Patents by Inventor Yin-Fu Huang

Yin-Fu Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9899513
    Abstract: A lateral diffused metal oxide semiconductor (LDMOS) transistor and a manufacturing method thereof are provided. A deep well region is disposed in a substrate. An isolation structure is disposed in the substrate to define a first active area and a second active area. A well region is disposed in the deep well region in the first active area. A gate is disposed on the substrate in the first active area. A gate dielectric layer is disposed between the gate and the substrate. A first doped region is disposed in the well region in the first active area and located at one side of the gate. A second doped region is disposed in the deep well region in the second active area. A conductive structure is disposed on the isolation structure, surrounds the second doped region and is connected to the gate.
    Type: Grant
    Filed: December 29, 2016
    Date of Patent: February 20, 2018
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Wei-Chih Lin, Chih-Chia Hsu, Yin-Fu Huang
  • Patent number: 9231078
    Abstract: A semiconductor element and a manufacturing method thereof are provided. The semiconductor element includes a base, an epitaxy layer, a first well, a second well, a third well, a first heavily doping region, a second heavily doping region, a implanting region and a conductive layer. The epitaxy layer is disposed on the base. The first well, the second well and the third well are disposed in the epitaxy layer. The third well is located between the first well and the second well. A surface channel is formed between the first heavily doping region and the second heavily doping region. The implanting region is fully disposed between the surface channel and the base and disposed at a projection region of the first well, the second well and the third well.
    Type: Grant
    Filed: December 5, 2012
    Date of Patent: January 5, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Miao-Chun Chung, Yin-Fu Huang, Shih-Chin Lien
  • Patent number: 9082787
    Abstract: A semiconductor structure includes a substrate having a first conductive type, a well having a second conductive type formed in the substrate, a first doped region and a second doped region formed in the well, a field oxide, a first dielectric layer and a second dielectric layer. The field oxide is formed on a surface region of the well and between the first doped region and the second doped region. The first dielectric layer is formed on the surface region of the well and covers an edge portion of the field oxide. The first dielectric layer has a first thickness. The second dielectric layer is formed on the surface region of the well. The second dielectric layer has a second thickness smaller than the first thickness.
    Type: Grant
    Filed: December 23, 2013
    Date of Patent: July 14, 2015
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Yu-Hsien Chin, Chih-Chia Hsu, Yin-Fu Huang
  • Patent number: 9029947
    Abstract: A field device and method of operating high voltage semiconductor device applied with the same are provided. The field device includes a first well having a second conductive type and second well having a first conductive type both formed in the substrate (having the first conductive type) and extending down from a surface of the substrate, the second well adjacent to one side of the first well and the substrate is at the other side of the first well; a first doping region having the first conductive type and formed in the second well, the first doping region spaced apart from the first well; a conductive line electrically connected to the first doping region and across the first well region; and a conductive body insulatively positioned between the conductive line and the first well, and the conductive body correspondingly across the first well region.
    Type: Grant
    Filed: October 21, 2014
    Date of Patent: May 12, 2015
    Assignee: Macronix International Co., Ltd.
    Inventors: An-Li Cheng, Miao-Chun Chung, Chih-Chia Hsu, Yin-Fu Huang
  • Publication number: 20150035583
    Abstract: A field device and method of operating high voltage semiconductor device applied with the same are provided. The field device includes a first well having a second conductive type and second well having a first conductive type both formed in the substrate (having the first conductive type) and extending down from a surface of the substrate, the second well adjacent to one side of the first well and the substrate is at the other side of the first well; a first doping region having the first conductive type and formed in the second well, the first doping region spaced apart from the first well; a conductive line electrically connected to the first doping region and across the first well region; and a conductive body insulatively positioned between the conductive line and the first well, and the conductive body correspondingly across the first well region.
    Type: Application
    Filed: October 21, 2014
    Publication date: February 5, 2015
    Inventors: An-Li Cheng, Miao-Chun Chung, Chih-Chia Hsu, Yin-Fu Huang
  • Patent number: 8928095
    Abstract: A semiconductor device having a well, a p well implant bounded at least in part within a substrate by the well, a conductive layer disposed on the substrate, a high voltage n? (HVN?) doped well implanted in the p well implant, a high voltage p doped (HVPD) well implanted in the p well implant, and a drain n? well and a source n? well disposed in the HVN? doped well and HVPD well, respectively, is provided. A method of fabricating the semiconductor device is also provided. In certain embodiments, the method of fabricating the semiconductor device is characterized by implanting the HVN? ions at a first tilt angle and/or implanting the HVPD ions at a second tilt angle.
    Type: Grant
    Filed: August 16, 2013
    Date of Patent: January 6, 2015
    Assignee: Macronix International Co., Ltd.
    Inventors: Chien-Chung Chen, Ming-Tung Lee, Yin-Fu Huang, Shih-Chin Lien, Shyi-Yuan Wu
  • Patent number: 8896061
    Abstract: A field device and method of operating high voltage semiconductor device applied with the same are provided. The field device includes a first well having a second conductive type and second well having a first conductive type both formed in the substrate (having the first conductive type) and extending down from a surface of the substrate, the second well adjacent to one side of the first well and the substrate is at the other side of the first well; a first doping region having the first conductive type and formed in the second well, the first doping region spaced apart from the first well; a conductive line electrically connected to the first doping region and across the first well region; and a conductive body insulatively positioned between the conductive line and the first well, and the conductive body correspondingly across the first well region.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: November 25, 2014
    Assignee: Macronix International Co., Ltd.
    Inventors: An-Li Cheng, Miao-Chun Chung, Chih-Chia Hsu, Yin-Fu Huang
  • Publication number: 20140264599
    Abstract: A semiconductor device having a well, a p well implant bounded at least in part within a substrate by the well, a conductive layer disposed on the substrate, a high voltage n? (HVN?) doped well implanted in the p well implant, a high voltage p doped (HVPD) well implanted in the p well implant, and a drain n? well and a source n? well disposed in the HVN? doped well and HVPD well, respectively, is provided. A method of fabricating the semiconductor device is also provided. In certain embodiments, the method of fabricating the semiconductor device is characterized by implanting the HVN? ions at a first tilt angle and/or implanting the HVPD ions at a second tilt angle.
    Type: Application
    Filed: August 16, 2013
    Publication date: September 18, 2014
    Applicant: Macronix International Co. Ltd.
    Inventors: Chien-Chung Chen, Ming-Tung Lee, Yin-Fu Huang, Shin-Chin Lien, Shyi-Yuan Wu
  • Publication number: 20140175526
    Abstract: A semiconductor device where at least one of a portion of the first metal layer that extends from the source contact, a portion of the second metal layer that extends from the source contact, a portion of the first metal layer that extends from the drain contact, and a portion of the second metal layer that extends from the drain contact is configured to lie above a portion of or even all of the gate. Methods of fabricating and using such a semiconductor device are also provided.
    Type: Application
    Filed: December 20, 2012
    Publication date: June 26, 2014
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Kuo Hung Hsieh, Meng Shien Hsieh, Yin Fu Huang, Miao Chun Chung
  • Publication number: 20140151764
    Abstract: A semiconductor element and a manufacturing method thereof are provided. The semiconductor element includes a base, an epitaxy layer, a first well, a second well, a third well, a first heavily doping region, a second heavily doping region, a implanting region and a conductive layer. The epitaxy layer is disposed on the base. The first well, the second well and the third well are disposed in the epitaxy layer. The third well is located between the first well and the second well. A surface channel is formed between the first heavily doping region and the second heavily doping region. The implanting region is fully disposed between the surface channel and the base and disposed at a projection region of the first well, the second well and the third well.
    Type: Application
    Filed: December 5, 2012
    Publication date: June 5, 2014
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Miao-Chun Chung, Yin-Fu Huang, Shih-Chin Lien
  • Publication number: 20140106519
    Abstract: A semiconductor structure includes a substrate having a first conductive type, a well having a second conductive type formed in the substrate, a first doped region and a second doped region formed in the well, a field oxide, a first dielectric layer and a second dielectric layer. The field oxide is formed on a surface region of the well and between the first doped region and the second doped region. The first dielectric layer is formed on the surface region of the well and covers an edge portion of the field oxide. The first dielectric layer has a first thickness. The second dielectric layer is formed on the surface region of the well. The second dielectric layer has a second thickness smaller than the first thickness.
    Type: Application
    Filed: December 23, 2013
    Publication date: April 17, 2014
    Applicant: Macronix International Co., Ltd.
    Inventors: Yu-Hsien Chin, Chih-Chia Hsu, Yin-Fu Huang
  • Patent number: 8691653
    Abstract: A semiconductor structure and a manufacturing process thereof are disclosed. The semiconductor structure includes a substrate having a first conductive type, a first well having a second conductive type formed in the substrate, a doped region having the second conductive type formed in the first well, a field oxide and a second well having the first conductive type. The doped region has a first net dopant concentration. The field oxide is formed on a surface area of the first well. The second well is disposed underneath the field oxide and connected to a side of the doped region. The second well has a second net dopant concentration smaller than the first net dopant concentration.
    Type: Grant
    Filed: March 5, 2012
    Date of Patent: April 8, 2014
    Assignee: Macronix International Co., Ltd.
    Inventors: Chih-Chia Hsu, Yu-Hsien Chin, Yin-Fu Huang
  • Publication number: 20140077866
    Abstract: A field device and method of operating high voltage semiconductor device applied with the same are provided. The field device includes a first well having a second conductive type and second well having a first conductive type both formed in the substrate (having the first conductive type) and extending down from a surface of the substrate, the second well adjacent to one side of the first well and the substrate is at the other side of the first well; a first doping region having the first conductive type and formed in the second well, the first doping region spaced apart from the first well; a conductive line electrically connected to the first doping region and across the first well region; and a conductive body insulatively positioned between the conductive line and the first well, and the conductive body correspondingly across the first well region.
    Type: Application
    Filed: September 14, 2012
    Publication date: March 20, 2014
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: An-Li Cheng, Miao-Chun Chung, Chih-Chia Hsu, Yin-Fu Huang
  • Patent number: 8659080
    Abstract: A semiconductor structure includes a substrate having a first conductive type, a well having a second conductive type formed in the substrate, a first doped region and a second doped region formed in the well, a field oxide, a first dielectric layer and a second dielectric layer. The field oxide is formed on a surface region of the well and between the first doped region and the second doped region. The first dielectric layer is formed on the surface region of the well and covers an edge portion of the field oxide. The first dielectric layer has a first thickness. The second dielectric layer is formed on the surface region of the well. The second dielectric layer has a second thickness smaller than the first thickness.
    Type: Grant
    Filed: March 5, 2012
    Date of Patent: February 25, 2014
    Assignee: Macronix International Co., Ltd.
    Inventors: Yu-Hsien Chin, Chih-Chia Hsu, Yin-Fu Huang
  • Patent number: 8643072
    Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a bulk, a gate, a source, a drain and a bulk contact region. The gate is on the bulk. The source and the drain are in the bulk on opposing sides of the gate respectively. The bulk contact region is only in a region of the bulk adjacent to the source. The bulk contact region is electrically connected to the bulk.
    Type: Grant
    Filed: July 12, 2012
    Date of Patent: February 4, 2014
    Assignee: Macronix International Co., Ltd.
    Inventors: Miao-Chun Chung, An-Li Cheng, Yin-Fu Huang, Shih-Chin Lien, Shyi-Yuan Wu
  • Publication number: 20140015016
    Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a bulk, a gate, a source, a drain and a bulk contact region. The gate is on the bulk. The source and the drain are in the bulk on opposing sides of the gate respectively. The bulk contact region is only in a region of the bulk adjacent to the source. The bulk contact region is electrically connected to the bulk.
    Type: Application
    Filed: July 12, 2012
    Publication date: January 16, 2014
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Miao-Chun Chung, An-Li Cheng, Yin-Fu Huang, Shih-Chin Lien, Shyi-Yuan Wu
  • Patent number: 8586442
    Abstract: A manufacturing method for a high voltage transistor includes the following steps. A substrate is provided. A P-type epitaxial (P-epi) layer is provided above the substrate. An N-well is formed in the P-epi layer. A P-well is formed in the P-epi layer. Field oxide (FOX) layers are formed above the P-epi layer. A gate oxide (GOX) layer is formed between the FOX layers. P-type implants are doped into the P-well or N-type implants are doped into the N-well to adjust an electrical function of the high voltage transistor.
    Type: Grant
    Filed: November 28, 2012
    Date of Patent: November 19, 2013
    Assignee: Macronix International Co. Ltd.
    Inventors: Yu-Hsien Chin, Chih-Chia Hsu, Yin-Fu Huang
  • Publication number: 20130228861
    Abstract: A semiconductor structure and a manufacturing process thereof are disclosed. The semiconductor structure includes a substrate having a first conductive type, a first well having a second conductive type formed in the substrate, a doped region having the second conductive type formed in the first well, a field oxide and a second well having the first conductive type. The doped region has a first net dopant concentration. The field oxide is formed on a surface area of the first well. The second well is disposed underneath the field oxide and connected to a side of the doped region. The second well has a second net dopant concentration smaller than the first net dopant concentration.
    Type: Application
    Filed: March 5, 2012
    Publication date: September 5, 2013
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chih-Chia Hsu, Yu-Hsien Chin, Yin-Fu Huang
  • Publication number: 20130228831
    Abstract: A semiconductor structure includes a substrate having a first conductive type, a well having a second conductive type formed in the substrate, a first doped region and a second doped region formed in the well, a field oxide, a first dielectric layer and a second dielectric layer. The field oxide is formed on a surface region of the well and between the first doped region and the second doped region. The first dielectric layer is formed on the surface region of the well and covers an edge portion of the field oxide. The first dielectric layer has a first thickness. The second dielectric layer is formed on the surface region of the well. The second dielectric layer has a second thickness smaller than the first thickness.
    Type: Application
    Filed: March 5, 2012
    Publication date: September 5, 2013
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Yu-Hsien Chin, Chih-Chia Hsu, Yin-Fu Huang
  • Patent number: 8507993
    Abstract: Various aspects of the technology are directed to integrated circuit manufacturing methods and integrated circuits. In one method, a first charge type buried layer in a semiconductor material of an integrated circuit by implanting first charge type dopants of the first charge type buried layer through a sacrificial oxide over the semiconductor material and through an intermediate region of the semiconductor material transited by the implanted first charge type dopants. When the implanted dopants pass through the sacrificial oxide, damage to the semiconductor crystalline lattice is averted. If the sacrificial oxide were absent, the implanted dopants would have passed through and damaged the semiconductor crystalline lattice instead. Later, a pre-anneal oxide is grown and removed.
    Type: Grant
    Filed: August 28, 2012
    Date of Patent: August 13, 2013
    Assignee: Macronix International Co., Ltd.
    Inventors: Yin-Fu Huang, Ming Rong Chang, Shih-Chin Lien