Abstract: A surface treating apparatus treats a substrate surface by rotating a cylindrical polishing member in a state where the polishing member makes contact with the substrate surface. A polishing liquid is supplied to a polishing liquid passage that is provided in a central portion of the polishing member, and the polishing liquid is supplied to the substrate surface by rotating the polishing member while filtering the polishing liquid by a foam member provided on an outer periphery of the polishing liquid passage. Aperture diameters of the foam member are larger on the side of the polishing liquid passage than on the outside of the polishing member.

Abstract: A surface treating apparatus treats a substrate surface by rotating a cylindrical polishing member in a state where the polishing member makes contact with the substrate surface. A polishing liquid is supplied to a polishing liquid passage that is provided in a central portion of the polishing member, and the polishing liquid is supplied to the substrate surface by rotating the polishing member while filtering the polishing liquid by a foam member provided on an outer periphery of the polishing liquid passage. Aperture diameters of the foam member are larger on the side of the polishing liquid passage than on the outside of the polishing member.

Abstract: An external address is input to an address register AR, and an internal address {circle over (1)} as an output from this address register AR is supplied to a burst length determination circuit BLD. The burst length is determined based on the level of this external address at a timing specified by a burst length setting signal /BL. A binary counter/logic BCL1 outputs burst internal addresses {circle over (2)} Ax″ to A0″ and internal addresses {circle over (1)} A16″ to A(x+1)′ to a memory cell array MCA. This allows data having a desired burst length to be input or output.

Abstract: A hybrid vehicle has an engine and a generator/motor connected through a planetary gear unit to an output shaft and the output of the engine is distributed between the generator and the output shaft. The vehicle is smoothly started by a driving motor. When vehicle speed V reaches an engine starting speed V*, the speed of generator/motor is changed to cause the engine to rotate, the engine is ignited and driving continues with the output torque produced by the engine supplemented by the driving motor. The hybrid vehicle allows for a smooth start and improved driving comfort even if an engine interruption scheme for halting the engine is employed, for example, halting the vehicle while waiting for a traffic signal to change.