Patents by Inventor Yoshiji Itakura

Yoshiji Itakura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Control system and method for improving tracking accuracy of a stage through processing of information from previous operations
    Publication number: 20040128918
    Abstract: A precision assembly (10) includes a stage assembly (220) having a first stage (208), a first mover assembly (210) and a control system (24). The first mover assembly (210) moves the first stage (208) during a first iteration (300) and a subsequent second iteration (302) having a similar movement to the first iteration (300). The first iteration (300) generates positioning data that is sent to the control system (24) to control the first mover assembly (210) to adjust movement of the first stage (208) during the second iteration (302) based on at least a portion of the positioning data from the first iteration (300). The positioning data can include the position of the first stage (208) along a first axis, a second axis and/or a third axis. The stage assembly can also include a second stage (206) and a second mover assembly (204) that moves the second stage (206) synchronously with the first stage (208).
    Type: Application
    Filed: November 5, 2003
    Publication date: July 8, 2004
    Inventors: Pai-Hsueh Yang, Bausan Yuan, Susumu Makinouchi, Yoshiji Itakura, Kazuhiro Hirano, Hideyuki Hashimoto, Ryoichi Kawaguchi