Patents by Inventor Yoshiharu Ishimi

Yoshiharu Ishimi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8899564
    Abstract: In the present invention, a ceramic vacuum chuck 2 having an upper surface for adsorbing a substrate is formed from a colored ceramic sintered body comprising 55-75% by weight alumina (Al2O3), at least 3% by weight Si in terms of oxide (SiO2), at least 0.4% by weight Ca in terms of oxide (CaO), at least 0.4% by weight Mg in terms of oxide (MgO), coloring agent, and 1% or less of impurities. A plurality of pins 4 for supporting the substrate, and a rim 6 are formed on the upper surface by shot blasting using abrasive grains, and the whole of the upper surface is shot peened using spherical particles.
    Type: Grant
    Filed: February 19, 2010
    Date of Patent: December 2, 2014
    Assignee: Sodick Co., Ltd.
    Inventors: Yoshiharu Ishimi, Hidekazu Motoya, Kiyoka Suzuki
  • Publication number: 20120193878
    Abstract: In the present invention, a ceramic vacuum chuck 2 having an upper surface for adsorbing a substrate is formed from a colored ceramic sintered body comprising 55-75% by weight alumina (Al2O3), at least 3% by weight Si in terms of oxide (SiO2), at least 0.4% by weight Ca in terms of oxide (CaO), at least 0.4% by weight Mg in terms of oxide (MgO), coloring agent, and 1% or less of impurities. A plurality of pins 4 for supporting the substrate, and a rim 6 are formed on the upper surface by shot blasting using abrasive grains, and the whole of the upper surface is shot peened using spherical particles.
    Type: Application
    Filed: February 19, 2010
    Publication date: August 2, 2012
    Applicant: SODICK CO., LTD.
    Inventors: Shigemi Suzuki, Yoshiharu Ishimi, Hidekazu Motoya, Kiyoka Suzuki
  • Patent number: 7825355
    Abstract: A ceramic block with a built in electrode, including a first insulating ceramic sheet having a bearing surface, a sheet electrode having an inner edge and extending generally parallel to the bearing surface, a second insulating ceramic sheet disposed to enclose the sheet electrode between the second insulating ceramic sheet and the first insulating ceramic sheet, and a cylindrical, thin film shaped drawn-out conductor perpendicularly connected to the inner edge of the sheet electrode to supply voltage to the sheet electrode. The drawn-out conductor is attached to the inner wall of a through hole of the second insulating ceramic sheet, and an insulating ceramic shaft is packed into the through hole.
    Type: Grant
    Filed: June 21, 2005
    Date of Patent: November 2, 2010
    Assignee: Sodick Co., Ltd.
    Inventors: Shigemi Suzuki, Kazuyuki Deguchi, Yoshiharu Ishimi
  • Publication number: 20070286985
    Abstract: A ceramic block with a built in electrode, including a first insulating ceramic sheet having a bearing surface, a sheet electrode having an inner edge and extending generally parallel to the bearing surface, a second insulating ceramic sheet disposed to enclose the sheet electrode between the second insulating ceramic sheet and the first insulating ceramic sheet, and a cylindrical, thin film shaped drawn-out conductor perpendicularly connected to the inner edge of the sheet electrode to supply voltage to the sheet electrode. The drawn-out conductor is attached to the inner wall of a through hole of the second insulating ceramic sheet, and an insulating ceramic shaft is packed into the through hole.
    Type: Application
    Filed: June 21, 2005
    Publication date: December 13, 2007
    Inventors: Shigemi Suzuki, Kazuyuki Deguchi, Yoshiharu Ishimi