Abstract: A filling method including a preceding filling process in which the drop opening of the filling funnel and the forward end of the gas-filling nozzle brought close to the normal line are inserted from the opened bag opening into a package bag, and at the same time, the forward end is separated from the normal line and moved toward a corner of the package bag. The method further includes a following filling process in which inert gas jetted from the gas filling nozzle and air in the package bag are replaced with each other, and a postprocess on the downstream side in which the replacement action between the inert gas and the air is promoted with the bag opening substantially closed by a shutter unit.

Abstract: [PROBLEMS] To provide an inert gas placing method for a gas-filling and packaging machine, in which troubles occurring when a gas-filling nozzle is inserted into a packaging bag are eliminated and in which a gas replacement rate is increased. [MEANS FOR OVERCOMING PROBLEMS] A gas-filling nozzle (23) is provided at a filling funnel (21) in correspondence with each grip (9) of a rotating body, and the gas-filling nozzle (23) has a forward end (23b) controlled by a nozzle attitude control unit (25) so as to approach or recede from an imaginary normal line v passing through the center of the drop opening of the filling funnel. In the process preceding a filling process, the drop opening of the filling funnel and the forward end of the gas-filling nozzle brought close to the normal line v are inserted from the opened bag opening b into a package bag a, and at the same time, the forward end is separated from the normal line v and moved toward a corner of the package bag.

Abstract: A caulked portion is formed by plastic deformation of a cylindrical portion which is formed at the inner end of a shaft member and is reduced in thickness toward the leading end in a diametrical outward direction. The force required to form the caulked portion is reduced, and the caulked portion is less susceptible to damage. Further, the force of the caulked portion for supporting the inner ring is ensured.

Abstract: A caulked portion is formed by plastic deformation of a cylindrical portion which is formed at the inner end of a shaft member and is reduced in thickness toward the leading end in a diametrical outward direction. The force required to form the caulked portion is reduced, and the caulked portion is less susceptible to damage. Further, the force of the caulked portion for supporting the inner ring is ensured.

Abstract: A caulked portion is formed by plastic deformation of a cylindrical portion which is formed at the inner end of a shaft member and is reduced in thickness toward the leading end in a diametrical outward direction. The force required to form the caulked portion is reduced, and the caulked portion is less susceptible to damage. Further, the force of the caulked portion for supporting the inner ring is ensured.

Abstract: A caulked portion is formed by plastic deformation of a cylindrical portion which is formed at the inner end of a shaft member and is reduced in thickness toward the leading end in a diametrical outward direction. The force required to form the caulked portion is reduced, and the caulked portion is less susceptible to damage. Further, the force of the caulked portion for supporting the inner ring is ensured.

Abstract: A caulked portion is formed by plastic deformation of a cylindrical portion which is formed at the inner end of a shaft member and is reduced in thickness toward the leading end in a diametrical outward direction. The force required to form the caulked portion is reduced, and the caulked portion is less susceptible to damage. Further, the force of the caulked portion for supporting the inner ring is ensured.

Abstract: A caulked portion is formed by plastic deformation of a cylindrical portion which is formed at the inner end of a shaft member and is reduced in thickness toward the leading end in a diametrical outward direction. The force required to form the caulked portion is reduced, and the caulked portion is less susceptible to damage. Further, the force of the caulked portion for supporting the inner ring is ensured.

Abstract: A centrifugal wafer drying apparatus comprises a rotor rotatably disposed in a container, a cradle mounted on the rotor, and a carrier mounted in the cradle and having grooves for receiving wafers. The carrier holds the wafers at an oblique angle with respect to a plane normal to the axis of rotation of the rotor, at least during rotation of the rotor.

Abstract: A centrifugal wafer drying apparatus comprises a rotor rotatably disposed in a container, a cradle mounted on the rotor, and a carrier mounted in the cradle and having grooves for receiving wafers. The carrier holds the wafers at an oblique angle with respect to a plane normal to the axis of rotation of the rotor, at least during rotation of the rotor.