Patents by Inventor Yoichi Kanuma

Yoichi Kanuma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Non-volatile semiconductor memory device with barrier and insulating films
    Patent number: 6437424
    Abstract: A barrier film of a SiON film is formed below an interlayer insulating film which is a single layer film or laminated film of an TEOS film or SOG film covering a floating gate 4 and control gate 6. The SiON film which is good in moisture blocking but poor in coverage is covered with another TEOS film which is better in coverage than the SiON film, thereby improving the barrier property of the barrier film. Such a configuration prevents moisture or H atoms contained in the TEOS film or SOG film from being diffused and trapped by the tunneling oxide film 3, thereby improving the trap-up rate and hence endurance characteristic and extending the operation life of a memory cell.
    Type: Grant
    Filed: February 16, 2000
    Date of Patent: August 20, 2002
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Takashi Noma, Masaji Hara, Kimihide Saito, Ryo Kawai, Yoichi Kanuma, Kazuo Okada