Patents by Inventor Yoh-ichi Araki

Yoh-ichi Araki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron beam excited plasma system
    Patent number: 5397956
    Abstract: An electron beam excited plasma system in which an electron beam is extracted from a discharge plasma and accelerated, the accelerated electrons are applied to a etching gas to convert the etching gas into plasma, and the resulting gas plasma is caused to act on a wafer.
    Type: Grant
    Filed: January 13, 1993
    Date of Patent: March 14, 1995
    Assignee: Tokyo Electron Limited
    Inventors: Yoh-ichi Araki, Shuuji Mochizuki