Abstract: A control method includes an input step for inputting information concerning a setting angle of a robot arm of a robot including the robot arm and a force detecting section configured to detect force applied to the robot arm and a calculating step for calculating a proper force detection parameter of the force detecting section at the setting angle of the robot arm based on a first force detection parameter of the force detecting section corresponding to setting at a first setting angle of the robot arm and a second force detection parameter of the force detecting section corresponding to setting at a second setting angle different from the first setting angle of the robot arm.

Abstract: A hollow first accommodating case (28) is provided on a front part of a revolving frame (5) at a position on a front side of a fuel tank (23), and a fuel supply pump (34) for supplying a fuel stored in an external fuel storage source to the fuel tank (23) is provided on the fuel tank (23) by being connected. A fuel suction port (35) for sucking the fuel toward the fuel supply pump (34) is provided in the first accommodating case (28) by being opened to an outside, and a urea water tank (25) is provided by being accommodated in the first accommodating case (28). A water supply port (25G) of a urea water is provided in the urea water tank (25) by being opened to the outside, and the fuel suction port (35) and the water supply port (25G) of the urea water are juxtaposed and arranged in the first accommodating case (28).

Abstract: A bonding tool that executes an ultrasonic vibration processing of applying ultrasonic vibration to an application portion on a lead wire from a direct contact tip portion and a pair of press mechanisms having a pair of press rollers capable of performing a rotational operation. The pair of press mechanisms executes a press processing of pressing both sides of the application portion on the lead wire by the pair of press rollers at a time of execution of the ultrasonic vibration processing by the bonding tool and a movement processing of executing a rotational operation performed by the pair of press rollers to move the pair of press rollers on the lead wire while pressing the lead wire at a time of non-execution of the ultrasonic vibration processing.

Abstract: A bonding tool as the tool for ultrasonic bonding includes a plurality of protrusion portions in a protrusion region at a contact tip portion. The plurality of protrusion portions are equally spaced at a longitudinal direction interval in an X direction as the longitudinal direction of the protrusion region, and an X direction outermost protrusion portion positioned outermost in the X direction is disposed separately from a side edge of the protrusion region in the X direction by a longitudinal direction side edge distance. The plurality of protrusion portions are disposed so that a first disposition condition {0.349?EX (the longitudinal direction side edge distance/DX (the longitudinal direction interval)?0.510} is satisfied.

Abstract: A method of forming a nitride film wherein (a) a silane-based gas is supplied to a processing chamber through a gas supply port; (b) a nitrogen radical gas from a radical generator is supplied to the processing chamber through a radical gas pass-through port; and (c) the silane-based gas supplied in (a) is reacted with the nitrogen radical gas supplied in (b), without causing a plasma phenomenon in the processing chamber, to form a nitride film on a wafer.

Abstract: With respect to a dielectric electrode, gas-jetting holes and gas-jetting holes formed in two rows along the X direction are provided as three or more gas-jetting holes along the X direction in a central region. By providing a difference in the X direction between the position where the gas-jetting hole is formed and the position where the gas-jetting hole is formed, the gas-jetting holes and the gas-jetting holes disposed in two rows are provided such that gas-jetting holes and gas-jetting holes are alternately disposed along the X direction.

Abstract: An active gas generator that generates active gas by activating supplied material gas through discharge in a discharge space formed between a high-voltage side electrode component and a ground side electrode component of an active gas generation electrode group. A combined structure of covers completely separates the discharge space from an alternating-current voltage application space, and includes, independently from the alternating-current voltage application space, a material gas flow path for a material gas supply path, through which externally supplied material gas is guided to the discharge space. A housing contact space formed between a metal housing and each of the covers and an electrode component installation table is completely separated from the alternating-current voltage application space and the discharge space.

Abstract: The present invention has features (1) to (3). The feature (1) is that “an active gas generation electrode group is formed in such a manner that a ground side electrode component supports a high-voltage side electrode component”. The feature (2) is that “stepped parts are provided in a discharge space outside region of a dielectric electrode in the high-voltage side electrode component, and project downward, and by a formation height of these stepped parts, the gap length of a discharge space is defined”. The feature (3) is that “the high-voltage side electrode component and the ground side electrode component are formed to have the thickness of a discharge space formation region relatively thin and the thickness of a discharge space outside region relatively thick”.

Abstract: A controller of a robot includes a first coupling section coupled to an object detecting device configured to detect an object. The controller is configured to control the robot in one of a first mode in which displacement speed of the robot does not exceed first speed and a second mode in which the displacement speed is second speed higher than the first speed, when the object detecting device is coupled to the first coupling section, switch the first mode and the second mode based on an output from the object detecting device, and control the robot in the first mode when the object detecting device is not coupled to the first coupling section.

Abstract: An active gas generator that generates active gas by activating supplied material gas through discharge in a discharge space formed between a high-voltage side electrode component and a ground side electrode component of an active gas generation electrode group. A combined structure of covers completely separates the discharge space from an alternating-current voltage application space, and includes, independently from the alternating-current voltage application space, a material gas flow path for a material gas supply path, through which externally supplied material gas is guided to the discharge space. A housing contact space formed between a metal housing and each of the covers and an electrode component installation table is completely separated from the alternating-current voltage application space and the discharge space.

Abstract: An ultrasonic vibration welding apparatus includes an air cylinder that is coupled to an ultrasonic welding head unit and executes a pressurizing operation of pressurizing on the ultrasonic welding head unit, and a lifting-lowering servomotor that executes a lifting-lowering operation including a lowering operation of lowering the ultrasonic welding head unit and the air cylinder at once, as components separate from each other.

Abstract: A hollow first accommodating case (28) is provided on a front part of a revolving frame (5) at a position on a front side of a fuel tank (23), and a fuel supply pump (34) for supplying a fuel stored in an external fuel storage source to the fuel tank (23) is provided on the fuel tank (23) by being connected. A fuel suction port (35) for sucking the fuel toward the fuel supply pump (34) is provided in the first accommodating case (28) by being opened to an outside, and a urea water tank (25) is provided by being accommodated in the first accommodating case (28). A water supply port (25G) of a urea water is provided in the urea water tank (25) by being opened to the outside, and the fuel suction port (35) and the water supply port (25G) of the urea water are juxtaposed and arranged in the first accommodating case (28).

Abstract: A control apparatus that controls a robot having a movable unit, includes a display control unit that changes a display form of a virtual wall displayed on a display unit transmitting visible light based on a distance between the virtual wall on a real space and the movable unit and a velocity of the movable unit.

Abstract: A method of forming a nitride film wherein (a) a silane-based gas is supplied to a processing chamber through a gas supply port; (b) a nitrogen radical gas from a radical generator is supplied to the processing chamber through a radical gas pass-through port; and (c) the silane-based gas supplied in (a) is reacted with the nitrogen radical gas supplied in (b), without causing a plasma phenomenon in the processing chamber, to form a nitride film on a wafer.

Abstract: A control device configured to control a robot includes a display control section configured to change a display configuration other than a display position of operating information of the robot to be displayed on a display section configured to transmit visible light based on a distance between an operator and the robot, the display configuration in a case in which the distance between the operator and the robot is a first distance and the display configuration in a case in which the distance between the operator and the robot is a second distance shorter than the first distance are different from each other.

Abstract: In teaching of a robot, a control device controls a movable unit in a first control mode in which the movable unit continuously moves according to a force detected by a force detector and a second control mode in which the movable unit moves by a predetermined movement amount according to the force detected by the force detector. A controller selects a first control mode or a second control mode according to a temporal change in the force detected by the force detector and a magnitude of the force.

Abstract: An activated gas generation apparatus includes a gas jet flow straightener below an activated gas generating electrode group and a nozzle constituent part. The gas jet flow straightener receives a plurality of nozzle passing activated gases as a whole at an inlet part of a gas flow-straightening passage. The gas flow-straightening passage is formed so that the outlet opening area of an outlet part is set to be narrower than the inlet opening area of the inlet part, and the cylindrical gas jet of each of the plurality of nozzle passing activated gases is converted into a linear flow-straightened activated gas by the flow-straightening action of the gas flow-straightening passage.

Abstract: With respect to a dielectric electrode, gas-jetting holes and gas-jetting holes formed in two rows along the X direction are provided as three or more gas-jetting holes along the X direction in a central region. By providing a difference in the X direction between the position where the gas-jetting hole is formed and the position where the gas-jetting hole is formed, the gas-jetting holes and the gas-jetting holes disposed in two rows are provided such that gas-jetting holes and gas-jetting holes are alternately disposed along the X direction.

Abstract: A bonding tool as the tool for ultrasonic bonding includes a plurality of protrusion portions in a protrusion region at a contact tip portion. The plurality of protrusion portions are equally spaced at a longitudinal direction interval in an X direction as the longitudinal direction of the protrusion region, and an X direction outermost protrusion portion positioned outermost in the X direction is disposed separately from a side edge of the protrusion region in the X direction by a longitudinal direction side edge distance. The plurality of protrusion portions are disposed so that a first disposition condition {0.349?EX (the longitudinal direction side edge distance/DX (the longitudinal direction interval)?0.510} is satisfied.

Abstract: An activated gas generation apparatus includes a gas jet flow straightener below an activated gas generating electrode group and a nozzle constituent part. The gas jet flow straightener receives a plurality of nozzle passing activated gases as a whole at an inlet part of a gas flow-straightening passage. The gas flow-straightening passage is formed so that the outlet opening area of an outlet part is set to be narrower than the inlet opening area of the inlet part, and the cylindrical gas jet of each of the plurality of nozzle passing activated gases is converted into a linear flow-straightened activated gas by the flow-straightening action of the gas flow-straightening passage.