Abstract: An optical switching system that switches optical signals in three dimensions by moving an optically transmissive microstructure. The movable microstructure is “optically transmissive” because it includes structures such as waveguides and waveguide networks. The apparatus uses MEMS and micro-machining technology to build an optical switch having an optically transmissive microstructure which moves from one position to another position in a direction (e.g., laterally, vertically, rotationally) such that incoming optical signals align over a small air gap with different waveguides, or with different inputs to the waveguides, depending on the position of the movable microstructure. As a result, the optical signals travel different optical paths (e.g., straight pass through or cross over) depending on the position of the movable microstructure. By combining optical switches in both the vertical and horizontal directions, the resulting optical switching system handles switching in three dimensions.

Abstract: An optical switching system that switches the path of an optical signal by moving a microstructure onto which a light-guiding structure is mounted. The microstructure is formed by a MEMs and semiconductor process to be integral to the substrate. The light-guiding structure may include waveguides. The microstructure moves from one position to another position (e.g., laterally, vertically, rotationally) such that incoming optical signals align over a small air gap to different optical paths, depending on the position of the movable microstructure. As a result, the optical signal propagate along different optical paths (e.g., straight pass through or cross over) depending on the position of the movable microstructure. The optical paths have a large radii of curvature so as to change the direction of the optical signal gradually, thereby reducing insertion losses.

Abstract: A three-axis micro-gyro structure having first and second micro-gyro devices that measure angular velocity around first and second rate axes extending in a plane of the micro-gyro structure and a third micro-gyro that measures angular velocity around a third rate axis perpendicular to the plane of the micro-gyro structure.

Abstract: Disclosed is a MEMS sensor including a sense element and a single anchor that supports the sense element arranged in a central hub-like fashion that reduces the effects of thermal stress. Usually, two or more anchors are required to suitably constrain the sense element's motion. The anchor disclosed herein, however, supports the sense element with connection elements having a connection geometry that substantially limits the motion of the sense element to a single-degree-of-freedom. The connection elements may include, for example, converging flexures, an extender bar, or both.

Abstract: Disclosed is a MEMS sensor including a sense element and a single anchor that supports the sense element arranged in a central hub-like fashion that reduces the effects of thermal stress. Usually, two or more anchors are required to suitably constrain the sense element's motion. The anchor disclosed herein, however, supports the sense element with connection elements having a connection geometry that substantially limits the motion of the sense element to a single-degree-of-freedom. The connection elements may include, for example, converging flexures, an extender bar, or both.

Abstract: An optical switching system that switches the path of an optical signal by moving a microstructure onto which a light-guiding structure is mounted. The microstructure is formed by a MEMs and semiconductor process to be integral to the substrate. The light-guiding structure may include waveguides. The microstructure moves from one position to another position (e.g., laterally, vertically, rotationally) such that incoming optical signals align over a small air gap to different optical paths, depending on the position of the movable microstructure. As a result, the optical signal propagate along different optical paths (e.g., straight pass through or cross over) depending on the position of the movable microstructure. The optical paths have a large radii of curvature so as to change the direction of the optical signal gradually, thereby reducing insertion losses.

Abstract: Numerous novel structures and methods are presented for their ability to correct angular and offset alignment errors caused by thermal distortion of a device formed out of dissimilar materials, such as a movable platform and waveguide coupled to a fixed platform and another waveguide. A flexure connected between two platforms corrects offset alignment errors along the centerline axis of the flexure. Thermal distortion is corrected also by varying the relative size of the two platforms and the addition of slots and/or extraneous waveguides. A waveguide may be sandwiched between two matching materials, with or without an extra thermal compensation layer portion. A method uses simple processes to build a substrate with matching waveguides on each side of the substrate. Another simple method creates a suspended structure by using simple semiconductor processes.

Abstract: This improved method and apparatus for switching optical signals uses a rotatable optically transmissive microstructure to change the optical paths of optical signals. The rotatable optically transmissive microstructure includes structures such as waveguides and waveguide networks which transmit optical signals. MEMS and micromachining technology are used to build an optical switch with a microstructure that rotates from one position to another position (e.g., laterally, vertically, rotationally) such that incoming optical signals align over a small air gap with different waveguides, or with different inputs to the waveguides, depending on the position of the microstructure. As a result, the optical signals travel different optical paths (e.g., straight pass-through or cross over) depending on the position of the microstructure.

Abstract: An improved device, which may act as a variable attenuator, changes the optical intensity of an optical signal by moving a platform onto which a light transmissive structure such as a waveguide is disposed. The light transmissive structure is positioned and aligned to receive an optical signal and positioned and aligned to transmit the optical signal. By moving the light transmissive structure into a position of reduced alignment with an input source, the light transmissive structure may receive less or none of the optical signal, thereby attenuating it. Alternatively, by moving the light transmissive structure into a position of reduced alignment with an output structure, the light transmissive structure may transmit less or none of the optical signal, thereby attenuating its transmission.

Abstract: An optical switching element has a movable optically transmissive microstructure to change the optical paths of the optical signals. The movable microstructure is “optically transmissive” because it includes structures such as waveguides and waveguide networks which transmit optical signals. The apparatus uses MEMS and micromachining technology to build an optical switch having an optically transmissive microstructure which moves from one position to another position in a direction (e.g., laterally, vertically, rotationally) such that incoming optical signals align over a small air gap with different waveguides, or with different inputs to the waveguides, depending on the position of the movable microstructure. As a result, the optical signals travel different optical paths (e.g., straight pass through or cross over) depending on the position of the movable microstructure.

Abstract: An optical switching system that switches optical signals in three dimensions by moving an optically transmissive microstructure. The movable microstructure is “optically transmissive” because it includes structures such as waveguides and waveguide networks. The apparatus uses MEMS and micro-machining technology to build an optical switch having an optically transmissive microstructure which moves from one position to another position in a direction (e.g., laterally, vertically, rotationally) such that incoming optical signals align over a small air gap with different waveguides, or with different inputs to the waveguides, depending on the position of the movable microstructure. As a result, the optical signals travel different optical paths (e.g., straight pass through or cross over) depending on the position of the movable microstructure. By combining optical switches in both the vertical and horizontal directions, the resulting optical switching system handles switching in three dimensions.