Abstract: Disclosed are a method and apparatus for reusing wastewater. The method for reusing wastewater disclosed herein includes: generating a mixed wastewater by mixing multiple types of wastewater (S20); performing a first purification by passing the mixed wastewater through a flocculation-sedimentation unit (S40); performing a second purification by passing an effluent of the flocculation-sedimentation unit through a membrane bioreactor (MBR) (S60); performing a third purification by passing an effluent of the MBR through a reverse-osmosis membrane unit (S80); and reusing an effluent of the reverse-osmosis membrane unit as cooling water or industrial water (S100).

Abstract: A substrate processing apparatus includes a photoresist coater applying a photoresist film on a substrate, a humidifier increasing an amount of moisture in an ambient to which the photoresist film on the substrate is exposed, and an exposer irradiating the photoresist film exposed to the ambient having the increased amount of moisture with light. The humidifier is disposed between the photoresist coater and the exposer.

Abstract: A substrate transfer apparatus includes: a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface; and a fan filter unit disposed on the upper surface of the chamber and configured to introduce air into the chamber. The chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit.

Abstract: A substrate transfer apparatus includes: a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface; and a fan filter unit disposed on the upper surface of the chamber and configured to introduce air into the chamber. The chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit.

Abstract: Disclosed herein are a motor control apparatus and a motor control method thereof. The motor control method includes estimating a current torque of a motor based on dynamics of a body driven by the motor, judging whether the estimated torque is higher than a predetermined torque value, compensating for a velocity profile to drive the motor from the predetermined torque value, upon judging that the estimated torque is higher than the predetermined torque value, and driving the motor using the compensated velocity profile. Thereby, the velocity profile is compensated for in real time, and thus the velocity of the motor is raised while preventing the motor from stepping out.

Abstract: Disclosed is a teaching and playback method using a redundancy resolution parameter determined in conjunction with a joint structure, for a robot, and a method to apply analytic inverse kinematics to a robot having an elbow with an offset and a computer-readable medium of controlling the same. A reference plane variable with the joint structure is generated and an angle between the reference plane and an arm plane of the robot is used as the redundancy resolution parameter. The robot is taught and its operation is played back in differential inverse kinematics or analytic inverse kinematics using the resolution redundancy parameter.

Abstract: Disclosed herein are a motor control apparatus and a motor control method thereof. The motor control method includes estimating a current torque of a motor based on dynamics of a body driven by the motor, judging whether the estimated torque is higher than a predetermined torque value, compensating for a velocity profile to drive the motor from the predetermined torque value, upon judging that the estimated torque is higher than the predetermined torque value, and driving the motor using the compensated velocity profile. Thereby, the velocity profile is compensated for in real time, and thus the velocity of the motor is raised while preventing the motor from stepping out.

Abstract: Disclosed is a teaching and playback method using a redundancy resolution parameter determined in conjunction with a joint structure, for a robot, and a method to apply analytic inverse kinematics to a robot having an elbow with an offset and a computer-readable medium of controlling the same. A reference plane variable with the joint structure is generated and an angle between the reference plane and an arm plane of the robot is used as the redundancy resolution parameter. The robot is taught and its operation is played back in differential inverse kinematics or analytic inverse kinematics using the resolution redundancy parameter.

Abstract: Disclosed is a method of controlling a robot including a motor having a rotation shaft, an arm part having one end connected to the rotation shaft and interlocking with a rotation of the motor, a position controller controlling the motor, and a main controller generating a speed command profile for controlling the motor, based on the inputted motion command of the arm part and transmitting the profile to the position controller, comprising a step of generating the speed command profile controlling a speed of the motor so as to allow the arm part to have an acceleration profile in uniform speed. With this configuration, the slipping of a workpiece can be prevented and further increasing the motion speed while the arm part is traveling, by making the motion speed of the arm part constant.

Abstract: A motor speed controlling method is provided in a motor speed controlling apparatus including a motor for driving the robot, a position controller for controlling position of a motor and a main controller for producing a speed command profile of a smooth curve to control the motor based on a robot operational command input by a user and transmit the produced speed command profile to the position controller. The motor speed controlling method includes a step of producing a speed command profile having an acceleration profile of a smooth curve within a predetermined robot control interval so that a robot can be controlled on a real-time basis. Accordingly, vibration and noise of the motor are reduced and thus a control reliability is enhanced.