Abstract: An exposure apparatus for exposing a substrate to exposure light via an original. The apparatus includes a reflector, which includes a multilayer film and a ruthenium film, and reflects the exposure light. The multilayer film reflects the exposure light, and the ruthenium film is arranged on the multilayer film. A vacuum container contains the reflector, an exhauster exhausts exhaust gas in the vacuum container, and a regulator supplies water vapor into the vacuum container and regulates an amount of the water vapor in the vacuum container, based on an amount of carbonaceous gas in the vacuum chamber, so as to retard oxidation of the ruthenium film.

Abstract: This invention provides a novel technique for reducing at least the former of the oxidation of a ruthenium film and the deposition of carbon onto the ruthenium film.

Abstract: A synchrotron radiation apparatus includes a linear accelerator for accelerating an injected electron beam to 20 MeV or less, an energy compaction system for reducing the energy width of an electron beam, an accumulation ring for permitting the high energy electrons output from the energy compaction system to be circulated therein, an injector for injecting high energy electrons into the accumulation ring, a plurality of deflection electromagnets disposed on the respective corner portions of the accumulation ring, for deflecting the high energy electrons from the injector by a preset angle so as to cause the high energy electrons to be circulated in the accumulation ring, and a plurality of beam lines for guiding to a predetermined position, emission light emitted from the accumulation ring when the high energy electrons are circulated in the accumulation ring at a high speed.

Abstract: An electron synchrotron accelerating apparatus comprises an accelerating ring, superconducting magnets for applying deflecting magnetic fields inside the accelerating ring, and an electron injector for injecting low-energy electron beams of 40 MeV or less into the accelerating ring. The low-energy electron beams of 40 MeV or less are injected a plurality of times for each predetermined period of time, by means of the electron injector. Inventors hereof find that the radiation damping time is shorter than the beam lifetime, even though the energy of the injected electron beams is relatively low. Accordingly, the electron beams can be injected a plurality of times before the lifetime of the injected beams terminates. Even though the energy of the injected electron beams is relatively low, therefore, accumulated electron current can be increased to a predetermined value.

Abstract: Disclosed is a superconducting apparatus comprising a superconducting coil and a cooling apparatus for cooling this superconducting coil. The cooling apparatus is constituted by a cooling medium circulating path for subjecting a cooling medium to a vaporization/liquefication cycle, and a temperature equalizing plate for effecting a uniform cooling of the superconducting coil by the cooling medium. The cooling medium circulating path is constituted by a pair of flowing-down parts through which a liquid cooling medium flows downwards by gravity, and a pair of vaporization parts through which the liquid cooling medium flows upwards while it is being vaporized. The temperature-equalizing plate covers the peripheral surface making one entire round of the superconducting coil around the axis of the coil. It is divided into at least two parts at its lower end, which are electrically insulated from each other.

Abstract: A torus type nuclear fusion apparatus including a main limiter for contacting plasma generated in a space enclosed by a first wall of a blanket and maintaining the shape of plasma stable, and a sub-limiter arranged between the first wall and the outer circumference of plasma to neutralize helium ion, a product of fusion reaction.