Abstract: An atomic force microscope (AFM) capable of observing the topography of a sample surface at high speed with a high resolution under the atmospheric pressure and a driving method therefor is provided. The AFM comprises a light beam source unit, a light beam scanner, a scanning probe unit (or matrix), a light beam detection unit, a driving control unit and a display unit. The driving method comprises the steps of vibrating, responsive to a reference signal, a first actuator provided on each of scanning probes; detecting a deflection amount of a cantilever provided with a tip at its free end; and transmitting a servo signal to a second actuator based on the deflection amount of the cantilever.

Abstract: An inventive method for the manufacture of a thin film actuated mirror array comprises the steps of: preparing an active matrix including a substrate, an array of switching devices and an array of connecting terminals; forming a first sacrificial layer including an array of empty cavities; forming an array of actuating structures, each of the actuating structures including an elastic member, a lower electrode, an electrodisplacive member, an upper electrode and a via contact; forming a second sacrificial layer including an array of empty slots; forming an array of mirrors; removing the first and the second sacrificial layer to thereby form the thin film actuated mirror array. The use of a poly-Si as the material for the first and the second sacrificial layers will ensure an easy flattening thereof and an easy removal thereof, resulting an increased otpical efficiency in the thin film actuated mirror thus formed.

Abstract: In an image display system capable of displaying an M.times.N number of pixels based on optical projection, a light source emits a white light, the white light being reflected on a total mirror at a predetermined angle. An optical filter splits the white light reflected from the total mirror into a trinity of primary light beams, i.e., a red, green and blue light beam. Each of a trinity of arrays of M.times.N actuated mirrors generates an optical pixel signal by reflecting the primary light beams impinging thereon, each of the actuated mirrors in the arrays being capable of changing the optical path of the primary light beams reflected therefrom, wherein a driver circuit controls each actuated mirror based on an input image signal. A projection stopper partially transmits the optical pixel signal and a projection screen displays the optical pixel signals passing through the projection stopper.