Patents by Inventor Yoshinori Hashizume

Yoshinori Hashizume has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mixed gas supply system with a backup supply system
    Patent number: 5470390
    Abstract: A first MFC 10 and a second MFC 10A are disposed respectively on a silane gas feed line 5 and an inert gas or other dilution gas feed line 19 for feeding a gas for semiconductors such as silane gas or an inert gas or other dilution gas to a mixing chamber 13. A buffer tank 21 is provided which restrains or relieves the pressure energy of the mixed gas coming from the mixing chamber 13 and supplies the same mixed gas to each of a plurality of semiconductor manufacturing units 4 separately. The first MFC 10 and second MFC 10A are actuated to open or close on the basis of an increase or decrease in the pressure value of the mixed gas stored in the buffer tank 21, thereby stopping or starting the feed of the silane gas and the inert gas or other dilution gas again.
    Type: Grant
    Filed: May 2, 1994
    Date of Patent: November 28, 1995
    Assignees: Teisan Kabushiki Kaisha, L'Air Liquide Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Georges Claude
    Inventors: Yukinobu Nishikawa, Yoshinori Hashizume, Takako Kimura