Abstract: A pellet conveying device used with a bonding machine for, for example, semiconductor devices, including a conveying arm that has a collet for holding pellets. The conveying arm can move vertically and pivot horizontally by two different driving sources so that the collet can be moved between predetermined two positions such as a pellet pick-up position and a pellet releasing position.

Abstract: A covering mechanism for covering an area in which a movable table, etc. of, for example, semiconductor assembling machines using a flexible sheet cover that has elasticity. One end of the cover is fastened to a take-up shaft and the other end to a movable member that moves over the movable table, etc. in the direction perpendicular to the take-up shaft. The cover wrapped around the take-up shaft is stretched out when the movable member is moved away from the take-up shaft, thus covering the table. When the movable member is moved towards the take-up shaft, the cover, with the elasticity, is back to be wrapped around the take-up shaft. By arranging a plurality of take-up shafts at right angles, the covers can stretch in the directions perpendicular to each other, thus covering a wider area in which an X-Y table is moved around.