Abstract: A secure booting apparatus according to an embodiment for solving the problems to be solved by the present invention includes: a memory configured to store encrypted data, an encrypted header, and a symmetric key; and a processor configured to generate decrypted data and a decrypted header by applying a symmetric key algorithm using the symmetric key to the encrypted data and encrypted header, to include a public key and a pre key generated from the public key in the decrypted header, to generate a comparison hashed message by applying a hash algorithm to the decrypted data, to generate a final verification value by applying a public key algorithm using the public key and the pre key to the decrypted header, to compare the comparison hashed message with the final verification value, and to determine that booting has failed if the comparison hashed message and the final verification value are different from each other.

Abstract: An electronic device including a memory device with improved reliability is provided. The semiconductor device comprises a data pin configured to transmit a data signal, a command/address pin configured to transmit a command and an address, a command/address receiver connected to the command/address pin, and a computing unit connected to the command/address receiver, wherein the command/address receiver receives a first command and a first address from the outside through the command/address pin and generates a first instruction on the basis of the first command and the first address, and the computing unit receives the first instruction and performs computation based on the first instruction.

Abstract: A substrate processing apparatus and method includes a chamber, a remote plasma source outside the chamber to provide activated ammonia and activated hydrogen fluoride into the chamber, and a direct plasma source to provide ion energy to a substrate inside the chamber. The plasma source includes ground electrodes extending in a first direction on a first plane perpendicularly spaced apart from a plane on which the substrate is disposed and defined by the first direction and a second direction perpendicular to the first direction and power electrodes disposed between the ground electrodes, extending in the first direction parallel to each other and receiving power from an RF power source to generate plasma between adjacent ground electrodes. The activated ammonia and the activated hydrogen fluoride are supplied on the substrate through a space between the power electrode and the ground electrode.