Abstract: A substrate processing apparatus includes a first unit block including a first substrate transfer region, a first and a second processing modules provided to face a first and a second sides of the first substrate transfer region in a left-right direction, and a first and a second transfer mechanisms provided at the first and the second sides and configured to deliver a substrate to the first and the second processing modules; a second unit block, stacked on the first unit block, including a second substrate transfer region and a third transfer mechanism; a substrate carry-in/out block provided at a first side of a stack of the unit blocks and configured to deliver the substrate to the first and the third transfer mechanisms; a relay block provided at a second side of the stack and configured to deliver the substrate to the second and the third transfer mechanisms.

Abstract: An exposure apparatus includes: an exposure illumination optical system illuminating a spatial light modulator which has a plurality of spatial light modulation elements having a reflecting surface disposed on a disposition plane; a projection optical system projecting light from the spatial light modulator to an exposed substrate; a first detection unit detecting light from the reflecting surface; a second detection unit which is a detection unit detecting light from the reflecting surface and has a detection field of view larger than that of the first detection unit; and a position changing mechanism changing a positional relationship among the first detection unit, the second detection unit, and the spatial light modulator to either a first positional relationship in which the spatial light modulator faces the first detection unit and a second positional relationship in which the spatial light modulator faces the second detection unit.

Abstract: A diagnostic system, method, and a computer-readable storage medium for determining a severity of a gastric condition, such as gastritis, in a subject are disclosed. The diagnostic system includes a processor that obtains an image of a stomach of the subject collected by an endoscope. The processor can compare the subject image with reference normal and abnormal stomach images. If the subject image is abnormal, the processor can generate a subject abnormality image indicative of the differences between the subject image and the normal image. By comparing the generated subject abnormality image with reference abnormality images representative of different severity levels of gastritis, the processor can diagnose the subject as having a particular severity level of gastritis.

Abstract: In a drive method for a spatial light modulator, out of a first boundary region and a second boundary region arranged adjacently in a Y-direction and extending in an X-direction, mirror elements arranged at a first pitch not resolved by a projection optical system, in the X-direction in the first boundary region are set in the phase 0, and the other mirror elements therein are set in the phase ?; mirror elements arranged at a second pitch not resolved by the projection optical system, in the X-direction in the second boundary region are set in the phase ?, and the other mirror elements therein are set in the phase 0.

Abstract: A diagnostic system, method, and a computer-readable storage medium for determining a severity of a gastric condition, such as gastritis, in a subject are disclosed. The diagnostic system includes a processor that obtains an image of a stomach of the subject collected by an endoscope. The processor can compare the subject image with reference normal and abnormal stomach images. If the subject image is abnormal, the processor can generate a subject abnormality image indicative of the differences between the subject image and the normal image. By comparing the generated subject abnormality image with reference abnormality images representative of different severity levels of gastritis, the processor can diagnose the subject as having a particular severity level of gastritis.

Abstract: A firewall device comprises a storage unit that stores therein one or more rules related to blocking a request for each of a plurality of WEB servers independently of the rule for another WEB server; a feature-amount calculating unit that calculates a feature amount for each of the WEB servers based on a number of detections with regard to each index in each of the WEB servers; and a rule updating unit that updates a rule stored in the storage unit for each of the WEB servers based on the feature amount calculated by the feature-amount calculating unit.

Abstract: A diagnostic system, method, and a computer-readable storage medium for determining a severity of a gastric condition, such as gastric cancer, in a subject are disclosed. The diagnostic system includes a processor that can obtain various images of a stomach of the subject including wavelength images and generate difference images from the wavelength images. The processor can compare the subject images with reference images representative of different severity levels of gastric cancer, or can input the subject images into a learned model trained using the reference images stored in the database to extract a feature pattern corresponding to a severity of gastric cancer to diagnose the subject as having a particular severity level of gastric cancer.

Abstract: A system that can include a processor that obtains voice data of a subject. The processor can compare the voice data of the subject with reference normal and abnormal voice data. If the voice data of the subject is abnormal, the processor can generate an abnormal subject voice data that is indicative of differences between the subject voice data and the normal voice data. By comparing the generated abnormal subject voice data with the reference normal and abnormal voice data, the processor can determine what condition the subject may be suffering from and the severity of that condition.

Abstract: A mirror array device, and related exposure apparatus and manufacturing method, for driving a spatial light modulator that includes: setting, in an array of mirror elements, mirror elements in a first state for turning incident light into reflected light with the same phase as that of the incident light or with a phase different by a first phase from that of the incident light and mirror elements in a second state for turning incident light into reflected light with a phase different approximately 180° from the first phase to an arrangement with a first phase distribution; and setting, in the array of mirror elements, the first mirror elements and the second mirror elements to an arrangement with a second phase distribution which is an inversion of the first phase distribution.

Abstract: A spatial light modulator includes a first reflective surface which reflects incident light and is movable between a first position and a second position, the first and the second positions being located along a first axis, a second reflective surface which reflects the incident light, is arranged at a position where the second reflective surface is adjacent to the first reflective surface in a direction along a second axis crossing the first axis, and is movable between a third position and a fourth position, the third and the fourth positions being located along a direction parallel to the first axis, and a reflective part which reflects the incident light and is arranged between the first reflective surface and the second reflective surface in the direction along the second axis, wherein a distance between the first position and the reflective part, defined in the direction parallel to the first axis, is configured to attenuate light reflected at the reflective part by using light reflected at the first re

Abstract: A mirror array device, and related exposure apparatus and manufacturing method, for driving a spatial light modulator that includes: setting, in an array of mirror elements, mirror elements in a first state for turning incident light into reflected light with the same phase as that of the incident light or with a phase different by a first phase from that of the incident light and mirror elements in a second state for turning incident light into reflected light with a phase different approximately 180° from the first phase to an arrangement with a first phase distribution; and setting, in the array of mirror elements, the first mirror elements and the second mirror elements to an arrangement with a second phase distribution which is an inversion of the first phase distribution.

Abstract: A method of driving a spatial light modulator includes: setting, in an array of mirror elements, mirror elements in a first state for turning incident light into reflected light with the same phase as that of the incident light or with a phase different by a first phase from that of the incident light and mirror elements in a second state for turning incident light into reflected light with a phase different approximately 180° from the first phase to an arrangement with a first phase distribution; and setting, in the array of mirror elements, the first mirror elements and the second mirror elements to an arrangement with a second phase distribution which is an inversion of the first phase distribution.

Abstract: A firewall device comprises a storage unit that stores therein one or more rules related to blocking a request for each of a plurality of WEB servers independently of the rule for another WEB server; a feature-amount calculating unit that calculates a feature amount for each of the WEB servers based on a number of detections with regard to each index in each of the WEB servers; and a rule updating unit that updates a rule stored in the storage unit for each of the WEB servers based on the feature amount calculated by the feature-amount calculating unit.

Abstract: A spatial light modulator has a plurality of mirror elements each of which is controllable into a first state in which the mirror element reflects incident light with a change in a phase thereof by a first phase and a second state in which the mirror element reflects the incident light with a change in the phase thereof by a second phase 180° different from the first phase; and a boundary portion arranged between the mirror elements, which changes the phase of the incident light by a third phase substantially (90°+k·180°) (where k is an integer) different from the first phase. In projecting a pattern with the use of the spatial light modulator, an error caused in the pattern can be reduced even if the light quantity of light passing a gap region between the optical elements in the spatial light modulator is large.

Abstract: A spatial light modulator has a plurality of mirror elements each of which is controllable into a first state in which the mirror element reflects incident light with a change in a phase thereof by a first phase and a second state in which the mirror element reflects the incident light with a change in the phase thereof by a second phase 180° different from the first phase; and a boundary portion arranged between the mirror elements, which changes the phase of the incident light by a third phase substantially (90°+k·180°) (where k is an integer) different from the first phase. In projecting a pattern with the use of the spatial light modulator, an error caused in the pattern can be reduced even if the light quantity of light passing a gap region between the optical elements in the spatial light modulator is large.

Abstract: A device manufacturing method includes forming, in a first layer, first line patterns of which longitudinal direction is a first direction; and forming, in a second layer above the first layer, second line patterns of which longitudinal direction is a second direction crossing the first direction, and third line patterns of which longitudinal direction is the second direction and having a etching characteristic different from an etching characteristic of the second line patterns. At least one edge portion of each of the second line patterns and at least one edge portion of each of the third line patterns are adjacent. As viewed from above the second layer, the adjacent at least one edge portions of one of the second and third line patterns are positioned between two adjacent line patterns of the first line pattern.

Abstract: A method of driving a spatial light modulator includes: setting, in an array of mirror elements, mirror elements in a first state for turning incident light into reflected light with the same phase as that of the incident light or with a phase different by a first phase from that of the incident light and mirror elements in a second state for turning incident light into reflected light with a phase different approximately 180° from the first phase to an arrangement with a first phase distribution; and setting, in the array of mirror elements, the first mirror elements and the second mirror elements to an arrangement with a second phase distribution which is an inversion of the first phase distribution.

Abstract: A method of driving a spatial light modulator includes: setting, in an array of mirror elements, mirror elements in a first state for turning incident light into reflected light with the same phase as that of the incident light or with a phase different by a first phase from that of the incident light and mirror elements in a second state for turning incident light into reflected light with a phase different approximately 180° from the first phase to an arrangement with a first phase distribution; and setting, in the array of mirror elements, the first mirror elements and the second mirror elements to an arrangement with a second phase distribution which is an inversion of the first phase distribution.

Abstract: A device manufacturing method includes forming, in a first layer, first line patterns of which longitudinal direction is a first direction; and forming, in a second layer above the first layer, second line patterns of which longitudinal direction is a second direction crossing the first direction, and third line patterns of which longitudinal direction is the second direction and having a etching characteristic different from an etching characteristic of the second line patterns. At least one edge portion of each of the second line patterns and at least one edge portion of each of the third line patterns are adjacent. As viewed from above the second layer, the adjacent at least one edge portions of one of the second and third line patterns are positioned between two adjacent line patterns of the first line pattern.

Abstract: A nonvolatile random access memory including a memory cell array including banks, each bank including rows; an address latch circuit; and a control circuit receiving a first set of signals including a precharge command and a first row address, and a second set of signals including an active command and a second row address. The control circuit executes a first operation in which one of the banks is deactivated when the first set of signals is loaded, executes a second operation in which the first row address is loaded when the first set of signals is loaded, and executes a third operation in which at least one of the rows in the bank is selected and activated based on the second row address when the second set of signals is loaded after the first set of signals.