Patents by Inventor YONATAN OREN
YONATAN OREN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240085333Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.Type: ApplicationFiled: August 18, 2023Publication date: March 14, 2024Applicant: NOVA LTD.Inventors: Elad Schleifer, Yonatan Oren, Amir Shayari, Eyal Hollander, Valery Deich, Shimon YALOV, Gilad BARAK
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Patent number: 11927481Abstract: A polarized Raman Spectrometric system for defining parameters of a polycrystalline material, said system comprising: a polarized Raman Spectrometric apparatus, a computer-controlled sample stage for positioning a sample at different locations, and a computer comprising a processor and an associated memory.Type: GrantFiled: December 28, 2022Date of Patent: March 12, 2024Assignee: NOVA LTD.Inventors: Gilad Barak, Yonatan Oren
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Patent number: 11906434Abstract: A method and system are presented for use in measuring one or more characteristics of patterned structures. The method comprises: performing measurements on a patterned structure by illuminating the structure with exciting light to cause Raman scattering of one or more excited regions of the pattern structure, while applying a controlled change of at least temperature condition of the patterned structure, and detecting the Raman scattering, and generating corresponding measured data indicative of a temperature dependence of the detected Raman scattering; and analyzing the measured data and generating data indicative of spatial profile of one or more properties of the patterned structure.Type: GrantFiled: April 5, 2022Date of Patent: February 20, 2024Assignee: NOVA LTD.Inventor: Yonatan Oren
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Publication number: 20240019375Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up.Type: ApplicationFiled: September 14, 2021Publication date: January 18, 2024Applicant: NOVA LTD.Inventors: Eyal Hollander, Gilad BARAK, Elad Schleifer, Yonatan OREN, Amir Shayari
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Patent number: 11860104Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up.Type: GrantFiled: August 1, 2022Date of Patent: January 2, 2024Assignee: NOVA LTDInventors: Eyal Hollander, Gilad Barak, Elad Schleifer, Yonatan Oren, Amir Shayari
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Patent number: 11802829Abstract: Photoreflectance (PR) spectroscopy system and method for accumulating separately a “pump on” light beam and a “pump off light beam reflecting off a sample. The system comprises: (a) a probe source for producing a probe beam, the probe beam is used for measuring spectral reflectivity of a sample, (b) a pump source for producing a pump beam, (c) at least one spectrometer, (d) a first modulation device to allow the pump beam to alternatingly modulate the spectral reflectivity of the sample, so that, a light beam reflecting from the sample is alternatingly a “pump on” light beam and a “pump off light beam, (e) a second modulation device in a path of the light beam reflecting off the sample to alternatingly direct the “pump on” light beam and the “pump off light beam to the at least one spectrometer, and (f) a computer.Type: GrantFiled: December 8, 2020Date of Patent: October 31, 2023Assignee: NOVA LTD.Inventors: Yonatan Oren, Gilad Barak
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Publication number: 20230296436Abstract: Abstract: Systems and methods for metrology of workpieces such as wafers, using spectrometry of multi- spot- arrays formed over a test area of the tester workpiece, for optically measuring characteristics of the tested workpiece, where the optical metrology system is configured such that the distribution of energy density or flux of the multi-spot-array over the test area of the tested workpiece is such that prevents affecting the workpiece during its testing.Type: ApplicationFiled: July 5, 2021Publication date: September 21, 2023Applicant: NOVA LTD.Inventors: Yonatan OREN, Eyal Hollander, Elad Schleifer, Gilad BARAK
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Publication number: 20230296434Abstract: A polarized Raman Spectrometric system for defining parameters of a polycrystalline material, said system comprising: a polarized Raman Spectrometric apparatus, a computer-controlled sample stage for positioning a sample at different locations, and a computer comprising a processor and an associated memory.Type: ApplicationFiled: December 28, 2022Publication date: September 21, 2023Applicant: NOVA LTD.Inventors: Gilad BARAK, Yonatan OREN
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Patent number: 11740183Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.Type: GrantFiled: November 24, 2020Date of Patent: August 29, 2023Assignee: Nova Ltd.Inventors: Elad Schleifer, Yonatan Oren, Amir Shayari, Eyal Hollander, Valery Deich, Shimon Yalov, Gilad Barak
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Publication number: 20230168200Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy.Type: ApplicationFiled: August 1, 2022Publication date: June 1, 2023Applicant: NOVA LTD.Inventors: Eyal Hollander, Gilad BARAK, Elad Schleifer, Yonatan OREN, Amir Shayari
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Publication number: 20230044886Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.Type: ApplicationFiled: November 24, 2020Publication date: February 9, 2023Applicant: NOVA MEASURING INSTRUMENTS LTD.Inventors: Elad Schleifer, Yonatan Oren, Amir Shayari, Eyal Hollander, Valery Deich, Shimon YALOV, Gilad BARAK
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Publication number: 20230035404Abstract: A combined OCD and photoreflectance system and method for improving the OCD performance in measurements of optical properties of a target sample.Type: ApplicationFiled: December 24, 2020Publication date: February 2, 2023Applicant: NOVA LTD.Inventors: Yonatan OREN, Gilad BARAK
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Publication number: 20230003637Abstract: Photoreflectance (PR) spectroscopy system and method for accumulating separately a “pump on” light beam and a “pump off light beam reflecting off a sample. The system comprises: (a) a probe source for producing a probe beam, the probe beam is used for measuring spectral reflectivity of a sample, (b) a pump source for producing a pump beam, (c) at least one spectrometer, (d) a first modulation device to allow the pump beam to alternatingly modulate the spectral reflectivity of the sample, so that, a light beam reflecting from the sample is alternatingly a “pump on” light beam and a “pump off light beam, (e) a second modulation device in a path of the light beam reflecting off the sample to alternatingly direct the “pump on” light beam and the “pump off light beam to the at least one spectrometer, and (f) a computer.Type: ApplicationFiled: December 8, 2020Publication date: January 5, 2023Applicant: NOVA LTD.Inventors: Yonatan OREN, Gilad BARAK
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Patent number: 11543294Abstract: A polarized Raman Spectrometric system for defining parameters of a polycrystaline material, the system comprises a polarized Raman Spectrometric apparatus, a computer-controlled sample stage for positioning a sample at different locations, and a computer comprising a processor and an associated memory. The polarized Raman Spectrometric apparatus generates signal(s) from either small sized spots at multiple locations on a sample or from an elongated line-shaped points on the sample, and the processor analyzes the signal(s) to define the parameters of said polycrystalline material.Type: GrantFiled: July 25, 2019Date of Patent: January 3, 2023Assignee: NOVA LTD.Inventors: Gilad Barak, Yonatan Oren
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Publication number: 20220373465Abstract: A method and system are presented for use in measuring one or more characteristics of patterned structures. The method comprises: performing measurements on a patterned structure by illuminating the structure with exciting light to cause Raman scattering of one or more excited regions of the pattern structure, while applying a controlled change of at least temperature condition of the patterned structure, and detecting the Raman scattering, and generating corresponding measured data indicative of a temperature dependence of the detected Raman scattering; and analyzing the measured data and generating data indicative of spatial profile of one or more properties of the patterned structure.Type: ApplicationFiled: April 5, 2022Publication date: November 24, 2022Applicant: Nova Measuring Instruments Ltd.Inventor: Yonatan OREN
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Publication number: 20220326159Abstract: A method for use in measuring one or more characteristics of patterned structures, the method including providing measured data comprising data indicative of at least one Raman spectrum obtained from a patterned structure under measurements using at least one selected optical measurement scheme each with a predetermined configuration of at least one of illuminating and collected light conditions corresponding to the one or more characteristics to be measured, processing the measured data, and determining, for each of the at least one Raman spectrum, a distribution of Raman-contribution efficiency (RCE) within at least a part of the structure under measurements, being dependent on characteristics of the structure and the predetermined configuration of the at least one of illuminating and collected light conditions in the respective optical measurement scheme, and analyzing the distribution of Raman-contribution efficiency and determining the one or more characteristics of the structure.Type: ApplicationFiled: March 15, 2022Publication date: October 13, 2022Applicant: NOVA LTD.Inventors: Gilad Barak, Yanir HAINICK, Yonatan OREN, Vladimir Machavariani
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Patent number: 11415519Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy.Type: GrantFiled: September 14, 2020Date of Patent: August 16, 2022Assignee: NOVA LTDInventors: Eyal Hollander, Gilad Barak, Elad Schleifer, Yonatan Oren, Amir Shayari
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Publication number: 20220120690Abstract: A method and system are presented for use in measuring characteristic(s) of patterned structures. The method utilizes processing of first and second measured data, wherein the first measured data is indicative of at least one Raman spectrum obtained from a patterned structure under measurements using at least one selected optical measurement scheme each with a predetermined configuration of illuminating and/or collected light conditions corresponding to the characteristic(s) to be measured, and the second measured data comprises at least one spectrum obtained from the patterned structure in Optical Critical Dimension (OCD) measurement session. The processing comprises applying model-based analysis to the at least one Raman spectrum and the at least one OCD spectrum, and determining the characteristic(s) of the patterned structure under measurements.Type: ApplicationFiled: October 19, 2021Publication date: April 21, 2022Inventors: GILAD BARAK, YANIR HAINICK, YONATAN OREN
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Patent number: 11293871Abstract: A method and system are presented for use in measuring one or more characteristics of patterned structures. The method comprises: performing measurements on a patterned structure by illuminating the structure with exciting light to cause Raman scattering of one or more excited regions of the pattern structure, while applying a controlled change of at least temperature condition of the patterned structure, and detecting the Raman scattering, and generating corresponding measured data indicative of a temperature dependence of the detected Raman scattering; and analyzing the measured data and generating data indicative of spatial profile of one or more properties of the patterned structure.Type: GrantFiled: May 15, 2018Date of Patent: April 5, 2022Assignee: Nova LtdInventor: Yonatan Oren
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Patent number: 11275027Abstract: A method for use in measuring one or more characteristics of patterned structures, the method including providing measured data comprising data indicative of at least one Raman spectrum obtained from a patterned structure under measurements using at least one selected optical measurement scheme each with a predetermined configuration of at least one of illuminating and collected light conditions corresponding to the one or more characteristics to be measured, processing the measured data, and determining, for each of the at least one Raman spectrum, a distribution of Raman-contribution efficiency (RCE) within at least a part of the structure under measurements, being dependent on characteristics of the structure and the predetermined configuration of the at least one of illuminating and collected light conditions in the respective optical measurement scheme, and analyzing the distribution of Raman-contribution efficiency and determining the one or more characteristics of the structure.Type: GrantFiled: February 18, 2020Date of Patent: March 15, 2022Assignee: NOVA LTDInventors: Gilad Barak, Yanir Hainick, Yonatan Oren, Vladimir Machavariani