Abstract: A multi-joint arm robot apparatus comprises a multi-joint arm having a plurality of unit arms coupled in tandem with each other through joints, and a movable support for supporting the proximal portion of the multi-joint arm. The multi-joint arm robot apparatus has motors for controlling joint angles of the joints and a motor for moving the movable support. These motors are driven by a control system. The control system controls the motors to obtain proper joint angles, in such a way that the joints of the multi-joint arm are put into a given path when the movable support is moved a given unit distance.

Abstract: A multi-joint arm robot apparatus comprises a multi-joint arm having a plurality of unit arms coupled in tandem with each other through joints, and a movable support for supporting the proximal portion of the multi-joint arm. The multi-joint arm robot apparatus has motors for controlling joint angles of the joints and a motor for moving the movable support. These motors are driven by a control system. The control system controls the motors to obtain proper joint angles, in such a way that the joints of the multi-joint arm are put into a given path when the movable support is moved a given unit distance.

Abstract: A multi-joint arm robot apparatus comprises a multi-joint arm having a plurality of unit arms coupled in tandem with each other through joints, and a movable support for supporting the proximal portion of the multi-joint arm. The multi-joint arm robot apparatus has motors for controlling joint angles of the joints and a motor for moving the movable support. These motors are driven by a control system. The control system controls the motors to obtain proper joint angles, in such a way that the joints of the multi-joint arm are put into a given path when the movable support is moved a given unit distance.

Abstract: A displacement detector in accordance with the present invention is for detecting the amount of displacement of an object to be measured, and comprises sensing means arranged side by side with predetermined spacing whose states change in response to the changes in electromagnetic energy such as light energy, magnetic energy, and electrical energy, an electromagnetic energy generating means for generating electromagnetic energy, an electromagnetic energy transmitting means that is linked to the motion of the object to be measured, for transmitting the electromagnetic energy from the electromagnetic energy generating means to the sensing means that is situated at the position that corresponds to the displacement of the object to be measured, a conversion unit for outputting the detection signal obtained from the sensing means at the position where the electromagnetic energy is changed by the electromagnetic energy generating means, as a displacement detection signal, by converting the detection signal to a code

Abstract: A displacement detector in accordance with the present invention detects the amount of displacement of an object to be measured. Sensing means are arranged side by side with predetermined spacing whose states change in response to the changes in electromagnetic energy such as light energy, magnetic energy, and electrical energy. An electromagnetic energy generating means and an electromagnetic energy transmitting means that is linked to the motion of the object to be measured, transmits the electromagnetic energy from the electromagnetic energy generating means to the sensing means that is situated at the position that corresponds to the displacement of the object to be measured. A conversion unit ouputs the detection signal obtained from the sensing means as a displacement detection signal, by converting the detection signal to a coded signal that is characteristic of the position of the sensing means for the position where there was a change in the electromagnetic energy.

Abstract: A multi-joint arm robot apparatus comprises a multi-joint arm having a plurality of unit arms coupled in tandem with each other through joints, and a movable support for supporting the proximal portion of the multi-joint arm. The multi-joint arm robot apparatus has motors for controlling joint angles of the joints and a motor for moving the movable support. These motors are driven by a control system. The control system controls the motors to obtain proper joint angles, in such a way that the joints of the multi-joint arm are put into a given path when the movable support is moved a given unit distance.

Abstract: A multi-joint arm robot apparatus which includes a multi-joint arm in which a plurality of unit arms are connected in tandem through joints, a driver mechanism arranged in the multi-joint arm to drive each of the joints, a state detecting mechanism arranged in the multi-joint arm to detect the state of each of the joints, and a signal processing mechanism for driving the joint driver mechanism to move the multi-joint arm on a proper path responsive to the state detecting mechanism. For the purpose of reducing the number of signal transmission lines in the multi-joint arm, the signal processing mechanism transmits time-division control signals to the state detecting mechanism in each of the joints through a common control signal line arranged in the multi-joint arm, and the state detecting mechanism transmits state detecting signals to the signal processing mechanism in a time division manner through a data transmission line arranged in the multi-joint arm in response to the time-division control signals.

Abstract: A position detecting system has the following steps of: detecting picture element information (E2) corresponding to patterns on a chip (10) illuminated; calculating threshold information (E3) representing a threshold level (S1, S3) to discriminate a pad pattern (11) from the patterns on the basis of the mean (eH) of a high level portion of the picture element information (E2) and the mean (eL) of low level portion thereof; and calculating a position of the pad pattern (11) from video information (E4) discriminated with respect to the threshold level (S1, S3) by comparing a level of the threshold information (E3) with a level of video information (E4) corresponding to the picture element information (E2) used to calculate the threshold information (E3).

Abstract: A bonding apparatus for IC pellets is provided with an illumination system for illuminating the IC pellet and a microscope for observing the IC pellet. The illumination system is of reflected dark field illumination since the circuit pattern and pad for IC pellet bonding is coarse in the surface while the remaining IC pellet region has a mirror face. The illumination system includes a light source providing a spot light and a light reflecting plate for converting the spot light into scattered light. The light source and the light reflecting plate are both so disposed that the spot light from the light source is not directed directly to the pellet but directed to the light diffusion plate. The light diffusion plate is disposed so that the scattered light reflected by the light diffusion plate is directed to the pellet. The microscope is disposed so as to receive a specified light irregularly reflected by the pattern with coarse face in the light incident to the IC pellets.

Abstract: A position and direction sensing mark is formed on an integrated circuit pellet formed with a prescribed electrode pattern. The position and direction sensing mark comprises a plurality of strips which are extended in a direction different from that in which the electrode pattern is extended and are arranged in turn at prescribed intervals in a direction intersecting the different direction at right angles thereto.

Abstract: To detect the position and inclination of an IC pellet with two position marks on its surface, the following steps are taken. First, an image of the IC pellet is focussed on the photosensitive surface of a television camera. Then, the photosensitive surface with said image is scanned with a small raster, thereby detecting the coordinate of a first position mark. Thereafter, the scanning raster is shifted to the second position mark and scans the same, thereby detecting the coordinate of the second position mark. A coordinate signal which corresponds to the detected coordinates of the first and second position marks is fed into an arithmetic operation device, which computes the central coordinate and angle of inclination of the IC pellet.