Patents by Inventor Yoshikatsu Kanamori

Yoshikatsu Kanamori has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal treatment furnace in a system for manufacturing semiconductors
    Patent number: 5632820
    Abstract: A thermal treatment furnace for use with a semiconductor system is provided. The thermal treatment furnace includes a scavenger which sealingly encloses a lower end of a reaction tube so as to diminish gas leakage from the reaction tube.
    Type: Grant
    Filed: April 20, 1995
    Date of Patent: May 27, 1997
    Assignee: Kokusai Electric Co., Ltd.
    Inventors: Tomoshi Taniyama, Hideki Kaihotsu, Yoshikatsu Kanamori, Kazuhito Ikeda, Shuji Yonemitsu