Abstract: The present disclosure provides a MEMS sensor. The MEMS sensor includes a first substrate having a cavity and a second substrate bonded to the first substrate. The first substrate is provided with an electrode movably disposed in the cavity and a sealed member coupling to the second substrate. The second substrate is provided with a stop member for restricting a movement of the electrode toward the second substrate and a sealing member coupling to the sealed member. The sealed member is formed by a first metal layer on the first substrate. The sealing member is formed by a second metal layer on the second substrate. A polycrystalline layer is formed on the stop member. The polycrystalline layer is disposed between the second substrate and the second metal layer.

Abstract: A peg (3) is placed on a peg board (2) by a subject. A detection unit (32) detects a contact state between a peg body (31) and a body portion of the subject. A signal transmission unit (33) transmits a signal indicative of a detection result from the detection unit (32).

Abstract: A collecting unit is disposed on an exhaust passage of a semiconductor processing apparatus to collect by-products contained in an exhaust gas. The collecting unit includes a trap body detachably disposed inside a casing and configured to collect a part of the by-products. The trap body includes fins arrayed in a flow direction of the exhaust gas and having a surface on which a part of the by-products is deposited and trapped. The collecting unit further includes a receiving mechanism disposed inside the casing and configured to receive a part of the by-products that peels off from the trap body or an inner surface of the casing to prevent this part from being deposited on a bottom of the casing. The receiving mechanism is configured to allow a part of the by-products held thereon to be in contact with a cleaning gas from above and from below.

Abstract: In printing of a bonding material in which a board is supported from a component mounting-side surface on which a plurality of components are mounted, and a bonding material is printed on a working-side surface which is a surface opposed to the component mounting-side surface of the board, an edge portion region of the board supported by a board transporting unit is included in a support region of the board during the printing so as to enlarge the support region of the board having the components mounted thereon in high density and to achieve reliable and high precision printing of the bonding material.

Abstract: A vertical heat processing apparatus for performing a heat process on a plurality of target substrates all together includes a vertical process container configured to accommodate the target substrates and having a transfer port at a bottom; a holder configured to support the target substrates at intervals in a vertical direction inside the process container; and a heater disposed around the process container, and configured to supply heat rays through a sidewall of the process container, so as to heat an interior of the process container. A thermal buffer member is disposed between the heater and a lower end side of the process container to surround the lower end side, and is configured to decrease transmissibility of the lower end side for heat rays between the heater and target substrates inside the process container.

Abstract: A collecting unit is disposed on an exhaust passage of a semiconductor processing apparatus to collect by-products contained in an exhaust gas. The collecting unit includes a trap body detachably disposed inside a casing and configured to collect a part of the by-products. The trap body includes fins arrayed in a flow direction of the exhaust gas and having a surface on which a part of the by-products is deposited and trapped. The collecting unit further includes a receiving mechanism disposed inside the casing and configured to receive a part of the by-products that peels off from the trap body or an inner surface of the casing to prevent this part from being deposited on a bottom of the casing. The receiving mechanism is configured to allow a part of the by-products held thereon to be in contact with a cleaning gas from above and from below.

Abstract: A vertical heat processing apparatus for performing a heat process on a plurality of target substrates all together includes a vertical process container configured to accommodate the target substrates and having a transfer port at a bottom; a holder configured to support the target substrates at intervals in a vertical direction inside the process container; and a heater disposed around the process container, and configured to supply heat rays through a sidewall of the process container, so as to heat an interior of the process container. A thermal buffer member is disposed between the heater and a lower end side of the process container to surround the lower end side, and is configured to decrease transmissibility of the lower end side for heat rays between the heater and target substrates inside the process container.

Abstract: A steering wheel incorporating an air bag device that facilitates the attachment and removal of an air bag module with respect to a steering wheel body while reducing manufacturing costs. The steering wheel body has a spoke core, which includes a hook. A horn plate, which forms part of the air bag module, includes a catch that is flexed to engage the hook.

Abstract: In printing of a bonding material in which a board is supported from a component mounting-side surface on which a plurality of components are mounted, and a bonding material is printed on a working-side surface which is a surface opposed to the component mounting-side surface of the board, an edge portion region of the board supported by a board transporting unit is included in a support region of the board during the printing so as to enlarge the support region of the board having the components mounted thereon in high density and to achieve reliable and high precision printing of the bonding material.

Abstract: A steering wheel of the present invention has an airbag-apparatus. The airbag apparatus has a pad for covering the airbag, and the pad has a plurality of doors that can open. Each door opens around a hinge as a rotation center. The hinge is located below an outer periphery of the pad. That is, an area of the door itself can widely be secured, and the door can open as wide as possible. A switch operating portion is disposed in an area other than the door, but of a boss or a spoke that is not covered with the door when it opens. When doors open around the hinge as the rotation center, the doors are disposed in the three spaces between the spokes. The opened doors are disposed smoothly in the three spaces between the three spokes without interference with the switch operating portion. A widely opening state of each door can stably be secure.

Abstract: A steering wheel incorporating an air bag device that facilitates the attachment and removal of an air bag module with respect to a steering wheel body while reducing manufacturing costs. The steering wheel body has a spoke core, which includes a hook. A horn plate, which forms part of the air bag module, includes a catch that is flexed to engage the hook.

Abstract: A nitriding method includes the steps of nitriding an object held under a nitriding gas atmosphere in a sealed furnace and applying vibration energy to one or both of the nitriding gas and the object W to facilitate nitriding. A nitriding apparatus includes a nitriding furnace for holding an object W to be nitrided in a sealed manner, means 30 for supplying a nitriding gas to the furnace, and means 2 for applying vibration to the atmosphere gas in the furnace 1 to faciliate nitriding. According to the method or apparatus, nitriding-resistant or complex-shaped materials can be nitrided at high efficiency and a nitrided layer can be formed at a lower temperature for a shorter time as compared with conventional processes.

Abstract: A thermal processing method of the invention includes; a loading step of loading an object to be processed into a processing container, the object having a surface provided with a silicon film having a minutely irregular profile; and a doping step of introducing phosphorus atoms in the silicon film as impurities, by using PH3 gas as a doping gas while maintaining a temperature of 550 to 750° C.

Abstract: A steering wheel of the present invention has an airbag apparatus. The airbag apparatus has a pad for covering the airbag, and the pad has a plurality of doors that can open. Each door opens around a hinge as a rotation center. The hinge is located below an outer periphery of the pad. That is, an area of the door itself can widely be secured, and the door can open as wide as possible. A switch operating portion is disposed in an area other than the door, but of a boss or a spoke that is not covered with the door when it opens. When doors open around the hinge as the rotation center, the doors are disposed in the three spaces between the spokes. The opened doors are disposed smoothly in the three spaces between the three spokes without interference with the switch operating portion. A widely opening state of each door can stably be secure.

Abstract: A steering wheel horn switch includes two contact members and a support member, which supports the contact member and is formed from a light metallic material, and the contact member and the support member are electrically conducted to each other in such a manner to form a horn operating circuit. An electric conductor having electrical conductivity, which is higher than the electrical conductivity of the support member, is disposed between the contact member and the support member in such a way as to come in contact with both the contact member and the support member. The electric conductor is in contact with the support member so that the contact area therebetween is larger than the contact area between the contact member and the support member in the case when the contact member is singly brought into contact with the support member, or so that the electric conductor is brought into contact with the support member by being pushed by the support member.

Abstract: A horn switch includes a stationary member, a movable member, a spring and a connecting bolt. The stationary member has a stationary contact and is supported on a steering wheel body The movable member has a movable contact and is arranged above the stationary member. The connecting bolt allows downward movements of the movable member and prescribes a distance of the movable contact from the stationary contact. The connecting bolt is provided with a head and a shank. The head abuts against an underside of the stationary member. The shank extends upward from the head to be fastened to a threaded hole in the movable member. Prior to fastening, the connecting bolt is temporarily fixed to the stationary member by latch legs. The latch legs latch a lower surface of the head in a manner to permit the connecting bolt to be fastened to the movable member.

Abstract: An automotive steering wheel includes a heavy air bag system held by a horn-switching mechanism. Although the air bag system is heavy, the operator has a good feel for the operation of the horn-switching mechanism. The horn-switching mechanism includes a stationary member, a movable member, a switch main body, coil springs, and a jawed bolt. The switch main body comprises a stationary contact mounted on the stationary member and a movable contact mounted on the movable member. The coil springs bias the movable member upward. The jawed bolt permits the movable member to be moved toward the stationary member and limits the distance of the movable member from the stationary member. At least one of the coil springs is located at a height substantially equal to the height of the resultant center of gravity of all components biased upward by all the coil springs.

Abstract: It is a steering wheel horn switch that has two contact members and a support member, which supports the contact member and is formed from a light metallic material, and that the contact member and the support member are electrically conducted to each other in such a manner as to be able to form a horn operating circuit. An electric conductor having electrical conductivity, which is higher than that of the support member, is disposed between the contact member and the support member in such a way as to come in contact with both the contact member and the support member. The electric conductor is in contact with the support member so that the contact area therebetween is larger than the contact area between the contact member and the support member in the case when the contact member is singly brought into contact with the support member, or so that the electric conductor is brought into contact with the support member by being pushed by the support member.

Abstract: A steering wheel of the present invention has an airbag apparatus. The airbag apparatus has a pad for covering the airbag, and the pad has a plurality of doors that can open. Each door opens around a hinge as a rotation center. The hinge is located below an outer periphery of the pad. That is, an area of the door itself can widely be secured, and the door can open as wide as possible. A switch operating portion is disposed in an area other than the door, but of a boss or a spoke that is not covered with the door when it opens. When doors open around the hinge as the rotation center, the doors are disposed in the three spaces between the spokes. The opened doors are disposed smoothly in the three spaces between the three spokes without interference with the switch operating portion. A widely opening state of each door can stably be secure.

Abstract: A horn switch includes a stationary member, a movable member, a spring and a connecting bolt. The stationary member has a stationary contact and is supported on a steering wheel body. The movable member has a movable contact and is arranged above the stationary member. The connecting bolt allows downward movements of the movable member and prescribes a distance of the movable contact from the stationary contact. The connecting bolt is provided with a head and a shank. The head abuts against an underside of the stationary member. The shank extends upward from the head to be fastened to a threaded hole in the movable member. Prior to fastening, the connecting bolt is temporarily fixed to the stationary member by latch legs. The latch legs latch a lower surface of the head in a manner to permit the connecting bolt to be fastened to the movable member.