Abstract: A heater alarm and control module includes a main processor of the heater alarm and control module, a heater alarm and control circuit, and a heater temperature controlling module. The heater temperature control module includes n heater temperature controllers. The main processor is connected to the heater temperature control module through the heater alarm and control circuit. The heater temperature controller includes an optically coupled solid-state relay including a light-emitting diode and a power switch; and a photocoupler including a light-emitting diode and a phototriode; and a microprocessor connected to the optically coupled solid-state relay and the photocoupler. The main processor provides a control signal to the heater temperature control module.

Abstract: A temperature controller includes a microprocessor, a temperature detector, a current detector, a control relay and an external interface. Wherein, the temperature detector detects a working temperature of a heater; the current detector detects a current value passing through a heating element; and the microprocessor determines an operating state of the temperature controller (102) according to a temperature and a current value received from the temperature detector and the current detector, and sends a control signal to the control replay, thereby controlling the operation of the heater so as to adjust the temperature. By means of the temperature controller, current measurement is added while temperature measurement is performed, so that an operating state of a heater can be correctly determined, thereby greatly improving the reliability of the temperature controller.

Abstract: A heater alarm and control module includes a main processor of the heater alarm and control module, a heater alarm and control circuit, and a heater temperature controlling module. The heater temperature control module includes n heater temperature controllers. The main processor is connected to the heater temperature control module through the heater alarm and control circuit. The heater temperature controller includes an optically coupled solid-state relay including a light-emitting diode and a power switch; and a photocoupler including a light-emitting diode and a phototriode; and a microprocessor connected to the optically coupled solid-state relay and the photocoupler. The main processor provides a control signal to the heater temperature control module.

Abstract: A temperature controller includes a microprocessor, a temperature detector, a current detector, a control relay and an external interface. Wherein, the temperature detector detects a working temperature of a heater; the current detector detects a current value passing through a heating element; and the microprocessor determines an operating state of the temperature controller (102) according to a temperature and a current value received from the temperature detector and the current detector, and sends a control signal to the control replay, thereby controlling the operation of the heater so as to adjust the temperature. By means of the temperature controller, current measurement is added while temperature measurement is performed, so that an operating state of a heater can be correctly determined, thereby greatly improving the reliability of the temperature controller.

Abstract: Powder and deposition control in a throttle valve includes nozzle inserts in the valve body that form annular plenums and annular nozzles for injecting annular flows of cleaning gas adjacent to the inside wall surface of the valve body for cleaning powders and depositions off surfaces in the valve body and off the closure member of the throttle valve. The annular flows of cleaning gas can be in intermittent, periodic, or in pulsed bursts or at a steady-state flow rates to dislodge powder particles stuck to the inside surface of the throttle valve, to etch or reactively clean solid deposits, or to prevent or minimize build-up of powder particles or solid deposits in the throttle valve.

Abstract: An expandable and contractible shield around a bellows in a valve protects the bellows from corrosive gases and solid particles in the valve chamber. In a manifold valve assembly with multiple outlet ports and multiple valves in a common valve chamber, a respective expandable and contractible shield around each respective bellows of each respective valve in the assembly separates each bellows from corrosive gases and solid particles in the common valve chamber regardless of whether one or all of the valves in the assembly is opened or closed.

Abstract: A valve has a major valve closure member with a valve stem for opening and closing a major port in a valve chamber. An alternate flow path extends through the major valve closing member. Flow is controlled through the alternate flow path by directing a minor valve actuating fluid through the valve stem to apply pressure on a minor valve piston in the major valve closure member to move a minor valve closure member in the major valve closure member between a closed mode in which the minor valve closure member closes the alternate flow path and an opened mode in which the minor valve closure member opens the alternate flow path. The minor valve actuating fluid is sealed from the alternate flow path by a flexible diaphragm positioned between the minor valve actuating fluid and the minor valve piston, so the pressure of the minor valve actuating fluid is applied to the minor valve piston via the flexible diaphragm.

Abstract: Powder and deposition control in a throttle valve includes nozzle inserts in the valve body that form annular plenums and annular nozzles for injecting annular flows of cleaning gas adjacent to the inside wall surface of the valve body for cleaning powders and depositions off surfaces in the valve body and off the closure member of the throttle valve. The annular flows of cleaning gas can be in intermittent, periodic, or in pulsed bursts or at a steady-state flow rates to dislodge powder particles stuck to the inside surface of the throttle valve, to etch or reactively clean solid deposits, or to prevent or minimize build-up of powder particles or solid deposits in the throttle valve.

Abstract: A valve has a major valve closure member with a valve stem for opening and closing a major port in a valve chamber. An alternate flow path extends through the major valve closing member. Flow is controlled through the alternate flow path by directing a minor valve actuating fluid through the valve stem to apply pressure on a minor valve piston in the major valve closure member to move a minor valve closure member in the major valve closure member between a closed mode in which the minor valve closure member closes the alternate flow path and an opened mode in which the minor valve closure member opens the alternate flow path. The minor valve actuating fluid is sealed from the alternate flow path by a flexible diaphragm positioned between the minor valve actuating fluid and the minor valve piston, so the pressure of the minor valve actuating fluid is applied to the minor valve piston via the flexible diaphragm.

Abstract: An expandable and contractible shield around a bellows in a valve protects the bellows from corrosive gases and solid particles in the valve chamber. In a manifold valve assembly with multiple outlet ports and multiple valves in a common valve chamber, a respective expandable and contractible shield around each respective bellows of each respective valve in the assembly separates each bellows from corrosive gases and solid particles in the common valve chamber regardless of whether one or all of the valves in the assembly is opened or closed.

Abstract: A secondary reaction chamber with a mesh reactor element and a heater assembly are positioned in a foreline between a CVD reaction chamber and a vacuum pump to mix and react all previously unreacted precursor reactants to remove them from the effluent before they can reach and damage the vacuum pump.

Abstract: A two-stage, slow-start valve includes a minor valve assembly inside a major valve closure member of a major valve closure assembly so that fluid can flow through the valve at a higher rate by opening the major valve assembly or at a lower rate by opening the minor valve assembly while the major valve closure assembly is closed in order to allow fluid to flow in an alternate flow path through the major valve closure member. The example minor valve closure assembly has a minor valve closure member that is actuated to open by a minor valve piston on which minor valve actuating fluid is applied to the minor piston via a diaphragm seal positioned between the minor piston and the minor valve actuating fluid. Both the major valve closure assembly and the minor valve closure assembly can be pneumatically actuated to open.

Abstract: A multiple heater control system includes cables, connectors, and junction boxes for user-friendly daisy chain connections of heater controllers and heaters in various configurations or combinations of individually controlled heater series and/or master and slave heater series. The heater controllers include process control of AC power to the heaters and upper-limit safety shutoff that is substantially independent from the process control. The heater controllers also have variable levels of control, adjustment, display, and communications functionality in a base module that is expandable to various levels with expansion modules that are attachable to and detachable from the base module. Connector, cable, and junction configurations, adapters, and latch features enhance user friendliness.

Abstract: A plasma chamber for use with a reactive gas source that includes a first conduit comprising a wall, an inlet, an outlet, an inner and outer surface, and a plurality of openings through the wall, the inlet receives a first gas for generating a reactive gas in the first conduit with a plasma formed in the first conduit. The plasma chamber also includes a second conduit that includes a wall, an inlet, and an inner surface. The first conduit is disposed in the second conduit defining a channel between the outer surface of the first conduit and the inner surface of the second conduit. A second gas provided to the inlet of the second conduit flows along the channel and through the plurality of openings of the wall of the first conduit into the first conduit to surround the reactive gas and plasma in the first conduit.

Abstract: A two-stage, slow-start valve includes a minor valve assembly inside a major valve closure member of a major valve closure assembly so that fluid can flow through the valve at a higher rate by opening the major valve assembly or at a lower rate by opening the minor valve assembly while the major valve closure assembly is closed in order to allow fluid to flow in an alternate flow path through the major valve closure member. The example minor valve closure assembly has a minor valve closure member that is actuated to open by a minor valve piston on which minor valve actuating fluid is applied to the minor piston via a diaphragm seal positioned between the minor piston and the minor valve actuating fluid. Both the major valve closure assembly and the minor valve closure assembly can be pneumatically actuated to open.

Abstract: A fast-acting, pneumatic diaphragm valve includes a diaphragm valve closure member, a pneumatic piston that provides a closure force on the closure member, and a solenoid pilot valve that controls pressurized air to the piston to cause the piston to move in a reciprocal manner so that the closure member opens and closes the valve. The valve seat seal can be elastomer for enhancing speed, and the solenoid pilot valve can be positioned and configured with air flow longitudinally through or past the solenoid armature to enhance speed.

Abstract: A multiple heater control system includes cables, connectors, and junction boxes for user-friendly daisy chain connections of heater controllers and heaters in various configurations or combinations of individually controlled heater series and/or master and slave heater series. The heater controllers include process control of AC power to the heaters and upper-limit safety shutoff that is substantially independent from the process control. The heater controllers also have variable levels of control, adjustment, display, and communications functionality in a base module that is expandable to various levels with expansion modules that are attachable to and detachable from the base module. Connector, cable, and junction configurations, adapters, and latch features enhance user friendliness.

Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.

Abstract: A multiple heater control system includes cables, connectors, and junction boxes for user-friendly daisy chain connections of heater controllers and heaters in various configurations or combinations of individually controlled heater series and/or master and slave heater series. The heater controllers include process control of AC power to the heaters and upper-limit safety shutoff that is substantially independent from the process control. The heater controllers also have variable levels of control, adjustment, display, and communications functionality in a base module that is expandable to various levels with expansion modules that are attachable to and detachable from the base module. Connector, cable, and junction configurations, adapters, and latch features enhance user friendliness.

Abstract: A small scale, but effective, reactive chemical containment system includes apparatus and methods for reaction of process gases exhausted from reaction furnaces with a reactant gas in a non-combustible manner to produce and contain particulate or powder byproducts, thereby removing the process gas from the exhaust gas flow. The apparatus provides process gas inlet, treatment reactive gas diffusion, process gas and treatment reactive gas pre-mixing, primary containment, secondary containment, and outlet zones.