Abstract: Described herein is a technique capable of properly attaching a nozzle to a reaction tube. According to one aspect thereof, there is provided a nozzle installation jig including: a lower plate configured to make contact with a process vessel in a vicinity of a lower end opening of the process vessel in which a nozzle is provided; a frame fixed to the lower plate and extending upward with respect to the lower plate; an upper plate fixed to the frame and provided with a sensor configured to detect a position of the nozzle in the process vessel; and a notification device configured to transmit a notification to an operator according to a detection result of the sensor.

Abstract: Provided is a redundant system capable of executing a start request received during update of a microcomputer control program even when an external nonvolatile memory is employed in a redundant system in which one load is controlled by a plurality of control circuits having a redundant configuration, the redundant system being low in cost and excellent in responsiveness. In the redundant system that controls one load by a plurality of control systems having a redundant configuration, when an update program signal for the plurality of control systems is received, update of a control program for each of the plurality of control systems in a predetermined order is individually executed, and when a start request of the load is received during the execution of the update of a control program of one predetermined system, the load is controlled by a system other than the one predetermined system, and during the control, the update of the control program of the one predetermined system is continued.

Abstract: There are provided a substrate holder that holds a plurality of substrates, a reaction tube that houses the substrate holder, a gas supplier that has a plurality of supply holes corresponding one-to-one to the plurality of substrates and supplies gas to the plurality of substrates, and a plurality of plates provided in substantially parallel to the plurality of substrates, in which at least part of each of the plurality of plates is disposed between the gas supplier and the substrate holder.

Abstract: Described herein is a technique capable of properly attaching a nozzle to a reaction tube. According to one aspect thereof, there is provided a nozzle installation jig including: a lower plate configured to make contact with a process vessel in a vicinity of a lower end opening of the process vessel in which a nozzle is provided; a frame fixed to the lower plate and extending upward with respect to the lower plate; an upper plate fixed to the frame and provided with a sensor configured to detect a position of the nozzle in the process vessel; and a notification device configured to transmit a notification to an operator according to a detection result of the sensor.

Abstract: There is provided a technique that includes: a cylindrical outer tube; an inner tube that is installed inside the outer tube and configured such that a substrate is capable of being processed in a process chamber formed in the inner tube; a manifold that is installed below the outer tube and the inner tube, in fluid communication with an internal space of the inner tube, and formed in a cylindrical shape with an exhaust space isolated from an annular space between the inner tube and the outer tube; a process gas nozzle configured to supply a process gas that processes the substrate to an inside of the inner tube; a purge gas nozzle configured to supply a purge gas to the annular space; and a conductance changer that is installed at a partition wall between the annular space and the exhaust space.

Abstract: A technique makes it possible to prevent direct contact between a nozzle outer periphery and a nozzle adapter and to prevent generation of particles due to the direct contact. The technique includes: a nozzle that has an attaching portion formed on one end and discharges, into a processing chamber, a gas supplied to the attaching portion; a nozzle adapter that is disposed in the processing chamber and is clearance-fitted to an outer peripheral surface of the attaching portion with a predetermined gap; and a plurality of annular buffer members that is disposed in the attaching portion and abuts on the nozzle adapter, in which at least one of the annular buffer members is compressed and deformed in a radial direction of the corresponding annular buffer member in a state where the attaching portion of the nozzle is attached to the nozzle adapter.

Abstract: Described herein is a technique capable of properly attaching a nozzle to a reaction tube. According to one aspect thereof, there is provided a nozzle installation jig including: a lower plate configured to make contact with a process vessel in a vicinity of a lower end opening of the process vessel in which a nozzle is provided; a frame fixed to the lower plate and extending upward with respect to the lower plate; an upper plate fixed to the frame and provided with a sensor configured to detect a position of the nozzle in the process vessel; and a notification device configured to transmit a notification to an operator according to a detection result of the sensor.

Abstract: There is provided a technique capable of capable of preventing a substrate from being metal-contaminated by a component constituting a furnace opening. According to one aspect thereof, there is provided a furnace opening structure including: an upper inlet structure connected to a first protrusion provided at a lower portion of a reaction tube via a first seal, and configured to support the reaction tube; a lower inlet structure connected to the upper inlet structure via a second seal; and a fixing structure connected to the upper inlet structure and configured to fix the first protrusion, wherein the upper inlet structure is provided below an exhaust pipe provided at the lower portion of the reaction tube, and wherein the first protrusion is configured to be capable of being cooled by circulating a cooling medium through flow paths provided inside the upper inlet structure and the fixing structure, respectively.

Abstract: Described herein is a technique capable of properly attaching a nozzle to a reaction tube. According to one aspect thereof, there is provided a nozzle installation jig including: a lower plate configured to make contact with a process vessel in a vicinity of a lower end opening of the process vessel in which a nozzle is provided; a frame fixed to the lower plate and extending upward with respect to the lower plate; an upper plate fixed to the frame and provided with a sensor configured to detect a position of the nozzle in the process vessel; and a notification device configured to transmit a notification to an operator according to a detection result of the sensor.

Abstract: Provided is a drive control device for an electric motor in which the number of terminals and the number of wires can be reduced. The drive control device includes: an inverter circuit that drives an electric motor having a plurality of phases; a drive circuit including drivers; a control circuit that outputs a control signal to control the drive circuit; and a signal line that connects the control circuit to the drive circuit to transmits a control signal from the control circuit to the drive circuit, in which the number of signal lines is fewer than the number of the phases of the electric motor.

Abstract: Provided is a method for manufacturing a gasket-constituting plate made of metal, in which a folded-back part whose thickness is set to be less than the thickness of a general part is provided at a periphery of a combustion chamber hole. The method includes, with a raw metal plate being held between a blank holder and a drawing die having an extrusion hole, extruding the raw metal plate in a thickness direction thereof by using a drawing punch as an extrusion tool to form a projecting part in the raw metal plate, and causing a tensile force to act on the raw metal plate due to the extrusion so as to elongate the raw metal plate, to form a thin peripheral wall part at an outer peripheral portion of the projecting part.

Abstract: Provided is a drive control device for an electric motor in which the number of terminals and the number of wires can be reduced. The drive control device includes: an inverter circuit that drives an electric motor having a plurality of phases; a drive circuit including drivers; a control circuit that outputs a control signal to control the drive circuit; and a signal line that connects the control circuit to the drive circuit to transmits a control signal from the control circuit to the drive circuit, in which the number of signal lines is fewer than the number of the phases of the electric motor.

Abstract: A metal gasket is capable of increasing bonding strength of a seal member through pressure bonding, enhancing sealing performance as a whole, and reducing the manufacturing cost. A method for manufacturing a gasket-constituting plate is capable of reducing the manufacturing cost of the gasket-constituting plate, and increasing bonding strength of a seal member to a blank metal plate through pressure bonding. Two gasket-constituting plates are layered on each other. Covering parts each having a width are provided on an outer surface of the first gasket-constituting plate, along beads so as to cover the beads in a plan view. Seal projecting parts are provided on outer surfaces of the covering parts along the covering parts so as to project outward in the thickness direction. Seal members including the covering parts and the seal projecting parts, respectively, are composed of a single member integrally molded by using a rubber material.

Abstract: Provided is a method for manufacturing a gasket-constituting plate made of metal, in which a folded-back part whose thickness is set to be less than the thickness of a general part is provided at a periphery of a combustion chamber hole. The method includes, with a raw metal plate being held between a blank holder and a drawing die having an extrusion hole, extruding the raw metal plate in a thickness direction thereof by using a drawing punch as an extrusion tool to form a projecting part in the raw metal plate, and causing a tensile force to act on the raw metal plate due to the extrusion so as to elongate the raw metal plate, to form a thin peripheral wall part at an outer peripheral portion of the projecting part.

Abstract: First corrugated portions in a first direction are sequentially formed by die-pressing a raw metal plate. Second corrugated portions formed in a second direction intersecting the first direction are sequentially formed by die-pressing a primary formed plate having the first corrugated portions using elongate projections, so that each of the second corrugated portion has a half-height and a pitch larger than those of each of the first corrugated portion. Third corrugated portions formed approximately in the first direction are sequentially formed by die-pressing a secondary formed plate having the second corrugated portions using elongate projections, so that each of the third corrugated portions has a half-height and a pitch larger than those of the first corrugated portion.

Abstract: Provided is a load drive slope control device that can reduce EMI noise, and power loss and heat generation when a drive transistor is turned on and off, and can prevent excessive high temperature-induced damage to the drive transistor at an excessive high temperature.

Abstract: A capacitor connected to a microcomputer voltage wiring is downsized. A series regulator on an electronic control unit for automotive includes a battery as an in-vehicle power supply, a relay, an input side capacitor, a series regulator circuit, and an output side capacitor, and is connected to a microcomputer. The series regulator circuit includes an n-channel MOSFET, a gate voltage regulator circuit as an output control circuit of an FET, and a gate voltage holding capacitor. A capacitor GND voltage (gate voltage) is adjusted by the gate voltage regulator circuit to convert an input side capacitor voltage into an output side capacitor voltage, and supply a microcomputer current to the microcomputer.

Abstract: Provided is a load drive slope control device that can reduce EMI noise, and power loss and heat generation when a drive transistor is turned on and off, and can prevent excessive high temperature-induced damage to the drive transistor at an excessive high temperature.

Abstract: A capacitor connected to a microcomputer voltage wiring is downsized. A series regulator on an electronic control unit for automotive includes a battery as an in-vehicle power supply, a relay, an input side capacitor, a series regulator circuit, and an output side capacitor, and is connected to a microcomputer. The series regulator circuit includes an n-channel MOSFET, a gate voltage regulator circuit as an output control circuit of an FET, and a gate voltage holding capacitor. A capacitor GND voltage (gate voltage) is adjusted by the gate voltage regulator circuit to convert an input side capacitor voltage into an output side capacitor voltage, and supply a microcomputer current to the microcomputer.

Abstract: A voltage level generator circuit comprised of a fixed voltage generator unit for generating a first electrical current in a fixed quantity from a first supply voltage; a first current mirror circuit unit including a first thin-film NMOSFET and a second thin-film NMOSFET and that outputs a second electrical current proportional to the first electrical current; a protective circuit including: a third thin-film NMOSFET and a first thick-film PMOSFET utilized as a grounded gate for protecting the second thin-film NMOSFET, a first diode for preventing inverse current flow to the first supply, and a second diode for preventing the gate-source voltage of the third thin-film NMOSFET from reaching a negative electrical potential; and a second current mirror circuit for outputting a third electrical current proportional to the second electrical current; and a first Zener diode unit for generating a first fixed voltage from a third electrical current.