Patents by Inventor Yoshiro Takemura
Yoshiro Takemura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7607914Abstract: A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.Type: GrantFiled: February 23, 2007Date of Patent: October 27, 2009Assignee: Ebara CorporationInventors: Tetsuo Komai, Kohtaro Kawamura, Takeshi Tsuji, Rikiya Nakamura, Kazutaka Okuda, Keiichi Ishikawa, Tomonori Ohashi, Yoshiro Takemura, Yasutaka Muroga, Tadakazu Nishikawa, Yuji Shirao
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Publication number: 20070160946Abstract: A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.Type: ApplicationFiled: February 23, 2007Publication date: July 12, 2007Inventors: Tetsuo Komai, Kohtaro Kawamura, Takeshi Tsuji, Rikiya Nakamura, Kazutaka Okuda, Keiichi Ishikawa, Tomonori Ohashi, Yoshiro Takemura, Yasutaka Muroga, Tadakazu Nishikawa, Yuji Shirao
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Patent number: 7112060Abstract: The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4 and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2 to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).Type: GrantFiled: April 12, 2004Date of Patent: September 26, 2006Assignee: Ebara CorporationInventors: Yoshiro Takemura, Tetsuo Komai, Kotaro Kawamura, Takeshi Tsuji, Kazutaka Okuda, Rikiya Nakamura, Keiichi Ishikawa, Tomonori Ohashi, Yasutaka Muroga, Tadakazu Nishikawa, Yuji Shirao, Hiroyuki Yamada
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Publication number: 20050271988Abstract: A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.Type: ApplicationFiled: August 18, 2005Publication date: December 8, 2005Inventors: Tetsuo Komai, Kohtaro Kawamura, Takeshi Tsuji, Rikiya Nakamura, Kazutaka Okuda, Keiichi Ishikawa, Tomonori Ohashi, Yoshiro Takemura, Yasutaka Muroga, Tadakazu Nishikawa, Yuji Shirao
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Patent number: 6969250Abstract: A waste gas treatment system having a burner part and a combustion chamber provided at a downstream side of the burner part. Combustion flames are formed from the burner part toward the combustion chamber, and a waste gas is introduced into the combustion flames, thereby oxidatively decomposing the waste gas. The combustion chamber is formed from an inner wall made of a fiber-reinforced ceramic material. Therefore, the wear of the inner wall due to heat and corrosion is minimized, and thermal stress cracking is also reduced. Consequently, the lifetime of the system increases, and the cost of equipment and the availability factor can be improved. In addition, because the inner wall exhibits no catalytic effect, the formation of thermal NOx is suppressed, and it is possible to achieve environmental preservation and to simplify the treatment equipment.Type: GrantFiled: November 29, 1999Date of Patent: November 29, 2005Assignee: Ebara CorporationInventors: Kotaro Kawamura, Rikiya Nakamura, Yuji Shirao, Yoshiro Takemura, Kazutaka Okuda, Takeshi Tsuji
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Patent number: 6948929Abstract: A combustion type waste gas treatment system is capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.Type: GrantFiled: September 26, 2001Date of Patent: September 27, 2005Assignee: Ebara CorporationInventors: Tetsuo Komai, Kohtaro Kawamura, Takeshi Tsuji, Rikiya Nakamura, Kazutaka Okuda, Keiichi Ishikawa, Tomonori Ohashi, Yoshiro Takemura, Yasutaka Muroga, Tadakazu Nishikawa, Yuji Shirao
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Publication number: 20040191142Abstract: The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4 and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2 to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).Type: ApplicationFiled: April 12, 2004Publication date: September 30, 2004Applicant: EBARA CORPORATIONInventors: Yoshiro Takemura, Tetsuo Komai, Kotaro Kawamura, Takeshi Tsuji, Kazutaka Okuda, Rikiya Nakamura, Keiichi Ishikawa, Tomonori Ohashi, Yasutaka Muroga, Tadakazu Nishikawa, Yuji Shirao, Hiroyuki Yamada
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Patent number: 6796794Abstract: A combustor for waste gas treatment having a flame stabilizing zone surrounded by a peripheral wall and closed with a bottom wall. The flame stabilizing zone is provided to face a combustion chamber. Burner ports for auxiliary combustible gas are provided in the peripheral wall to inject an auxiliary combustible gas into the flame stabilizing zone so as to produce swirling flows. Burner ports for waste gas are provided in the bottom wall to inject a gas into the flame stabilizing zone.Type: GrantFiled: August 9, 2002Date of Patent: September 28, 2004Assignee: Ebara CorporationInventors: Yoshiro Takemura, Kohtaro Kawamura, Yuji Shirao, Rikiya Nakamura
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Patent number: 6736635Abstract: The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4 and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2 to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).Type: GrantFiled: May 1, 2002Date of Patent: May 18, 2004Assignee: Ebara CorporationInventors: Yoshiro Takemura, Tetsuo Komai, Kotaro Kawamura, Takeshi Tsuji, Kazutaka Okuda, Rikiya Nakamura, Keiichi Ishikawa, Tomonori Ohashi, Yasutaka Muroga, Tadakazu Nishikawa, Yuji Shirao, Hiroyuki Yamada
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Publication number: 20040028590Abstract: A combustion type waste gas treatment method wherein waste gas discharged from an industrial product manufacturing process is introduced into combustion flames to thermally or oxidatively decompose a combustible component in the waste gas. Hydrogen gas and oxygen gas are generated by electrolysis of water and supplied as a gas for combustion to form the combustion flames. A pipe or a hole through which the combustion flames can be viewed directly is formed in a wall of the burner part upstream of the combustion flames. The combustion flames are detected with a UV sensor through the pipe or the hole.Type: ApplicationFiled: July 7, 2003Publication date: February 12, 2004Inventors: Takeshi Tsuji, Kohtaro Kawamura, Masaru Nakaniwa, Kazutaka Okuda, Keiichi Ishikawa, Kazutomo Miyazaki, Rikiya Nakamura, Tetsuo Komai, Tomonori Ohashi, Yoshiro Takemura
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Patent number: 6682342Abstract: A combustor for waste gas treatment having a flame stabilizing zone 15 surrounded by a peripheral wall 13 and closed with a bottom wall 14. The flame stabilizing zone 15 is provided to face a combustion chamber 11. Burner ports 23 for auxiliary combustible gas are provided in the peripheral wall 13 to inject an auxiliary combustible gas B into the flame stabilizing zone 15 so as to produce swirling flows. Burner ports 22 for waste gas are provided in the bottom wall 14 to inject a waste gas A into the flame stabilizing zone 15.Type: GrantFiled: October 31, 2002Date of Patent: January 27, 2004Assignee: Ebara CorporationInventors: Yoshiro Takemura, Kohtaro Kawamura, Yuji Shirao, Rikiya Nakamura
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Publication number: 20030054314Abstract: A combustor for waste gas treatment having a flame stabilizing zone 15 surrounded by a peripheral wall 13 and closed with a bottom wall 14. The flame stabilizing zone 15 is provided to face a combustion chamber 11. Burner ports 23 for auxiliary combustible gas are provided in the peripheral wall 13 to inject an auxiliary combustible gas B into the flame stabilizing zone 15 so as to produce swirling flows. Burner ports 22 for waste gas are provided in the bottom wall 14 to inject an waste gas A into the flame stabilizing zone 15.Type: ApplicationFiled: October 31, 2002Publication date: March 20, 2003Inventors: Yoshiro Takemura, Kohtaro Kawamura, Yuji Shirao, Rikiya Nakamura
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Publication number: 20030054299Abstract: A waste gas treatment system having a burner part and a combustion chamber provided at the downstream side of the burner part, wherein combustion flames are formed from the burner part toward the combustion chamber, and a waste gas is introduced into the combustion flames, thereby oxidatively decomposing the waste gas. The combustion chamber is formed from an inner wall made of a fiber-reinforced ceramic material. Therefore, the wear of the inner wall due to heat and corrosion is minimized, and thermal stress cracking is also reduced. Consequently, the lifetime of the system increases, and the cost of equipment and the availability factor can be improved. In addition, because the inner wall exhibits no catalytic effect, the formation of thermal NOx is suppressed, and it is possible to achieve environmental preservation and to simplify the treatment equipment.Type: ApplicationFiled: November 4, 2002Publication date: March 20, 2003Inventors: Kotaro Kawamura, Rikiya Nakamura, Yuji Shirao, Yoshiro Takemura, Kazutaka Okuda, Takeshi Tsuji
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Publication number: 20020192610Abstract: A combustor for waste gas treatment having a flame stabilizing zone 15 surrounded by a peripheral wall 13 and closed with a bottom wall 14. The flame stabilizing zone 15 is provided to face a combustion chamber 11. Burner ports 23 for auxiliary combustible gas are provided in the peripheral wall 13 to inject an auxiliary combustible gas B into the flame stabilizing zone 15 so as to produce swirling flows. Burner ports 22 for waste gas are provided in the bottom wall 14 to inject an waste gas A into the flame stabilizing zone 15.Type: ApplicationFiled: August 9, 2002Publication date: December 19, 2002Inventors: Yoshiro Takemura, Kohtaro Kawamura, Yuji Shirao, Rikiya Nakamura
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Patent number: 6494711Abstract: A combustor for waste gas treatment having a flame stabilizing zone 15 surrounded by a peripheral wall 13 and closed with a bottom wall 14. The flame stabilizing zone 15 is provided to face a combustion chamber 11. Burner ports 23 for auxiliary combustible gas are provided in the peripheral wall 13 to inject an auxiliary combustible gas B into the flame stabilizing zone 15 so as to produce swirling flows. Burner ports 22 for waste gas are provided in the bottom wall 14 to inject a waste gas A into the flame stabilizing zone 15.Type: GrantFiled: April 5, 2000Date of Patent: December 17, 2002Assignee: Ebara CorporationInventors: Yoshiro Takemura, Kohtaro Kawamura, Yuji Shirao, Rikiya Nakamura
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Publication number: 20020041836Abstract: A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous and combustible waste gas under heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion frames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.Type: ApplicationFiled: September 26, 2001Publication date: April 11, 2002Inventors: Tetsuo Komai, Kohtaro Kawamura, Takeshi Tsuji, Rikiya Nakamura, Kazutaka Okuda, Keiichi Ishikawa, Tomonori Ohashi, Yoshiro Takemura, Yasutaka Muroga, Tadakazu Nishikawa, Yuji Shirao