Patents by Inventor Yoshio Morishige
Yoshio Morishige has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 8559000Abstract: A method and apparatus of inspecting a sample, in which the sample is inspected under a plurality of inspection conditions, and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions, are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.Type: GrantFiled: August 23, 2012Date of Patent: October 15, 2013Assignees: Hitachi High-Technologies Corporation, Hitachi, Ltd.Inventors: Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya, Maki Tanaka, Kenji Watanabe, Tetsuya Watanabe, Yoshio Morishige
-
Patent number: 8422009Abstract: In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.Type: GrantFiled: July 12, 2011Date of Patent: April 16, 2013Assignee: Hitachi High-Technologies CorporationInventors: Hiroyuki Yamashita, Mamoru Kobayashi, Eiji Imai, Yoshio Morishige, Koichi Nagoya, Hideki Fukushima
-
Publication number: 20120312104Abstract: A method and apparatus of inspecting a sample, in which the sample is inspected under a plurality of inspection conditions, and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions, are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.Type: ApplicationFiled: August 23, 2012Publication date: December 13, 2012Inventors: Akira HAMAMATSU, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya, Maki Tanaka, Kenji Watanabe, Tetsuya Watanabe, Yoshio Morishige
-
Patent number: 8274651Abstract: A method and apparatus of inspecting a sample, in which the sample is inspected under a plurality of inspection conditions, and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions, are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.Type: GrantFiled: September 16, 2011Date of Patent: September 25, 2012Assignees: Hitachi, Ltd., Hitachi High-Technologies CorporationInventors: Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya, Maki Tanaka, Kenji Watanabe, Tetsuya Watanabe, Yoshio Morishige
-
Publication number: 20120006131Abstract: A method and apparatus of inspecting a sample, in which the sample is inspected under a plurality of inspection conditions, and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions, are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.Type: ApplicationFiled: September 16, 2011Publication date: January 12, 2012Inventors: Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya, Maki Tanaka, Kenji Watanabe, Tetsuya Watanabe, Yoshio Morishige
-
Publication number: 20110267605Abstract: In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.Type: ApplicationFiled: July 12, 2011Publication date: November 3, 2011Applicant: Hitachi High-Technologies CorporationInventors: Hiroyuki Yamashita, Mamoru Kobayashi, Eiji Imai, Yoshio Morishige, Koichi Nagoya, Hideki Fukushima
-
Patent number: 8040503Abstract: A method and apparatus of inspecting a sample, in which the sample is inspected under a plurality of inspection conditions, and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions, are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.Type: GrantFiled: January 5, 2010Date of Patent: October 18, 2011Assignees: Hitachi, Ltd., Hitachi High-Technologies CorporationInventors: Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya, Maki Tanaka, Kenji Watanabe, Tetsuya Watanabe, Yoshio Morishige
-
Patent number: 7986405Abstract: In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.Type: GrantFiled: April 12, 2010Date of Patent: July 26, 2011Assignee: Hitachi High-Technologies CorporationInventors: Hiroyuki Yamashita, Mamoru Kobayashi, Eiji Imai, Yoshio Morishige, Koichi Nagoya, Hideki Fukushima
-
Patent number: 7940383Abstract: A method for detecting defects on an object includes an illumination optical unit which obliquely projects a laser focused onto a line on a surface of the object and white-color, a table unit which mounts the specimen and which is movable, a detection optical unit which detects with an image sensor an image of light formed by light reflected from the object and passed through a filter which blocks diffraction light resulting from patterns formed on the object, a signal processor which processes a signal outputted from the image sensor of the detection optical unit to extract defects of the object, and a display unit which displays information of defects extracted by the signal processor. The filter is adjustable.Type: GrantFiled: December 3, 2009Date of Patent: May 10, 2011Assignees: Hitachi, Ltd., Hitachi High-Technologies CorporationInventors: Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga, Keiji Sakai, Takanori Ninomiya, Tetsuyai Watanabe, Hisato Nakamura, Takahiro Jingu, Yoshio Morishige, Shuichi Chikamatsu
-
Publication number: 20100195095Abstract: In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.Type: ApplicationFiled: April 12, 2010Publication date: August 5, 2010Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Hiroyuki YAMASHITA, Mamoru Kobayashi, Eiji Imai, Yoshio Morishige, Koichi Nagoya, Hideki Fukushima
-
Publication number: 20100140474Abstract: A method and apparatus of inspecting a sample, in which the sample is inspected under a plurality of inspection conditions, and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions, are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.Type: ApplicationFiled: January 5, 2010Publication date: June 10, 2010Inventors: Akira HAMAMATSU, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomya, Maki Tanaka, Kenji Watanabe, Tetsuya Watanabe, Yoshio Morishige
-
Patent number: 7719671Abstract: In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.Type: GrantFiled: February 23, 2007Date of Patent: May 18, 2010Assignee: Hitachi High-Technologies CorporationInventors: Hiroyuki Yamashita, Mamoru Kobayashi, Eiji Imai, Yoshio Morishige, Koichi Nagoya, Hideki Fukushima
-
Publication number: 20100088042Abstract: An apparatus and method for detecting defects on a specimen includes an illumination optical unit which obliquely projects a laser focused onto a line on a surface of the specimen, a table unit which mounts the specimen and which is movable, a detection optical unit which detects with an image sensor an image of light formed by light reflected from the specimen and passed through a filter which blocks diffraction light resulting from patterns formed on the specimen, a signal processor which processes a signal outputted from the image sensor of the detection optical unit to extract defects of the specimen, and a display unit which displays information of defects extracted by the signal processor. The filter is adjustable.Type: ApplicationFiled: December 3, 2009Publication date: April 8, 2010Inventors: Minori NOGUCHI, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga, Keiji Sakai, Takanori Ninomiya, Tetsuyai Watanabe, Hisato Nakamura, Takahiro Jingu, Yoshio Morishige, Shuichi Chikamatsu
-
Patent number: 7692779Abstract: An apparatus for detecting defects on a specimen including an illumination optical unit which obliquely projects a laser onto a region which is longer in one direction than in a direction transverse to said one direction on a surface of a specimen, a table unit which mounts said specimen and which is movable, a detection optical unit which detects with an image sensor an image of light formed by light reflected from said specimen in both directions of the one direction and the direction transverse and which reflected light in both directions is formed on said image sensor while said table is moving, a signal processor which processes a signal outputted from said image sensor of said detection optical unit to extract defects of said specimen. A display unit which displays information of defects extracted by said signal processor.Type: GrantFiled: October 6, 2005Date of Patent: April 6, 2010Assignees: Hitachi, Ltd., Hitachi High-Technologies CorporationInventors: Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga, Keiji Sakai, Takanori Ninomiya, Tetsuya Watanabe, Hisato Nakamura, Takahiro Jingu, Yoshio Morishige, Shuichi Chikamatsu
-
Patent number: 7643138Abstract: A method and apparatus of inspecting a sample, in which the sample is inspected under a plurality of inspection conditions, and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions, are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.Type: GrantFiled: July 30, 2008Date of Patent: January 5, 2010Assignees: Hitachi, Ltd., Hitachi High-Technologies CorporationInventors: Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya, Maki Tanaka, Kenji Watanabe, Tetsuya Watanabe, Yoshio Morishige
-
Patent number: 7639350Abstract: A method for detecting defects on a specimen includes mounting a specimen on a table with which is movable, obliquely projecting a laser as a line onto a surface of the specimen, detecting with an image sensor an image of light formed by light reflected from the specimen and passed through a filter which blocks scattered light resulting from repetitive patterns formed on the specimen, processing a signal outputted from the image sensor to extract defects of the specimen, and a displaying information of defects extracted by the signal processor.Type: GrantFiled: March 5, 2007Date of Patent: December 29, 2009Assignees: Hitachi, Ltd, Hitachi High-Technologies CorporationInventors: Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga, Keiji Sakai, Takanori Ninomiya, Tetsuya Watanabe, Hisato Nakamura, Takahiro Jingu, Yoshio Morishige, Shuichi Chikamatsu
-
Publication number: 20080291437Abstract: A method and apparatus of inspecting a sample, in which the sample is inspected under a plurality of inspection conditions, and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions, are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.Type: ApplicationFiled: July 30, 2008Publication date: November 27, 2008Inventors: Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya, Maki Tanaka, Kenji Watanabe, Tetsuya Watanabe, Yoshio Morishige
-
Patent number: 7443496Abstract: A defect inspection apparatus includes an illumination optical unit for obliquely illuminating an object with a slit-like shaped laser, a first detection optical unit for detecting a first image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a first direction substantially normal to a surface of the object, a second detection optical unit for detecting a second image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a second direction inclined to the normal direction to the surface of the object, an image signal processing unit which processes a signal outputted from the first detection optical unit and a signal outputted from the second detection optical unit, and an output unit which outputs information processed by the image signal processing unit.Type: GrantFiled: March 5, 2007Date of Patent: October 28, 2008Assignees: Hitachi, Ltd., Hitachi High-Technologies CorporationInventors: Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga, Keiji Sakai, Takanori Ninomiya, Tetsuya Watanabe, Hisato Nakamura, Takahiro Jingu, Yoshio Morishige, Shuichi Chikamatsu
-
Patent number: 7417723Abstract: A method and apparatus of inspecting a sample, in which the sample is inspected under a plurality of inspection conditions, and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions, are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.Type: GrantFiled: May 31, 2006Date of Patent: August 26, 2008Assignees: Hitachi, Ltd., Hitachi High-Technologies CorporationInventors: Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya, Maki Tanaka, Kenji Watanabe, Tetsuya Watanabe, Yoshio Morishige
-
Publication number: 20070201019Abstract: In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.Type: ApplicationFiled: February 23, 2007Publication date: August 30, 2007Inventors: Hiroyuki Yamashita, Mamoru Kobayashi, Eiji Imai, Yoshio Morishige, Koichi Nagoya, Hideki Fukushima