Patents by Inventor Yoshinori KUSAKABE

Yoshinori KUSAKABE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal processing apparatus and cooling method
    Patent number: 9099505
    Abstract: A thermal processing apparatus including: a cylindrical processing vessel; a support unit to be loaded into and unloaded from the vessel; and a heating furnace surrounding an outer periphery of the vessel, with a cooling space therebetween. The furnace is connected to a cooling-gas introduction unit, including a gas introduction passage to which a blowing fan is connected, for introducing a cooling gas into the cooling space during a temperature lowering operation after a thermal process. The furnace is connected to a cooling-gas discharge unit, including a heat exchanger, a suction fan, and a gas discharge passage, for discharging the cooling gas of a raised temperature from the cooling space. Connected to the gas discharge passage at a position upstream of the heat exchanger is a temperature-lowering gas introduction unit for introducing a temperature-lowering gas to the cooling gas of a raised temperature so as to lower its temperature.
    Type: Grant
    Filed: September 14, 2010
    Date of Patent: August 4, 2015
    Assignee: Tokyo Electron Limited
    Inventors: Yoshinori Kusakabe, Kenichi Yamaga
  • THERMAL PROCESSING APPARATUS AND COOLING METHOD
    Publication number: 20110076632
    Abstract: A thermal processing apparatus including: a cylindrical processing vessel; a support unit to be loaded into and unloaded from the vessel; and a heating furnace surrounding an outer periphery of the vessel, with a cooling space therebetween. The furnace is connected to a cooling-gas introduction unit, including a gas introduction passage to which a blowing fan is connected, for introducing a cooling gas into the cooling space during a temperature lowering operation after a thermal process. The furnace is connected to a cooling-gas discharge unit, including a heat exchanger, a suction fan, and a gas discharge passage, for discharging the cooling gas of a raised temperature from the cooling space. Connected to the gas discharge passage at a position upstream of the heat exchanger is a temperature-lowering gas introduction unit for introducing a temperature-lowering gas to the cooling gas of a raised temperature so as to lower its temperature.
    Type: Application
    Filed: September 14, 2010
    Publication date: March 31, 2011
    Applicant: Tokyo Electron Limited
    Inventors: Yoshinori KUSAKABE, Kenichi Yamaga
  • Wafer boat
    Patent number: D769201
    Type: Grant
    Filed: April 30, 2015
    Date of Patent: October 18, 2016
    Assignee: Tokyo Electron Limited
    Inventors: Yoshinori Kusakabe, Masami Oikawa
  • Wafer boat
    Patent number: D772183
    Type: Grant
    Filed: April 30, 2015
    Date of Patent: November 22, 2016
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yoshinori Kusakabe, Masami Oikawa
  • Wafer boat
    Patent number: D789310
    Type: Grant
    Filed: April 30, 2015
    Date of Patent: June 13, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yoshinori Kusakabe, Masami Oikawa
  • Wafer boat
    Patent number: D791721
    Type: Grant
    Filed: April 30, 2015
    Date of Patent: July 11, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yoshinori Kusakabe, Masami Oikawa