Abstract: An operation unintended by a helper due to an incorrect operation or the like by an operator is prevented. An electric mobility includes a manual operation unit, a wireless operation unit, and a control unit that controls a driving wheel on the basis of either a first command signal output by the manual operation unit or a second command signal output by the wireless operation unit. The control unit sets a first control mode enabling an operation of the electric driving wheel by the manual operation unit and a second control mode disabling an operation of the electric driving wheel by the manual operation unit on the basis of a wireless signal transmitted from a wireless terminal.

Abstract: At least one drawing apparatus according to an exemplary embodiment includes a plurality of optical systems and repeats an operation to draw a pattern on a substrate while partly overlapping stripe-shaped regions drawn by the optical systems. The drawing apparatus includes a creation unit configured to create data to be supplied to each of the plurality of optical systems by using a plurality of sub pattern data, each of the plurality of sub pattern data serving as unit data of pattern data used by the plurality of optical systems, corresponding to a region having a width obtainable by dividing the stripe-shaped regions in a drawing width direction, and including information relating to continuity of drawing instruction data and exposure amount information. The creation unit is configured to create the data by changing exposure amount information corresponding to an overlapping drawing region based on the information relating to the continuity.

Abstract: At least one method of manufacturing articles and at least one lithography system are provided herein. A lithography system according to an exemplary embodiment of the present disclosure includes a drawing apparatus that includes a plurality of optical systems and draws a pattern on a substrate with beams having been respectively shaped by the plurality of optical systems, and a transmission unit configured to select pattern data to be used by the drawing apparatus from a plurality of types of pattern data commonly used by the plurality of optical systems and configured to transmit the selected pattern data to the drawing apparatus. The pattern data is a set of data including a plurality of sub pattern data, and a width of a stripe-shaped drawing region corresponding to one sub pattern data piece is equivalent to a length obtainable by dividing a drawing width of the beams by an integer value.

Abstract: The present invention provides a drawing apparatus for performing drawing on a substrate with a charged particle beam, the apparatus including a controller configured to perform control of the drawing performed by movement of a stage and a blanking function of each of a plurality of charged particle optical systems, wherein the controller is configured to perform, with respect to a first charged particle optical system, of the plurality of charged particle optical systems, from a plurality of charged particle beams reach a first region and a second region, formed on the substrate and adjacent to each other, the control such that the drawing is performed only in one of the first and second regions with a first portion of charged particle beams of the plurality of charged particle beams with the stage moved in a second direction.

Abstract: A disc brake pad assembly includes a pad and a shim plate. The shim plate includes locking pieces which are bent from a main body portion towards a pressure plate. The locking pieces are brought into abutment with circumferential edge portions of the pressure plate so as to be displaced in a rotating direction of a rotor. Projecting portions are formed at portions of the circumferential edge portion which are brought into abutment with one surface of each of the locking pieces. A circumferential central portion of a part of each of the projecting portions which faces the one surface projects further than both circumferential end portions thereof. The circumferential edge portion and the one surface of each of the locking pieces are spaced apart from each other at portions of the one surface which lie close to both circumferential end portions thereof.

Abstract: A disc brake pad assembly includes a pad and a shim plate. The shim plate includes locking pieces which are bent from a main body portion towards a pressure plate. The locking pieces are brought into abutment with circumferential edge portions of the pressure plate so as to be displaced in a rotating direction of a rotor. Projecting portions are formed at portions of the circumferential edge portion which are brought into abutment with one surface of each of the locking pieces. A circumferential central portion of a part of each of the projecting portions which faces the one surface projects further than both circumferential end portions thereof. The circumferential edge portion and the one surface of each of the locking pieces are spaced apart from each other at portions of the one surface which lie close to both circumferential end portions thereof.

Abstract: A disc brake pad assembly includes a pair of locking bent portions formed at circumferential end portions of an inner shim plate by being bent towards an opposite side to a pressure plate. Locking through holes are formed individually at base end portions of the locking bent portions. A pair of locking projecting pieces are individually formed so as to project circumferentially from an outer main body portion included in an outer shim plate. A distance between distal edges of the locking projecting pieces is larger than a space between the locking bent portions, and a circumferential length defined between radial side portions of the locking projecting pieces is shorter than the space. The inner main body portion and the outer main body portion are superposed on each other in a state that the locking projecting pieces are brought into engagement with the locking through holes.

Abstract: Electrons are introduced to a cathode (1) side of a cell (10) to promote the reduction of carbon dioxide. On the other hand, the oxidation of methane is promoted in an anode (2) side by an oxide ion transported via a porous GDC electrolyte (3). When carbon monoxide and an oxide ion are generated, they are transported to the anode (2) together with methane gas to generate carbon monoxide and hydrogen. In addition, Cu and an oxide ion are reacted in the anode (2) to promote the oxidation of methane gas.

Abstract: A disc brake pad assembly includes a pair of locking bent portions formed at circumferential end portions of an inner shim plate by being bent towards an opposite side to a pressure plate. Locking through holes are formed individually at base end portions of the locking bent portions. A pair of locking projecting pieces are individually formed so as to project circumferentially from an outer main body portion included in an outer shim plate. A distance between distal edges of the locking projecting pieces is larger than a space between the locking bent portions, and a circumferential length defined between radial side portions of the locking projecting pieces is shorter than the space. The inner main body portion and the outer main body portion are superposed on each other in a state that the locking projecting pieces are brought into engagement with the locking through holes.

Abstract: A disc brake pad assembly includes a pad and a shim plate. The shim plate includes locking pieces which are bent from a main body portion towards a pressure plate. The locking pieces are brought into abutment with circumferential edge portions of the pressure plate so as to be displaced in a rotating direction of a rotor. Projecting portions are formed at portions of the circumferential edge portion which are brought into abutment with one surface of each of the locking pieces. A circumferential central portion of a part of each of the projecting portions which faces the one surface projects further than both circumferential end portions thereof. The circumferential edge portion and the one surface of each of the locking pieces are spaced apart from each other at portions of the one surface which lie close to both circumferential end portions thereof.

Abstract: The present invention provides a drawing apparatus for performing drawing on a substrate with a charged particle beam, including a stage configured to hold the substrate and be moved, a charged particle optical system configured to irradiate a plurality of charged particle beams arrayed along a first axis, and a controller configured to control the drawing so as to perform multiple irradiation of a target portion on the substrate with the plurality of charged particle beams, wherein the controller configured to control the drawing such that the stage is moved in one direction along the first axis with respect to a plurality of regions formed on the substrate along the first axis, and a deflection of charged particle beam for a displacement of charged particle beam along the first axis is performed with respect to drawing on each of the plurality of regions.

Abstract: The present invention provides a drawing apparatus for performing drawing on a substrate with a charged particle beam, the apparatus including a controller configured to perform control of the drawing performed by movement of a stage and a blanking function of each of a plurality of charged particle optical systems, wherein the controller is configured to perform, with respect to a first charged particle optical system, of the plurality of charged particle optical systems, from a plurality of charged particle beams reach a first region and a second region, formed on the substrate and adjacent to each other, the control such that the drawing is performed only in one of the first and second regions with a first portion of charged particle beams of the plurality of charged particle beams with the stage moved in a second direction.

Abstract: A disc brake apparatus includes a boot including a fitting part. A slide pin is fixed to one of a support and a caliper and is slidably mounted to a guide hole formed in the other. Convex parts extending in a sliding direction of the slide pin are circumferentially arranged on an inner periphery of the fitting part. Concave recesses are respectively formed between the neighboring convex parts. Each of the convex parts is formed with at least one a low-height portion and a high-height portion in an axial direction of a rotor, respectively. Positions of the low-height portion and the high-height portion in a circumferential direction of the rotor are respectively different between the adjacent convex parts. The high-height portion has a height so as to contact the slide pin, and the low-height portion has a height so as not to contact the slide pin.

Abstract: The present invention provides a drawing apparatus including a blanker including a plurality of deflectors configured to respectively deflect the plurality of charged particle beams, and a controller configured to transmit a control signal to the blanker, wherein the blanker includes a storage configured to store pattern data, a generator configured to generate, based on pattern information which is included in the control signal and designates the pattern data, and position information which is included in the control signal and designates a drawing position corresponding to the pattern information, a blanking signal for drawing a pattern corresponding to the pattern data stored in the storage at a position on a substrate corresponding to the position information, and a driving device configured to drive the plurality of deflectors in accordance with the generated blanking signal generated.

Abstract: A drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams includes: a blanking deflector located in a vacuum chamber and configured to blank each of the plurality of charged particle beams; a device located in an external chamber in which a gas pressure is higher than a gas pressure in the vacuum chamber, and configured to control the blanking deflector; and a first substrate facing the blanking deflector. The first substrate constitutes a partition which separates the vacuum chamber and the external chamber in a region, of the first substrate, facing the blanking deflector, and includes an electrode which fills a via formed in the region. The device is electrically connected to the blanking deflector via the electrode.

Abstract: A drawing apparatus that performs drawing on a substrate with a plurality of charged particle beams includes a blanker array configured to blank the plurality of charged particle beams, respectively; a generating device configured to generate a blanking signal for controlling the blanker array and an error detection signal for the blanking signal; and a plurality of transmission paths for transmitting signals between the generating device and the blanker array. The plurality of transmission paths include a first transmission path for transmitting the blanking signal and a second transmission path for transmitting the error detection signal. The generating device is configured to transmit a blanking signal and an error detection signal corresponding to the blanking signal via the first transmission path and the second transmission path, respectively, to the blanker array in parallel.

Abstract: A drawing apparatus for drawing a pattern on a substrate with a plurality of charged-particle beams, includes a blanking aperture array including a plurality of apertures, a blanking unit including a plurality of blankers and configured to respectively deflect the plurality of charged-particle beams by the plurality of blankers to cause the blanking aperture array to block the respectively deflected plurality of charged-particle beams, a generating circuit configured to generate a blanking instruction in a serial format, and a serial transmission cable configured to transmit the blanking instruction generated by the generating circuit to the blanking unit, wherein the blanking unit is configured to convert the blanking instruction in the serial format, that has been received via the serial transmission cable, into a blanking instruction in a parallel format, and to drive the plurality of blankers based on the blanking instruction in the parallel format.

Abstract: The present invention provides a drawing apparatus including a blanker including a plurality of deflectors configured to respectively deflect the plurality of charged particle beams, and a controller configured to transmit a control signal to the blanker, wherein the blanker includes a storage configured to store pattern data, a generator configured to generate, based on pattern information which is included in the control signal and designates the pattern data, and position information which is included in the control signal and designates a drawing position corresponding to the pattern information, a blanking signal for drawing a pattern corresponding to the pattern data stored in the storage at a position on a substrate corresponding to the position information, and a driving device configured to drive the plurality of deflectors in accordance with the generated blanking signal generated.

Abstract: A drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams includes: a blanking deflector located in a vacuum chamber and configured to blank each of the plurality of charged particle beams; a device located in an external chamber in which a gas pressure is higher than a gas pressure in the vacuum chamber, and configured to control the blanking deflector; and a first substrate facing the blanking deflector. The first substrate constitutes a partition which separates the vacuum chamber and the external chamber in a region, of the first substrate, facing the blanking deflector, and includes an electrode which fills a via formed in the region. The device is electrically connected to the blanking deflector via the electrode.

Abstract: A stage apparatus includes plural stages movable across plural areas, movable bodies which are provided in one-to-one correspondence with the plural stages and are movable across the plural areas, plural lines which connect each of the plural stages to a corresponding one of the plural movable bodies, a driving unit which drives the plural movable bodies, and a controller which controls the driving by the driving unit. The controller controls the driving unit with the movable body moving in synch with movement of the stage during inter-area movement in which the stage moves across two of the plural areas, and stops the driving of the movable body by the driving unit or controls the driving unit with the movable body remaining at a specific target position during intra-area movement in which a process is performed on the stage while the stage moves within one of the plural areas.