Abstract: A modified conjugated diene-based polymer is produced by a method reacting a conjugated diene-based polymer having an active terminal, which is a polymer obtained by polymerizing a monomer including a conjugated diene compound in the presence of an alkali metal compound, with a compound [A] represented by formula (1). In formula (1), each of R1 and R2 represents a C1 to C8 hydrocarbyl group and the like; each of R5 and R6 represents a C1 to C8 hydrocarbyl group and the like; each of R3 and R4 represents a C1 to C6 hydrocarbylene group; R7 represents a C1 to C10 hydrocarbylene group; X1 represents a C1 to C4 hydrocarbyloxy group; each of X2 and X3 represent a C1 to C4 hydrocarbyl group or hydrocarbyloxy group; m is an integer of 1 to 3.

Abstract: A radiation-sensitive resin composition contains: a polymer having a first structural unit represented by formula (1), and a second structural unit represented by formula (2) and having an acid-labile group. A first acid, to be generated from the first acid generating agent, disassociates the acid labile group in the polymer upon heating under a condition involving a temperature of no less than 80° C. and no greater than 140° C. for a time period of 1 minute, and the second acid, to be generated from the second acid generating agent, does not substantially disassociate the acid-labile group under the condition. The polymer is synthesized by RAFT, ATRP, or NMP, and a RAFT agent is at least one selected from the group consisting of a mercaptocarboxylic acid ester, a disulfide, a dithioester, a xanthate, a dithiocarbamate, and a trithiocarbonate.

Abstract: A modified conjugated diene-based polymer is produced by a method reacting a conjugated diene-based polymer having an active terminal, which is a polymer obtained by polymerizing a monomer including a conjugated diene compound in the presence of an alkali metal compound, with a compound [A] represented by formula (1). In formula (1), each of R1 and R2 represents a C1 to C8 hydrocarbyl group and the like; each of R5 and R6 represents a C1 to C8 hydrocarbyl group and the like; each of R3 and R4 represents a C1 to C6 hydrocarbylene group; R7 represents a C1 to C10 hydrocarbylene group; X represents a C1 to C4 hydrocarbyloxy group; each of X2 and X3 represent a C1 to C4 hydrocarbyl group or hydrocarbyloxy group; m is an integer of 1 to 3.

Abstract: An object of the present invention is to provide a radiation-sensitive resin composition being superior in each of an inhibitory ability of defects, LWR performance, and sensitivity. An aspect of the present invention is a radiation-sensitive resin composition containing: a polymer having a first structural unit represented by the following formula (1), and a second structural unit represented by the following formula (2) and having an acid-labile group; a first acid generating agent which generates a first acid upon irradiation with a radioactive ray; and a second acid generating agent which generates a second acid upon irradiation with a radioactive ray, wherein the first acid, to be generated from the first acid generating agent, disassociates the acid labile group in the polymer upon heating under a condition involving a temperature of no less than 80° C. and no greater than 140° C.