Patents by Inventor YOUNG-KYUN WOO

YOUNG-KYUN WOO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for chemical mechanical polishing
    Patent number: 11607768
    Abstract: A chemical mechanical polishing apparatus includes a cleaning unit that cleans a substrate, a brushing unit that includes a plurality of roll brushes brushing the substrate and a driver driving the roll brushes, and a controlling unit that controls the driver. The controlling unit includes a time calculator that counts a usage time of the roll brushes, and a drive controller that reduces a distance between the roll brushes, based on the usage time of the roll brushes.
    Type: Grant
    Filed: July 18, 2019
    Date of Patent: March 21, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Ilcheol Shin, Sung-Chang Park, Kyoungwoo Kim, Young-Kyun Woo, Hak-Jae Im
  • APPARATUS AND METHOD FOR CHEMICAL MECHANICAL POLISHING
    Publication number: 20200198088
    Abstract: A chemical mechanical polishing apparatus includes a cleaning unit that cleans a substrate, a brushing unit that includes a plurality of roll brushes brushing the substrate and a driver driving the roll brushes, and a controlling unit that controls the driver. The controlling unit includes a time calculator that counts a usage time of the roll brushes, and a drive controller that reduces a distance between the roll brushes, based on the usage time of the roll brushes.
    Type: Application
    Filed: July 18, 2019
    Publication date: June 25, 2020
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: ILCHEOL SHIN, SUNG-CHANG PARK, KYOUNGWOO KIM, YOUNG-KYUN WOO, HAK-JAE IM