Abstract: A substrate processing apparatus includes a holder for holding a substrate horizontally, a rotator for rotating the holder, a liquid supplier for supplying liquid to the substrate, and a controller for controlling the holder, the rotator, and the liquid supplier. The holder includes a turntable configured to be rotated by the rotator, at least one first clamper configured to be rotated together with the turntable and moved between a clamping position and a releasing position, and at least one second clamper configured to be rotated with the turntable and moved between the clamping and releasing positions independently of the at least one first clamper. The controller controls the at least one first clamper and the at least one second clamper to alternately clamp the peripheral edge of the substrate while the holder is being rotated by the rotator and the liquid is being supplied to the substrate.

Abstract: A compound useful as an active ingredient of a pharmaceutical composition for treatment of cancer related to activation of immune cells or cancer resistant to anti-PD-1 antibody/anti-PD-L1 antibody therapy is provided. The present inventors have conducted studies on a compound useful as an active ingredient of a pharmaceutical composition for treatment of cancer related to activation of immune cells or cancer resistant to anti-PD-1 antibody/anti-PD-L1 antibody therapy, and confirmed that a heteroaryl carboxamide compound has DGK ? (DGKzeta) inhibitory effect, leading to completion of the present invention. The heteroaryl carboxamide compound of the present invention has DGK ? inhibitory effect, and can be used as a therapeutic agent for treatment of cancer related to activation of immune cells or cancer resistant to anti-PD-1 antibody/anti-PD-L1 antibody therapy.

Abstract: A semiconductor memory device includes a substrate, and a plurality of layers vertically stacked over the substrate. A first layer in the plurality of layers includes an active region extending in a first direction parallel to a top surface of the substrate. The semiconductor memory device also includes a first conductive line that extends vertically in a second direction perpendicular to the top surface of the substrate and penetrates through the active region. The semiconductor memory device also includes a capacitor including a first electrode that is disposed in the active region.

Abstract: A composite of polymer member and inorganic substrate, a method of manufacturing the same, and a polymer member therefor are provided. A method for manufacturing a composite 210, 220 of polymer member and inorganic substrate includes: providing a composite 110, 120 of thermally modified polymer layer and inorganic substrate in which one or more thermally modified polymer layers 20, 21, 22 are adhered onto an inorganic substrate 10, and bonding a polymer member 30, 31, 32 to the inorganic substrate via the one or more thermally modified polymer layers 20, 21, 22.

Abstract: A substrate processing method according to an embodiment of the present disclosure includes a step of holding a substrate by a substrate holding unit (31) which is rotatable, a step of arranging a top plate portion (41) above the substrate, a step of supplying a processing liquid to the substrate, and a step of supplying a rinsing liquid (Lr) between the substrate and the top plate portion (41) to wash the substrate and the top plate portion (41) with the rinsing liquid (Lr).

Abstract: An electric actuator 1 includes a motor 5 and a motion conversion mechanism 4 that converts a rotary motion generated by driving the motor 5 into a predetermined motion. A magnet 31 as a sensor target is disposed on a movable part performing a predetermined motion, and magnetic sensors 32 detecting position information of the magnet 31 is disposed around the magnet 31. A magnetic shield plate 34 is disposed between the motor 5 and the magnetic sensors 32, and an outer surface 5e of the motor 5 and an inner surface 34a of the magnetic shield plate 34 face each other with a predetermined gap 35 therebetween.

Abstract: A substrate processing apparatus includes a substrate holding unit that holds a substrate horizontally, a processing liquid supply unit that supplies a processing liquid to the substrate, a first processing cup that is provided annularly around the substrate holding unit, a second processing cup that is provided annularly around the substrate holding unit and on an inner side of the first processing cup, a drain port that is formed on a storage unit, a first exhaust port that is provided to exhaust a gas between the first processing cup and the second processing cup, a second exhaust port that is provided on an inner side of the first exhaust port to exhaust a gas on an inner side of the second processing cup, and a suction port that is provided between the drain port and the first exhaust port in a height direction thereof.

Abstract: A substrate processing method according to an embodiment of the present disclosure includes a step of holding a substrate by a substrate holding unit (31) which is rotatable, a step of arranging a top plate portion (41) above the substrate, a step of supplying a processing liquid to the substrate, and a step of supplying a rinsing liquid (Lr) between the substrate and the top plate portion (41) to wash the substrate and the top plate portion (41) with the rinsing liquid (Lr).

Abstract: A CZ crucible for growing a single crystal silicon ingot by a CZ method, where the CZ crucible includes a closed-end cylindrical graphite crucible and a closed-end cylindrical quartz glass crucible disposed inside the graphite crucible, and the CZ crucible includes a gap between an inner surface of a bottom portion of the graphite crucible and an outer surface of a bottom portion of the quartz glass crucible on a central axis of the CZ crucible, the gap keeping the inner surface of the bottom portion of the graphite crucible and the outer surface of the bottom portion of the quartz glass crucible contactless with each other. This provides a CZ crucible that ensures that a closed-end cylindrical quartz glass crucible for growing a single crystal silicon ingot by a CZ method can be stable and self-supporting when disposed inside a closed-end cylindrical graphite crucible.

Abstract: A quartz glass crucible for growing a single crystal silicon ingot by a CZ method, where the crucible has a closed-end cylindrical shape including a cylindrical straight body portion, a first curved portion continuous with a lower end of the straight body portion and having a first curvature R1, a second curved portion continuous with the first and having a second curvature R2, and a bottom portion continuous with the second curved portion, R1 and R2 have a relationship of R1<R2, and an outer surface of the bottom portion forms a flat surface perpendicular to a central axis of the crucible or a concave surface concave with respect to the flat surface. This provides a closed-end cylindrical quartz glass crucible for growing a single crystal silicon ingot by a CZ method that can be stable and self-supporting when it is disposed inside a closed-end cylindrical graphite crucible.

Abstract: A lower structure for a hybrid automobile in which a high-voltage battery is disposed in a lower surface of a floor panel includes an engine exhaust system component which is disposed in front of the high-voltage battery in the lower surface of the floor panel and on one vehicle-width-direction side of a center in a vehicle width direction and high-voltage devices which are disposed in front of the high-voltage battery and on another vehicle-width-direction side of the center in the vehicle width direction. In-vehicle equipment is disposed between the high-voltage battery and the high-voltage devices, and the in-vehicle equipment is in an inclined state where an upper surface of the in-vehicle equipment is inclined in a front-rear direction such that the in-vehicle equipment has a shorter dimension in the front-rear direction than a dimension in a horizontal state where the upper surface becomes horizontal.

Abstract: An object of the present invention is to provide a heat dissipation sheet having high thermal conductivity in the thickness direction. The present invention provides a heat dissipation sheet having a structure in which at least two thermally conductive insulation layers are laminated, wherein the lamination direction of the thermally conductive insulation layers is substantially perpendicular to the thickness direction of the heat dissipation sheet, and wherein for the entire cross-section perpendicular to the in-plane direction of the heat dissipation sheet, the thermally conductive insulation layer contains 75 to 97% by area of insulating particles, 3 to 25% by area of a binder resin, and 10% by area or less of voids.

Abstract: The lower structure of an electric vehicle includes: an automatic transmission provided below a floor panel and in an intermediate portion in a right-left direction thereof; an inverter arranged between the automatic transmission and a floor side frame; and an attachment bracket for attaching the inverter to the floor panel. The attachment bracket has an outer shell structure including: an inner wall portion dividing the inverter and the automatic transmission; an outer wall portion dividing the inverter and the floor side frame; an upper wall portion; and a lower wall portion.

Abstract: An electric actuator includes an electric motor 5, and a motion conversion mechanism 4 configured to convert a rotary motion of the electric motor 5 into a linear motion, in which the motion conversion mechanism 4 has a nut 17 rotatably supported, and a screw shaft 18 configured to axially move in accordance with a rotation of the nut 17, the electric actuator is provided with a case 20 covering an axial end surface 18b of the screw shaft 18, and the electric actuator is provided with an elastic member 30 between the axial end surface 18b of the screw shaft 18 and an opposite surface 20b of the case 20 facing the axial end surface 18b of the screw shaft 18.

Abstract: A substrate processing apparatus includes a substrate processing unit, a partition wall, a first gas supply, and a second gas supply. The substrate processing unit performs a liquid processing on a substrate. The partition wall separates a first space defined from a carry-in/out port through which the substrate is loaded to the substrate processing unit, and a second space other than the first space. The first gas supply is connected to the partition wall, and supplies an atmosphere adjusting gas to the first space. The second gas supply is connected to a place different from the first gas supply in the partition wall, and supplies an atmosphere adjusting gas to the first space.

Abstract: A composite of polymer member and inorganic substrate, a method of manufacturing the same, and a polymer member therefor are provided. A method for manufacturing a composite 210, 220 of polymer member and inorganic substrate includes: providing a composite 110, 120 of thermally modified polymer layer and inorganic substrate in which one or more thermally modified polymer layers 20, 21, 22 are adhered onto an inorganic substrate 10, and bonding a polymer member 30, 31, 32 to the inorganic substrate via the one or more thermally modified polymer layers 20, 21, 22.

Abstract: An object of the present invention is to provide an insulation sheet having high thermal conductivity in the in-plane direction. The present invention provides an insulation sheet comprising insulating particles and a binder resin, wherein, for the entire cross-section of the sheet perpendicular to the in-plane direction, the insulation sheet contains 75 to 97% by area of the insulating particles, 3 to 25% by area of the binder resin, and 10% by area or less of the voids.

Abstract: An optical element for terahertz waves includes: an optical component including a silicon surface, an antireflection film including an organic resin including a cycloolefin-based polymer as a main component, and inorganic particles dispersed in the organic resin; and an adhesive layer located between the optical component and the antireflection film in a thickness direction of the antireflection film and bonding the silicon surface of the optical component and the antireflection film to each other. The adhesive layer includes a thermally denatured olefin-based polymer.

Abstract: A control device and a control method for controlling an actuating mechanism for a vehicle according to the present invention are designed to detect whether an abnormality occurs in the voltage application device provided with a booster circuit to generate a boosted voltage to be applied to an electrorheological fluid, and to stop boosting of the booster circuit when an abnormality occurs in the voltage application device for preventing overheating caused by overcurrent flowing to the voltage application device when an abnormality occurs such as short-circuit and ground fault in the voltage application device.

Abstract: A substrate processing apparatus includes a holder for holding a substrate horizontally, a rotator for rotating the holder, a liquid supplier for supplying liquid to the substrate, and a controller for controlling the holder, the rotator, and the liquid supplier. The holder includes a turntable configured to be rotated by the rotator, at least one first damper configured to be rotated together with the turntable and moved between a clamping position and a releasing position, and at least one second damper configured to be rotated with the turntable and moved between the clamping and releasing positions independently of the at least one first damper. The controller controls the at least one first damper and the at least one second damper to alternately clamp the peripheral edge of the substrate while the holder is being rotated by the rotator and the liquid is being supplied to the substrate.