Abstract: A method for manufacturing a planar optical waveguide device of which a core includes a plurality of alternatively arranged fin portions and valley portions to form a grating structure, in which the core widths of the valley portions vary along the longitudinal direction, the method including: a high refractive index material layer forming step of forming a high refractive index material layer; a photoresist layer forming step of forming a photoresist layer on the high refractive index material layer; a first exposure step of forming shaded portions on the photoresist layer using a phase-shifting photomask; a second exposure step of forming shaded portions on the photoresist layer using a binary photomask; a development step of developing the photoresist layer; and an etching step of etching the high refractive index material layer using the photoresist pattern resulted from the development step.

Abstract: A method for manufacturing a planar optical waveguide device including a core of which a top face is provided with a groove section filled with a groove section filler made of a low refractive index material having a refractive index lower than that of the core, the method including; a first high refractive index material layer forming step of forming a high refractive index material layer; a low refractive index material layer forming step of forming a low refractive index material layer made of the low refractive index material on the high refractive index material layer; a groove section filler forming step of forming the groove section filler by trimming both lateral portions of the low refractive index material layer; and a second high refractive index material layer forming step of forming a high refractive index material layer so as to fill the both sides of the lateral portions of the groove section filler.

Abstract: A method for manufacturing a planar optical waveguide device of which a core includes a plurality of alternatively arranged fin portions and valley portions to form a grating structure, in which the core widths of the valley portions vary along the longitudinal direction, the method including: a high refractive index material layer forming step of forming a high refractive index material layer; a photoresist layer forming step of forming a photoresist layer on the high refractive index material layer; a first exposure step of forming shaded portions on the photoresist layer using a phase-shifting photomask; a second exposure step of forming shaded portions on the photoresist layer using a binary photomask; a development step of developing the photoresist layer; and an etching step of etching the high refractive index material layer using the photoresist pattern resulted from the development step.

Abstract: A method for manufacturing a planar optical waveguide device including a core of which a top face is provided with a groove section filled with a groove section filler made of a low refractive index material having a refractive index lower than that of the core, the method including; a first high refractive index material layer forming step of forming a high refractive index material layer; a low refractive index material layer forming step of forming a low refractive index material layer made of the low refractive index material on the high refractive index material layer; a groove section filler forming step of forming the groove section filler by trimming both lateral portions of the low refractive index material layer; and a second high refractive index material layer forming step of forming a high refractive index material layer so as to fill the both sides of the lateral portions of the groove section filler.

Abstract: A dispersion compensation device for compensating chromatic dispersion of optical pulses launched from the exterior is disclosed. The device comprises a waveguide and a photonic crystal part, the waveguide comprising a core part for guiding the optical pulse from an input end to an output end and a clad part consisting of a first clad layer and a second clad layer, the photonic crystal part providing a chromatic dispersion variation of a proper dispersion characteristic to the optical pulses guided through the waveguide, the chromatic dispersion variation having an absolute value of the variation and a positive or negative sign, wherein the photonic crystal part is layered onto the first clad layer, the core part is layered onto the photonic crystal part, and the second clad part is formed so that a portion of which is layered onto the photonic crystal part and a remaining part of which covers the exposed surface of the core part.

Abstract: A dispersion compensation device for compensating chromatic dispersion of optical pulses launched from the exterior is disclosed. The device comprises a waveguide and a photonic crystal part, the waveguide comprising a core part for guiding the optical pulse from an input end to an output end and a clad part consisting of a first clad layer and a second clad layer, the photonic crystal part providing a chromatic dispersion variation of a proper dispersion characteristic to the optical pulses guided through the waveguide, the chromatic dispersion variation having an absolute value of the variation and a positive or negative sign, wherein the photonic crystal part is layered onto the first clad layer, the core part is layered onto the photonic crystal part, and the second clad part is formed so that a portion of which is layered onto the photonic crystal part and a remaining part of which covers the exposed surface of the core part.