Patents by Inventor Yiau-Yi Chu

Yiau-Yi Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for dispensing resist solution
    Patent number: 6425497
    Abstract: A method and apparatus for dispensing a resist solution used in a semiconductor device manufacturing process senses the presence of air bubbles in the solution during delivery through a line feeding a dispensing pump. Air bubbles in the line are sensed by an optical photocoupler that senses changes in the intensity of light refracted through the solution caused by air bubbles entrapped in the solution. The sensor produces an air bubble indicating signal that can be used to activate an alarm or to stop the dispensing process.
    Type: Grant
    Filed: March 20, 2001
    Date of Patent: July 30, 2002
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yiau-Yi Chu, Jen-Sen Huang, Shih-Hung Lu, Tzung-Chi Fu