Patents by Inventor Ying Li Fan

Ying Li Fan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to identify machines causing excursion in semiconductor manufacturing
    Patent number: 7363098
    Abstract: The present invention discloses a method that recognizes and uses the grouping patterns of process material by different machines at different process steps to identify potential problem machines causing the excursion in semiconductor manufacturing. The excursion could be a yield problem at the final test or at any inline electrical testing, metrology measurement, or inspection at different process steps. The potential problematic machines are listed in order of most likely to be problematic.
    Type: Grant
    Filed: December 19, 2005
    Date of Patent: April 22, 2008
    Assignee: TECH Semiconductor Singapore Pte Ltd
    Inventors: Choy Yow Ng, Ying Li Fan