Abstract: A vacuum pump, a vacuum pump controller, and a remote controller are provided that can reduce the workload of users and field service engineers. A vacuum pump 10 includes a turbomolecular pump 100 that exhausts gas inside a semiconductor manufacturing apparatus X, and a controller 200 that performs control on the turbomolecular pump 100. The controller 200 includes a remote signal receiving means that receives a command signal from a remote controller 300, which remotely controls the turbomolecular pump 100, and changes a setting relating to an operating specification of the turbomolecular pump 100 on the basis of the command signal received by the remote signal receiving means.

Abstract: A vacuum pump and a washer which can reduce vibration of a rotor and the rotor which can reduce the vibration are provided. When an inertia moment ratio which is a ratio between the inertia moment around a z-axis and the inertia moment around an x-axis or a y-axis is larger than 1, a natural frequency ?2 does not match a rotational frequency ?z but goes away from that. When the natural frequency ?2 matches the rotational frequency ?z, the rotor vibrates and thus, a fatigue failure occurs in a rotor blade. When the rotor is to be made larger in a radial direction of a rotating shaft, a value of the inertia moment ratio is set to a value larger than 1.

Abstract: When drawing is being executed in an enlarged display that moves with the movement of a mouse, because the movement of the enlarged display area centers on the point of the whole image indicated by the moving mouse cursor, a difference arises between the amount of movement of the mouse cursor in relation to the whole image and the amount of movement of the mouse cursor in relation to the enlarged display image. An enlarged display movement method is disclosed that eliminates this difference. Enlarged display of an area centering on a point of a whole image indicated by a mouse cursor is displayed superposed over the original image and centered on the indicated point. As long as the mouse cursor is within the enlarged display area, drawing can be executed within the enlarged displayed area without the enlarged display area being moved, and when the mouse cursor moves outside the enlarged display area, a new enlarged display is executed centering on the present point indicated by the mouse cursor.