Patents by Inventor Yoshiteru Shikakura
Yoshiteru Shikakura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240168052Abstract: A scanning probe microscope is designed to improve visibility of a marker in broad and high-speed observation by a magnifying observation processing device. A marker is disposed so that an aspect ratio of an observation visual field of the magnifying observation processing device is matched with an observation angle in a circumference centering on a region of interest. Further, the marker is formed by scratch scars of multiple lines, for example, to enhance edge contrast.Type: ApplicationFiled: March 26, 2021Publication date: May 23, 2024Inventors: Toru AISO, Shuichi TAKEUCHI, Yoshiteru SHIKAKURA
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Patent number: 11391755Abstract: Provided are a scanning probe microscope and a setting method thereof that contribute to a reduction in the time taken for measuring. The scanning probe microscope includes: a movement driving unit capable of moving a cantilever and a sample relatively in at least a z direction; and a control device operating an approach operation of making the cantilever and the sample approach to each other at a predetermined speed by controlling the movement driving unit, and stopping the approach operation when it is determined that the probe and the sample are in contact with each other, wherein the predetermined speed is set such that when the control for stopping the approach operation is performed, force applied to the sample due to contact between the probe and the sample does not exceed a preset first force.Type: GrantFiled: March 16, 2021Date of Patent: July 19, 2022Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Masatsugu Shigeno, Hiroyoshi Yamamoto, Yoshiteru Shikakura, Kunihito Higa
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Publication number: 20210293849Abstract: Provided are a scanning probe microscope and a setting method thereof that contribute to a reduction in the time taken for measuring. The scanning probe microscope includes: a movement driving unit capable of moving a cantilever and a sample relatively in at least a z direction; and a control device operating an approach operation of making the cantilever and the sample approach to each other at a predetermined speed by controlling the movement driving unit, and stopping the approach operation when it is determined that the probe and the sample are in contact with each other, wherein the predetermined speed is set such that when the control for stopping the approach operation is performed, force applied to the sample due to contact between the probe and the sample does not exceed a preset first force.Type: ApplicationFiled: March 16, 2021Publication date: September 23, 2021Inventors: Masatsugu SHIGENO, Hiroyoshi YAMAMOTO, Yoshiteru SHIKAKURA, Kunihito HIGA
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Patent number: 10712363Abstract: Provided is a scanning probe microscope with which measurement data and a distribution image of differential data of the measurement data can be displayed selectively or together, an edge enhancement image can be obtained, and user convenience is improved. A scanning probe microscope (200) includes: a distribution image calculator (40a) configured to calculate a one-dimensional or two-dimensional first distribution image (201) of measurement data, and a one-dimensional or two-dimensional second distribution image (202) of differential data of adjacent data elements of the measurement data; and a display controller (40b) configured to instruct the distribution image calculator to calculate at least one of the first distribution image or the second distribution image, and to display the calculated distribution image on a predetermined display.Type: GrantFiled: January 25, 2019Date of Patent: July 14, 2020Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Masayuki Iwasa, Yoshiteru Shikakura, Shinya Kudo, Toshihiro Ueno
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Publication number: 20190234992Abstract: Provided is a scanning probe microscope with which measurement data and a distribution image of differential data of the measurement data can be displayed selectively or together, an edge enhancement image can be obtained, and user convenience is improved. A scanning probe microscope (200) includes: a distribution image calculator (40a) configured to calculate a one-dimensional or two-dimensional first distribution image (201) of measurement data, and a one-dimensional or two-dimensional second distribution image (202) of differential data of adjacent data elements of the measurement data; and a display controller (40b) configured to instruct the distribution image calculator to calculate at least one of the first distribution image or the second distribution image, and to display the calculated distribution image on a predetermined display.Type: ApplicationFiled: January 25, 2019Publication date: August 1, 2019Inventors: Masayuki IWASA, Yoshiteru Shikakura, Shinya Kudo, Toshihiro Ueno
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Patent number: 9921241Abstract: A scanning probe microscope has a cantilever having: a probe that is to be contacted or approached on a surface of a sample; and a processor that operates to perform a process including: calculating a measurement width MW and an offset value OV from a minimum value Smin and a maximum value Smax of a signal indicating a displacement of the cantilever with the following Equations (1) and (2) when a prescanning operation is performed before the measurement data is acquired by the probe microscope controller; and adjusting at least one of the offset value OV and the measurement width MW based on a temporal variation of the signal at the same position on the surface of the sample when the prescanning operation is performed.Type: GrantFiled: March 31, 2016Date of Patent: March 20, 2018Assignee: Hitachi High-Tech Science CorporationInventors: Masatsugu Shigeno, Yoshiteru Shikakura
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Publication number: 20160291053Abstract: A scanning probe microscope has a cantilever having: a probe that is to be contacted or approached on a surface of a sample; and a processor that operates to perform a process including: calculating a measurement width MW and an offset value OV from a minimum value Smin and a maximum value Smax of a signal indicating a displacement of the cantilever with the following Equations (1) and (2) when a prescanning operation is performed before the measurement data is acquired by the probe microscope controller; and adjusting at least one of the offset value OV and the measurement width MW based on a temporal variation of the signal at the same position on the surface of the sample when the prescanning operation is performed.Type: ApplicationFiled: March 31, 2016Publication date: October 6, 2016Applicant: Hitachi High-Tech Science CorporationInventors: Masatsugu Shigeno, Yoshiteru Shikakura
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Patent number: 9354248Abstract: A method for measuring vibration characteristic of a cantilever is proposed in this disclosure. The method includes: measuring vibration amplitude V of a cantilever installed in a scanning probe microscope when vibration with a resonant frequency f1 (Hz) is applied to the cantilever; obtaining a time Th (second) when the vibration amplitude V is equal to or more than 0.90 of a stationary amplitude V0; and calculating a Q value by using the following Expression: Q value=f1×Th.Type: GrantFiled: March 30, 2015Date of Patent: May 31, 2016Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Masatsugu Shigeno, Yoshiteru Shikakura
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Publication number: 20150276796Abstract: A method for measuring vibration characteristic of a cantilever is proposed in this disclosure. The method includes: measuring vibration amplitude V of a cantilever installed in a scanning probe microscope when vibration with a resonant frequency f1 (Hz) is applied to the cantilever; obtaining a time Th (second) when the vibration amplitude V is equal to or more than 0.90 of a stationary amplitude V0; and calculating a Q value by using the following Expression: Q value=f1×Th.Type: ApplicationFiled: March 30, 2015Publication date: October 1, 2015Inventors: Masatsugu SHIGENO, Yoshiteru SHIKAKURA
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Patent number: 8615811Abstract: A method of measuring vibration characteristics of a cantilever in a scanning probe microscope (SPM). An excitation signal is generated by a forward and backward frequency sweep signal in a frequency range including a resonance frequency of the cantilever. The cantilever is vibrated by supplying the excitation signal to a vibrating portion of the cantilever. The largest amplitude of a displacement of the cantilever in a forward path and in a backward path is directly measured, and an intermediate value of a frequency between frequencies measured on the basis of the directly measured largest amplitude of the displacement of the cantilever is detected as the resonance frequency of the cantilever.Type: GrantFiled: March 23, 2012Date of Patent: December 24, 2013Assignee: SII NanoTechnology Inc.Inventors: Masatsugu Shigeno, Yoshiteru Shikakura
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Patent number: 8495759Abstract: Provided is an aligning method capable of setting a sample observation unit such as an optical microscope to a probe microscope observation position at high precision. A sample having a known structure is used in advance. A surface of the sample and a shape of a cantilever provided with a probe are observed using the sample observation unit such as the optical microscope. A sample observation position and a probe position which are obtained using the sample observation unit are verified, and a relative positional relationship therebetween is recorded. Then, a first mark indicating a position of the cantilever and a second mark which is displayed in conjunction with the first mark and has the relative positional relationship with the first mark are produced to align the sample relative to the second mark.Type: GrantFiled: July 28, 2009Date of Patent: July 23, 2013Assignee: SII NanoTechnology Inc.Inventors: Shigeru Wakiyama, Hiroyoshi Yamamoto, Yoshiteru Shikakura, Itaru Kitajima
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Publication number: 20120246768Abstract: A method of measuring vibration characteristics of a cantilever includes: generating a forward and backward high speed frequency sweep signal in a frequency range including a resonance frequency of the cantilever by an excitation signal generator; vibrating the cantilever; measuring frequencies at the largest amplitude in a forward path and in a backward path; and detecting an intermediate value between the measured frequencies as the resonance frequency of the cantilever. The method may further include checking whether or not there is a secondary resonance frequency that is 6.3 times the primary resonance frequency when the primary resonance frequency is detected, so as to prevent a detection error of the resonance frequency.Type: ApplicationFiled: March 23, 2012Publication date: September 27, 2012Inventors: Masatsugu Shigeno, Yoshiteru Shikakura
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Patent number: 8024816Abstract: In detecting a displacement of a cantilever (2) by a displacement detecting mechanism (5) and allowing a probe (1) and a sample (8) to approach each other by at least one of a coarse-movement mechanism (13) and a vertical direction fine-movement mechanism (11) at the same time, an excitation mechanism (4) excites the cantilever (2) with a first excitation condition and the probe (1) and the sample (8) are allowed to approach each other with a first stop condition, and then the cantilever (2) is excited with a second excitation condition different from the first excitation condition, a second stop condition is set, and the probe (1) and the sample (8) are allowed to approach each other by the at least one of the vertical direction fine-movement mechanism (11) and the coarse-movement mechanism (13) until the second stop condition is satisfied.Type: GrantFiled: February 4, 2010Date of Patent: September 20, 2011Assignee: SII NanoTechnology Inc.Inventors: Masato Iyoki, Yoshiteru Shikakura, Masafumi Watanabe
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Patent number: 7997124Abstract: A scanning probe microscope has a cantilever mounted to undergo oscillation movement over a surface of a sample. The cantilever has a probe on a distal end thereof. A Z-axis controlling amount calculating mechanism calculates a controlling amount for keeping constant an oscillation amount of the cantilever. A Z-axis driving mechanism drives in a Z direction the cantilever or the sample in accordance with the controlling amount from the Z-axis controlling amount calculating mechanism. A driving range limiting device limits a driving range of the Z-axis driving mechanism. A driving range setting device optionally sets the driving range of the Z-axis driving mechanism.Type: GrantFiled: July 19, 2007Date of Patent: August 16, 2011Assignee: SII NanoTechnology Inc.Inventors: Yoshiteru Shikakura, Kazutoshi Watanabe
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Publication number: 20100205697Abstract: In detecting a displacement of a cantilever (2) by a displacement detecting mechanism (5) and allowing a probe (1) and a sample (8) to approach each other by at least one of a coarse-movement mechanism (13) and a vertical direction fine-movement mechanism (11) at the same time, an excitation mechanism (4) excites the cantilever (2) with a first excitation condition and the probe (1) and the sample (8) are allowed to approach each other with a first stop condition, and then the cantilever (2) is excited with a second excitation condition different from the first excitation condition, a second stop condition is set, and the probe (1) and the sample (8) are allowed to approach each other by the at least one of the vertical direction fine-movement mechanism (11) and the coarse-movement mechanism (13) until the second stop condition is satisfied.Type: ApplicationFiled: February 4, 2010Publication date: August 12, 2010Inventors: Masato Iyoki, Yoshiteru Shikakura, Masafumi Watanabe
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Publication number: 20100031402Abstract: Provided is an aligning method capable of setting a sample observation unit such as an optical microscope to a probe microscope observation position at high precision. A sample having a known structure is used in advance. A surface of the sample and a shape of a cantilever provided with a probe are observed using the sample observation unit such as the optical microscope. A sample observation position and a probe position which are obtained using the sample observation unit are verified, and a relative positional relationship therebetween is recorded. Then, a first mark indicating a position of the cantilever and a second mark which is displayed in conjunction with the first mark and has the relative positional relationship with the first mark are produced to align the sample relative to the second mark.Type: ApplicationFiled: July 28, 2009Publication date: February 4, 2010Inventors: Shigeru Wakiyama, Hiroyoshi Yamamoto, Yoshiteru Shikakura, Itaru Kitajima
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Patent number: 7442925Abstract: The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.Type: GrantFiled: March 4, 2006Date of Patent: October 28, 2008Assignee: SII Nanotechnology Inc.Inventors: Masatoshi Yasutake, Takuya Nakaue, Kazutoshi Watanabe, Osamu Takaoka, Atsushi Uemoto, Naoya Watanabe, Yoshiteru Shikakura
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Publication number: 20070290130Abstract: A scanning probe microscope has a cantilever mounted to undergo oscillation movement over a surface of a sample. The cantilever has a probe on a distal end thereof. A Z-axis controlling amount calculating mechanism calculates a controlling amount for keeping constant an oscillation amount of the cantilever. A Z-axis driving mechanism drives in a Z direction the cantilever or the sample in accordance with the controlling amount from the Z-axis controlling amount calculating mechanism. A driving range limiting device limits a driving range of the Z-axis driving mechanism. A driving range setting device optionally sets the driving range of the Z-axis driving mechanism.Type: ApplicationFiled: July 19, 2007Publication date: December 20, 2007Inventors: Yoshiteru Shikakura, Kazutoshi Wantanabe
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Publication number: 20070278177Abstract: Under the condition that the height is fixed at a target height by turning off a feedback control system of a Z piezoelectric actuator of a cantilever of an atomic force microscope having a probe, which is harder than a processed material, flexure and twisting of the cantilever when carrying out mechanical processing while selectively repeating scanning only on the processed area (in the case of detecting flexure, parallel with the cantilever and in the case of detecting twisting, vertical with the cantilever) is monitored by a quadrant photodiode position sensing detector and the processing is repeated till a flexure amount or a twisting amount, namely, till an elastic deformation amount of the cantilever becomes not more than a determined threshold. It is not necessary to carry out scanning of the observation in obtaining the height information for detection of an end point, so that it is possible to improve a throughput of processing.Type: ApplicationFiled: June 1, 2007Publication date: December 6, 2007Inventors: Kazushige Kondo, Masatoshi Yasutake, Takuya Nakaue, Osamu Takaoka, Atsushi Uemoto, Kazutoshi Watanabe, Yoshiteru Shikakura
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Patent number: 7284415Abstract: A scanning probe microscope has a cantilever having a minute probe on a distal end thereof and a displacement detecting device for detecting displacement of the cantilever. A Z-axis controlling amount calculating mechanism calculates a controlling amount for keeping constant a displacement amount of the cantilever. A Z-axis driving mechanism drives in a Z direction the cantilever or a sample in accordance with the controlling amount from the Z-axis controlling amount calculating mechanism. An XY scanning mechanism relatively moves the probe in a direction of an XY plane with respect to the sample to measure an uneven shape and/or a physical characteristic of the surface of the sample. A controlling range limiting device limits a driving range of the Z-axis driving mechanism. A controlling range setting device optionally sets the driving range of the Z-axis driving mechanism.Type: GrantFiled: March 9, 2005Date of Patent: October 23, 2007Assignee: SII NanoTechnology Inc.Inventors: Yoshiteru Shikakura, Kazutoshi Watanabe