Patents by Inventor Yogendra Chawla

Yogendra Chawla has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9214909
    Abstract: A scalable radio frequency (RF) generator system including at least one power supply, at least one power amplifier receiving input from the power supply, and a power supply control module, and a system controller. Output from the at least one power supply can be combined and applied to each of the power amplifiers. Output form each of the at least one power amplifiers can be combined to generate a single RF signal. A compensator module controls operation of the at least one power supply. The compensator module, system control module, and power supply controller communicate in a daisy chain configuration.
    Type: Grant
    Filed: July 27, 2006
    Date of Patent: December 15, 2015
    Assignee: MKS Instruments, Inc.
    Inventors: Aaron T. Radomski, Jonathan Smyka, Daniel J. Lincoln, Yogendra Chawla, David J. Coumou, Vadim Lubomirsky
  • Publication number: 20070024362
    Abstract: A scalable radio frequency (RF) generator system including at least one power supply, at least one power amplifier receiving input from the power supply, and a power supply control module, and a system controller. Output from the at least one power supply can be combined and applied to each of the power amplifiers. Output form each of the at least one power amplifiers can be combined to generate a single RF signal. A compensator module controls operation of the at least one power supply. The compensator module, system control module, and power supply controller communicate in a daisy chain configuration.
    Type: Application
    Filed: July 27, 2006
    Publication date: February 1, 2007
    Applicant: MKS Instruments, Inc.
    Inventors: Aaron Radomski, Jonathan Smyka, Daniel Lincoln, Yogendra Chawla, David Coumou, Vadim Lubomirsky