Patents by Inventor Yingnan Kang

Yingnan Kang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputtering gap measurement apparatus and magnetron sputtering device
    Patent number: 10886114
    Abstract: A magnetron sputtering device in one embodiment of the present disclosure includes a support table supporting thereon a base substrate, and a floating mask arranged at a first side of the support table and substantially parallel to the support table.
    Type: Grant
    Filed: August 10, 2017
    Date of Patent: January 5, 2021
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
    Inventor: Yingnan Kang
  • SPUTTERING GAP MEASUREMENT APPARATUS AND MAGNETRON SPUTTERING DEVICE
    Publication number: 20190057850
    Abstract: A magnetron sputtering device in one embodiment of the present disclosure includes a support table supporting thereon a base substrate, and a floating mask arranged at a first side of the support table and substantially parallel to the support table.
    Type: Application
    Filed: August 10, 2017
    Publication date: February 21, 2019
    Applicants: BOE TECHNOLOGY GROUP CO., LTD., ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
    Inventor: Yingnan Kang