Abstract: A capacitive angular position sensor, including a stationary disk and a rotary disk, the disks disposed parallel to each other and each having, on one of its faces, a patterned conductive layer, wherein the conductive layer on the stationary disk includes—a plurality of first electrodes, each capacitively coupled to at least a portion of the conductive layer on the rotary disk, the capacitive coupling being variable with the angular position, a second electrode, formed as a ring and capacitively coupled with at least a portion of the conductive layer on the rotary disk and a third electrode, formed as a ring and disposed so as to have capacitive coupling with the conductive layer on the rotary disk, the capacitive coupling being significantly lower than the capacitive coupling between the second electrode and the conductive layer on the rotary disk.

Abstract: A temperature-stabilized MEMS device in which heat is generated by ohmic heating as an electric current passes through at least part of one of the structural layers of the device. Various implementation options are disclosed in which the heating occurs in a device layer (25) of the device, either in an outer frame (2) or within the area of an active structure (3), or where heating occurs within a substrate (1) or a cover (8) of the device. One application of particular relevance is a gyroscope device.

Abstract: A temperature-stabilized MEMS device in which heat is generated by ohmic heating as an electric current passes through at least part of one of the structural layers of the device. Various implementation options are disclosed in which the heating occurs in a device layer (25) of the device, either in an outer frame (2) or within the area of an active structure (3), or where heating occurs within a substrate (1) or a cover (8) of the device. One application of particular relevance is a gyroscope device.

Abstract: A planar Coriolis gyroscope includes at least two counter oscillating masses attached to a common rigid frame by one or more elastic members defining an excitation axis. The frame is attached to a support region by one or more additional elastic members which together with the masses define a Coriolis resonator. The Coriolis resonator responds to inertial rotation of the gyroscope and in conjunction with a position pickoff provides a signal indicative on the gyroscope inertial rotation.

Abstract: A multi-axis force-balance accelerometer has a proof mass included within an enclosure. An electrically conductive tether, flexible in 6 degrees of freedom, provides a compliant electrically conductive link between the proof mass and the enclosure. Mechanical stops limit a range of motion of the proof mass. The enclosure includes captive plates and force balancing control loops for positioning the proof mass in a null position within the enclosure for each of the 3 rectilinear reference axes, and in a null position within the enclosure for each of 3 angular reference axes. The electrically conductive tether is sufficiently mechanically compliant that, on deactivation of the force balancing control loops for the rectilinear axes, the proof mass falls so as to rest on the mechanical stops.

Abstract: A planar Coriolis gyroscope comprising at least two counter oscillating masses attached to a common rigid frame by means of a first plurality of elastic members and constituting an excitation axis, said frame is attached to a support region by means of a second plurality of elastic members which together with the masses constitute at least one Coriolis resonator.

Abstract: A method for calibrating a rotational angle sensor having a rotor (12) coupled to a rotating shaft (10) in a manner which is faithful to the rotational angle, a stator (16), and a scanning means (14) arranged on the stator (16). The scanning means (14) scans a material measure of the rotor (12) and generates measured angle values associated with the rotational angle position of the rotor (12). A laser gyroscope (18) measures the angular velocity of the shaft (10). The signals from the laser gyroscope (18) which are dependent on the angular velocity of the shaft (10) are integrated over time with respect to the rotational angle. The measured angle values from the scanning means (14) are compared with reference angle values, and correction variables are formed from the differences. During measurement of the rotational angle, the measured angle values are corrected using the correction variable.

Abstract: The present invention has three aspects: 1. A concept for a force-balanced accelerometer in which the proof mass is levitated inside an enclosure and has an electrically conductive path to the enclosure. 2. A planar Implementation of the invention. 3. Implementation of the invention using MEMS (Micro Electro Mechanical System) technology.

Abstract: The present invention discloses an improved planar, dual-axis, resonator gyroscope with mechanical coupling of adjacent vibrating members. The primary-mode flexible hinges include a tangential torsion element that largely decouples the out-of-plane resonant frequency from the wafer thickness. The use of separate plates for the force-balance and for the electric spring enables decoupling of the two functions. The invention also provides resonant frequency servo-loop for locking of the sense-mode resonant frequency to the drive-mode frequency, an online self-test, a split force balance loop for self cancellation of the quadrature signal, decoupling of the force-balance and resonant frequency servo-loops and stabilization of the inertial rate-sensing sensitivity—when operated in an open loop mode, all without interfering with the normal operation of the gyroscope.

Abstract: A method for calibrating a rotational angle sensor having a rotor (12) coupled to a rotating shaft (10) in a manner which is faithful to the rotational angle, a stator (16), and a scanning means (14) arranged on the stator (16). The scanning means (14) scans a material measure of the rotor (12) and generates measured angle values associated with the rotational angle position of the rotor (12). A laser gyroscope (18) measures the angular velocity of the shaft (10). The signals from the laser gyroscope (18) which are dependent on the angular velocity of the shaft (10) are integrated over time with respect to the rotational angle. The measured angle values from the scanning means (14) are compared with reference angle values, and correction variables are formed from the differences. During measurement of the rotational angle, the measured angle values are corrected using the correction variable.

Abstract: The present invention discloses an improved planar, dual-axis, resonator gyroscope with mechanical coupling of adjacent vibrating members. The primary-mode flexible hinges include a tangential torsion element that largely decouples the out-of-plane resonant frequency from the wafer thickness. The use of separate plates for the force-balance and for the electric spring enables decoupling of the two functions. The invention also provides resonant frequency servo-loop for locking of the sense-mode resonant frequency to the drive-mode frequency, an online self-test, a split force balance loop for self cancellation of the quadrature signal, decoupling of the force-balance and resonant frequency servo-loops and stabilization of the inertial rate-sensing sensitivity—when operated in an open loop mode, all without interfering with the normal operation of the gyroscope.

Abstract: A capacitive rain sensor for activating automotive window wipers includes: capacitive plates, electronic circuitry for sensing the capacitance between said plates, processing the sensed capacitance signal, and generating wipe commands. The capacitive plates are protected from water adsorption and condensation by means of a hermetic enclosure. The interconnection between the inside and outside of the enclosure is optionally implemented by means of conductors printed on the window. Wiper-induced and other parasitic signals are rejected by means of an adaptive filter Optional radiation sensor is utilized to suppress solar induced fast temperature variations. An optional far-field cancellation plate is utilized to minimize false wipes due to nearby objects.

Abstract: A capacitive motion encoder, for sensing the position of a moving object relative to a stationary object, includes at least one stationary element, coupled to the stationary object and a moving element, coupled to the moving object and in proximity to the stationary element. A field transmitter generates an electrostatic field, which is modulated by a change in capacitance between the stationary and moving elements responsive to relative motion of the elements. A conductive shield, is electrically decoupled from both the moving and the stationary objects, and encloses the moving and stationary elements so as to shield the elements from external electrical interference. Processing circuitry is coupled to sense the modulated electrostatic field and to determine responsive thereto a measure of the position of the moving object.

Abstract: A capacitive motion encoder, for sensing the position of a moving object relative to a stationary object, includes at least one stationary element, coupled to the stationary object and a moving element, coupled to the moving object and in proximity to the stationary element. A field transmitter generates an electrostatic field, which is modulated by a change in capacitance between the stationary and moving elements responsive to relative motion of the elements. A conductive shield, is electrically decoupled from both the moving and the stationary objects, and encloses the moving and stationary elements so as to shield the elements from external electrical interference. Processing circuitry is coupled to sense the modulated electrostatic field and to determine responsive thereto a measure of the position of the moving object.

Abstract: A capacitive motion encoder, for sensing the position of a moving object relative to a stationary object, includes at least one stationary element, coupled to the stationary object and a moving element, coupled to the moving object and in proximity to the stationary element. A field transmitter generates an electrostatic field, which is modulated by a change in capacitance between the stationary and moving elements responsive to relative motion of the elements. A conductive shield, is electrically decoupled from both the moving and the stationary objects, and encloses the moving and stationary elements so as to shield the elements from external electrical interference. Processing circuitry is coupled to sense the modulated electrostatic field and to determine responsive thereto a measure of the position of the moving object.

Abstract: A shaft revolution counter including one or more reed magnetic sensors interacting with one or more magnets attached to the shaft. The interaction generates voltage spikes in the reed magnetic sensors that are used as input signal to an electronic non-volatile counter, as well as its sole power source.

Abstract: A shaft revolution counter comprising one or more reed magnetic sensors interacting with one or more magnets attached to the shaft. The interaction generates voltage spikes in the reed magnetic sensors that are used as input signal to an electronic non-volatile counter, as well as its sole power source.

Abstract: A capacitive motion encoder, for sensing the position of a moving object relative to a stationary object, includes at least one stationary element, coupled to the stationary object and a moving element, coupled to the moving object and in proximity to the stationary element. A field transmitter generates an electrostatic field, which is modulated by a change in capacitance between the stationary and moving elements responsive to relative motion of the elements. A conductive shield, is electrically decoupled from both the moving and the stationary objects, and encloses the moving and stationary elements so as to shield the elements from external electrical interference. Processing circuitry is coupled to sense the modulated electrostatic field and to determine responsive thereto a measure of the position of the moving object.

Abstract: A capacitive motion encoder, for sensing the position of a moving object relative to a stationary object, includes at least one stationary element, coupled to the stationary object and a moving element, coupled to the moving object and in proximity to the stationary element. A field transmitter generates an electrostatic field, which is modulated by a change in capacitance between the stationary and moving elements responsive to relative motion of the elements. A conductive shield, is electrically decoupled from both the moving and the stationary objects, and encloses the moving and stationary elements so as to shield the elements from external electrical interference. Processing circuitry is coupled to sense the modulated electrostatic field and to determine responsive thereto a measure of the position of the moving object.

Abstract: A fringing-field capacitive liquid level sensor comprising an electrically insulating substrate, having a first and a second pattern of conductive capacitance plates plated on the substrate. Each pattern constitutes a fringing-field capacitor having a capacitance the value of which is both dependent on the liquid level and dependent on the dielectric constant of the liquid. The ratio of the two capacitances, however, is proportional to the liquid level and independent of the dielectric constant of the liquid. The fringing-field capacitive liquid level sensor may be used for measurement of liquids of substantially any dielectric constant without requiring full-scale calibration or knowledge of, and calibration for, dielectric constant of the liquid to be measured. Compensation for tilt angle can be provided through the addition of a second level sensor.