Abstract: An optical film-thickness measuring apparatus capable of eliminating an influence of a fluid flow on optical fiber cables when the fluid, such as pure water, is flowing through a through-hole of a polishing pad, and capable of achieving highly accurate measuring of a film thickness is disclosed. The optical film-thickness measuring apparatus includes: a light-emitting optical fiber cable coupled to a light source; a light-receiving optical fiber cable arranged to receive light reflected from the workpiece; a cable housing surrounding the light-emitting optical fiber cable and the light-receiving optical fiber cable; and a flow-passage structure defining a fluid passage adjacent to the light-emitting optical fiber cable and the light-receiving optical fiber cable. The light-emitting optical fiber cable and the light-receiving optical fiber cable are supported by at least one of the cable housing and the flow-passage structure.

Abstract: A polishing apparatus which can measure a film thickness with high accuracy without affecting a polishing rate of a wafer is disclosed. The polishing apparatus includes: a polishing head configured to press a wafer against a polishing pad; an illuminating fiber having a distal end disposed in a flow passage formed in the polishing table; a spectrometer configured to resolve reflected light from the wafer in accordance with wavelength and measure an intensity of the reflected light at each of the wavelengths; a light-receiving fiber having a distal end disposed in the flow passage; a liquid supply line communicating with the flow passage; a gas supply line communicating with the flow passage; a liquid supply valve attached to the liquid supply line; a gas supply valve attached to the gas supply line; and an operation controller configured to control operations of the liquid supply valve and the gas supply valve.

Abstract: A field-effect transistor includes a channel layer in which a two-dimensional electron gas is formed, an electron supply layer located on the channel layer, a source electrode located on the electron supply layer, a drain electrode located on the electron supply layer, a gate electrode located on the electron supply layer between the source electrode and the drain electrode, and an embedded layer embedded in the channel layer deeper than a two-dimensional electron gas region where the two-dimensional electron gas is formed, directly opposite an edge of the gate electrode on a side of the gate electrode toward the drain electrode. The embedded layer is a material that increases potential of the two-dimensional electron gas region.

Abstract: A field-effect transistor includes a channel layer in which a two-dimensional electron gas is formed, an electron supply layer located on the channel layer, a source electrode located on the electron supply layer, a drain electrode located on the electron supply layer, a gate electrode located on the electron supply layer between the source electrode and the drain electrode, and an embedded layer embedded in the channel layer deeper than a two-dimensional electron gas region where the two-dimensional electron gas is formed, directly opposite an edge of the gate electrode on a side of the gate electrode toward the drain electrode. The embedded layer is a material that increases potential of the two-dimensional electron gas region.

Abstract: A foreign matter removing device which is capable of reliably removing foreign matter from between a double tire includes at least one foreign matter removing member interposed in a space of at least one double tire. A dimension in a width direction of the foreign matter removing member in a vicinity of a tip end portion thereof is larger than a dimension in a diameter direction from an outer peripheral portion of a hub, on which the double tire is fitted, to an outer peripheral portion of a rim of at least the one double tire.

Abstract: A foreign matter removing device which hardly damages a tire or interferes with traveling, and is capable of reliably removing a foreign matter is provided. For this purpose, the foreign matter removing device includes at least one foreign matter removing member (17) interposed in a space of at least one double tire (12) of the double tires (12). A dimension (W) in a width direction of the foreign matter removing member in a vicinity of a tip end portion (17B) is larger than a dimension (D) in a diameter direction from an outer peripheral portion (27A) of a hub (27), on which at least the one double tire is fitted, to an outer peripheral portion (32A) of a rim (32) of at least the one double tire.

Abstract: An electronic-parts mounting apparatus includes an electronic-parts feeder. A mounting head operates for carrying electronic parts from the electronic-parts feeder. The mounting head includes a plurality of nozzles for holding the electronic parts respectively. An electronic-parts mounting portion operates for enabling the mounting head to mount the electronic parts on a circuit board. A first mechanism operates for rotating each of the nozzles. A second mechanism operates for moving each of the nozzles upward and downward. The first mechanism may include a pinion provided on an outer circumferential surface of each of the nozzles, and a rack meshing with the pinion.

Abstract: A lubricating structure for a wheel driving apparatus in which a wheel hub (7) is rotatably supported by a wheel mounting body (1). An output side of a hydraulic motor (31) is attached to the mounting body and is coupled to a drive shaft (6) which is engageably inserted into a shaft bore (50) of the wheel mounting body. The drive shaft is coupled to the wheel hub via a reduction gear mechanism (10) and a clutch mechanism (11), and a braking mechanism (37) is mounted between the wheel hub and the wheel mounting body. The lubricating structure is characterized in that an annular space (51), formed between the shaft bore and the drive shaft, communicates via individual lubricable portions with a lubricant oil inlet (103) and a peripheral port (55). Also, the lubricant oil is supplied from the lubricant oil inlet and is discharged from the port.