Abstract: A guided vehicle includes: a first wheel section positioned at a front end portion of a base; and second and third wheel sections which are independent from each other. The first wheel section includes a left-right frame body, and swivel wheels arranged on left and right portions of the left-right frame body. An intermediate position between the swivel wheels in the left-right frame body is supported to be swingable about a front-rear axis relative to the base. Each of the second wheel section and the third wheel section includes a front-rear frame body, and a driving wheel and a swivel wheel which are respectively arranged at a front portion and a rear portion of the front-rear frame body. An intermediate position between the driving wheel and the swivel wheel of each front-rear frame body is supported to be swingable about the left-right axis and the front-rear axis relative to the base.

Abstract: This robot system includes: an automated guided vehicle that includes a support surface and automatically travels; a robot cell including a seat surface to be mounted on the support surface, a ground contact portion protruding downward from the seat surface so as to contact with a ground, an articulated arm, and a robot controller that controls operation of the articulated arm; and a switching mechanism that performs switching between a transferable state in which the seat surface is mounted on the support surface and the ground contact portion is separated from the ground, and a placed state in which the seat surface is separated from the support surface and the ground contact portion contacts with the ground.

Abstract: A power supply system includes a movable power supply device including a first power storage device, a robot including a second power storage device, and a controller, and the controller performs control for conveying the first power storage device to the robot by using the power supply device, on the basis of information about an amount of power stored in the second power storage device.

Abstract: A power supply system includes: a robot including a power storage device; a movable power supply device; and a controller. The power supply device includes a first electrical connector which is electrically connectable to a second electrical connector of the robot and which is electrically connected to a power supply source via a wire, and the controller performs control for electrically connecting the first electrical connector and the second electrical connector and supplying power to the robot, on the basis of information about an amount of power stored in the power storage device.

Abstract: A traveling robot includes: a traveling body including a truck and a drive unit, the truck including front and rear wheels and a floor frame, the drive unit being configured to rotate the wheels; a support mechanism configured to raise or lower a holding tool configured to support a mounting plate; and a picking robot configured to load a cargo onto the mounting plate or unload the cargo from the mounting plate. The drive unit is mounted on the floor frame, and the floor frame includes a projecting portion projecting forward from a portion on which the drive unit is mounted. The support mechanism is attached to a front end portion of the projecting portion. The picking robot is provided at the projecting portion, is arranged between the support mechanism and the drive unit in a front-rear direction, and is arranged on or behind an imaginary vertical line passing through a front axle.

Abstract: A chain abnormality detection device provided at a predetermined location on a circulation path of an endless chain includes a measurement start position detector, a reference position detector, and a distance measurement unit. The measurement start position detector detects that a measurement start position comes to a first predetermined position, and the reference position detector detects a timing when a reference position comes to a second predetermined position. The distance measurement unit measures a distance from the reference position to a subsequent reference position, at each of the timings. A difference calculator is provided which calculates a difference between the distance measured at the present time and the distance measured at the previous time, for the same reference position, and a breakage determination unit is provided which determines whether there is partial breakage, on the basis of the difference calculated by the difference calculator.

Abstract: A vertical circulating conveyor includes a lowering path part (3) and a raising path part (4) that connect end portions of a conveyance path part (1) and a return path part (2) vertically positioned in a linear arrangement. The lowering path part (3) includes front wheel lowering guide rails (8A) to guide front wheels (F) of a transport vehicle (5) and rear wheel lowering guide rails (8B) to guide rear wheels (R) of the transport vehicle (5). The transport vehicle (5) is moved in the lowering path part (3) by falling under its own weight in almost the horizontal state in a powerless manner while the front wheels (F) of the transport vehicle (5) are guided by the front wheel lowering guide rails (8A) and the rear wheels (R) of the transport vehicle (5) are guided by the rear wheel lowering guide rails (8B).

Abstract: An object of the present invention is to suppress rise in running resistance with increases in weight of a transport vehicle group, and prevent higher energy consumption and manufacturing cost. A transport device transports a transport vehicle (1) carrying an article (E) along a transport path including a curved path and forms a continuous floor (B) on the transport vehicle (1) in the entire or partial transport path. The transport device includes: running rails (R) that are laid along the transport path to support running wheels (4, 5, and 6) of the transport vehicle (1); guide rails that guide the transport vehicle (1) along the transport path; a drive unit that drives the transport vehicle (1); and a water way (WW) that is formed along the transport path to reserve water (W).

Abstract: A semiconductor substrate thermal treatment apparatus enables excellent heating control in suppressing influence of mutual induction between induction heating coils even when the induction heating coils are arranged in the vertical direction while providing horizontal magnetic flux to susceptors. The apparatus indirectly heats wafers mounted on horizontally-arranged susceptors including induction heating coils to form alternate-current magnetic flux in a direction parallel to a mount face of the susceptor. The wafer are arranged at an outer circumferential side of the susceptor. The induction heating coils are structured with at least one main heating coil and subordinate heating coils electromagnetically coupled with the main heating coil.

Abstract: The present invention is intended to provide a storage facility using an automated carrying cart that is simplified in structure, and eliminates the need for a carrying means such as a conveyor or an unmanned carrying cart or a forklift operated by the worker. A storage facility 1 uses an automated carrying cart A that carries an article W in and out of a shelf facility 2 having an article storage space S. The automated carrying cart A automatically runs in the shelf facility 2 along running rails G in paths Q1 and Q2, automatically runs on the ground outside the shelf facility 2 along specific paths P1 and P2, and is used in common for carrying the article W in the shelf facility 2 and carrying the article W on the ground outside the shelf facility 2.

Abstract: A vertical circulating conveyor includes a lowering path part (3) and a raising path part (4) that connect end portions of a conveyance path part (1) and a return path part (2) vertically positioned in a linear arrangement. The lowering path part (3) includes front wheel lowering guide rails (8A) to guide front wheels (F) of a transport vehicle (5) and rear wheel lowering guide rails (8B) to guide rear wheels (R) of the transport vehicle (5). The transport vehicle (5) is moved in the lowering path part (3) by falling under its own weight in almost the horizontal state in a powerless manner while the front wheels (F) of the transport vehicle (5) are guided by the front wheel lowering guide rails (8A) and the rear wheels (R) of the transport vehicle (5) are guided by the rear wheel lowering guide rails (8B).

Abstract: There is provided a conveyance device that can convey a conveyance truck composed of two truck bodies on which a worker rides and does a work in a widthwise direction of a large conveyance object, using a friction type drive unit disposed on a linear route or a curved route, which can improve workability and reduce manufacturing cost. A conveyance device includes a connecting device C for connecting conveyance trucks 1 on front and rear positions. Each of the trucks 1 is configured so that a first truck body 1A whose front and rear end surfaces are arc-shaped projections in plan view and a second truck body 1B whose front and rear end surfaces are arc-shaped recesses in plan view are connected to be capable of curving in a horizontal direction, and upper surfaces of the first truck body 1A and the second truck body 1B are approximately horizontal surfaces.

Abstract: An object of the present invention is to suppress rise in running resistance with increases in weight of a transport vehicle group, and prevent higher energy consumption and manufacturing cost. A transport device transports a transport vehicle (1) carrying an article (E) along a transport path including a curved path and forms a continuous floor (B) on the transport vehicle (1) in the entire or partial transport path. The transport device includes: running rails (R) that are laid along the transport path to support running wheels (4, 5, and 6) of the transport vehicle (1); guide rails that guide the transport vehicle (1) along the transport path; a drive unit that drives the transport vehicle (1); and a water way (WW) that is formed along the transport path to reserve water (W).

Abstract: There is provided a conveyance device that can convey a conveyance truck composed of two truck bodies on which a worker rides and does a work in a widthwise direction of a large conveyance object, using a friction type drive unit disposed on a linear route or a curved route, which can improve workability and reduce manufacturing cost. A conveyance device includes a connecting device C for connecting conveyance trucks 1 on front and rear positions. Each of the trucks 1 is configured so that a first truck body 1A whose front and rear end surfaces are arc-shaped projections in plan view and a second truck body 1B whose front and rear end surfaces are arc-shaped recesses in plan view are connected to be capable of curving in a horizontal direction, and upper surfaces of the first truck body 1A and the second truck body 1B are approximately horizontal surfaces.

Abstract: The purpose of the present invention is to minimize switching losses of an inverter. An induction heating device includes: a plurality of induction heating coils (20) which are disposed adjacent with each other; a plurality of inverters (30), each of which has a capacitor (40) serially connected to each of the induction heating coils (20), and converts a DC voltage into a square wave voltage; and a control circuit (15) which controls so as to align the phase of coil currents flowing though the plurality of the induction heating coils (20), wherein the control circuit (15) controls the timing at which the square wave voltage transitions such that an instantaneous value of the square wave voltage is preserved in either the DC voltage or a turnover voltage, when the coil current zero crosses.

Abstract: A semiconductor substrate thermal treatment apparatus enables excellent heating control in suppressing influence of mutual induction between induction heating coils even when the induction heating coils are arranged in the vertical direction while providing horizontal magnetic flux to susceptors. The apparatus indirectly heats wafers mounted on horizontally-arranged susceptors including induction heating coils to form alternate-current magnetic flux in a direction parallel to a mount face of the susceptor. The wafer are arranged at an outer circumferential side of the susceptor. The induction heating coils are structured with at least one main heating coil and subordinate heating coils electromagnetically coupled with the main heating coil.

Abstract: To provide a slat conveyor apparatus in which course change path parts are moved without inverting the upper and lower sides of slats to eliminate the need for an expensive pitting work, wherein the slats can be held horizontally by a simplified configuration on the course change path parts at front and back ends in the direction of conveyance, whereby the length of the working process does not become shorter, and a required inverting action can be made by a simplified configuration.

Abstract: A semiconductor substrate thermal treatment apparatus enables excellent heating control in suppressing influence of mutual induction between induction heating coils even when the induction heating coils are arranged in the vertical direction while providing horizontal magnetic flux to susceptors. The apparatus indirectly heats wafers mounted on horizontally-arranged susceptors including induction heating coils to form alternate-current magnetic flux in a direction parallel to a mount face of the susceptor. The wafer are arranged at an outer circumferential side of the susceptor. The induction heating coils are structured with at least one main heating coil and subordinate heating coils electromagnetically coupled with the main heating coil.

Abstract: To provide a slat conveyor apparatus in which course change path parts are moved without inverting the upper and lower sides of slats to eliminate the need for an expensive pitting work, wherein the slats can be held horizontally by a simplified configuration on the course change path parts at front and back ends in the direction of conveyance, whereby the length of the working process does not become shorter, and a required inverting action can be made by a simplified configuration.

Abstract: The purpose of the present invention is to minimize switching losses of an inverter. An induction heating device includes: a plurality of induction heating coils (20) which are disposed adjacent with each other; a plurality of inverters (30), each of which has a capacitor (40) serially connected to each of the induction heating coils (20), and converts a DC voltage into a square wave voltage; and a control circuit (15) which controls so as to align the phase of coil currents flowing though the plurality of the induction heating coils (20), wherein the control circuit (15) controls the timing at which the square wave voltage transitions such that an instantaneous value of the square wave voltage is preserved in either the DC voltage or a turnover voltage, when the coil current zero crosses.