operatively coupled between adjacent portions or the field member and the housing. The two diverging arms may each include a proximal segment having a reduced material medial portion relative to adjacent end portions, and a distal segment, being canted with respect to the proximal segment, and having a reduced material medial portion relative to adjacent end portions.

Abstract: Embodiments of the present technology may include a method of processing a semiconductor substrate. The method may include providing the semiconductor substrate in a processing region. Additionally, the method may include flowing gas through a cavity defined by a powered electrode. The method may further include applying a negative voltage to the powered electrode. Also, the method may include striking a hollow cathode discharge in the cavity to form hollow cathode discharge effluents from the gas. The hollow cathode discharge effluents may then be flowed to the processing region through a plurality of apertures defined by electrically grounded electrode. The method may then include reacting the hollow cathode discharge effluents with the semiconductor substrate in the processing region.

Abstract: Methods of controlling the polarity of capacitive plasma power applied to a remote plasma are described. Rather than applying a plasma power which involves both a positive and negative voltage swings equally, a capacitive plasma power is applied which favors either positive or negative voltage swings in order to select desirable process attributes. For example, the plasma power may be formed by applying a unipolar oscillating voltage between an electrode and a perforated plate. The unipolar oscillating voltage may have only positive or only negative voltages between the electrode and the perforated plate. The unipolar oscillating voltage may cross electrical ground in some portion of its oscillating voltage.

Abstract: Methods of controlling the polarity of capacitive plasma power applied to a remote plasma are described. Rather than applying a plasma power which involves both a positive and negative voltage swings equally, a capacitive plasma power is applied which favors either positive or negative voltage swings in order to select desirable process attributes. For example, the plasma power may be formed by applying a unipolar oscillating voltage between an electrode and a perforated plate. The unipolar oscillating voltage may have only positive or only negative voltages between the electrode and the perforated plate. The unipolar oscillating voltage may cross electrical ground in some portion of its oscillating voltage.

Abstract: Embodiments of the present technology may include a method of processing a semiconductor substrate. The method may include providing the semiconductor substrate in a processing region. Additionally, the method may include flowing gas through a cavity defined by a powered electrode. The method may further include applying a negative voltage to the powered electrode. Also, the method may include striking a hollow cathode discharge in the cavity to form hollow cathode discharge effluents from the gas. The hollow cathode discharge effluents may then be flowed to the processing region through a plurality of apertures defined by electrically grounded electrode. The method may then include reacting the hollow cathode discharge effluents with the semiconductor substrate in the processing region.