Abstract: A method comprises obtaining a wafer comprising a plurality of components, wherein each of the plurality of components exposes a first surface of the component present in a first focal plane and a second surface of the component present in a second focal plane. The method comprises generating, by an optical tool, a first image of the first surface and a second image of the second surface of one of the plurality of components. The method comprises comparing, by a processor, the first image with a first reference image to produce a first value and the second image with a second reference image to produce a second value. The method comprises generating, by the processor, a wafer map indicating a quality state of the one of the plurality of components based on the first and second values.

Abstract: A method comprises obtaining a wafer comprising a plurality of components, wherein each of the plurality of components exposes a first surface of the component present in a first focal plane and a second surface of the component present in a second focal plane. The method comprises generating, by an optical tool, a first image of the first surface and a second image of the second surface of one of the plurality of components. The method comprises comparing, by a processor, the first image with a first reference image to produce a first value and the second image with a second reference image to produce a second value. The method comprises generating, by the processor, a wafer map indicating a quality state of the one of the plurality of components based on the first and second values.

Abstract: A storage Pod for semiconductor substrates includes a top cover formed from a non-air permeable (NAP) material having faces including a top and a plurality of sides. A bottom base plate has a locking structure configured for providing a locking position for locking the sides, and for providing an unlocked position where the sides are detached from the bottom base plate. The top cover includes at least one aperture in the NAP material for allowing surrounding gases in an environment around the storage Pod to flow into the storage Pod to permit a gas sensor within the storage Pod to sense the target gas.

Abstract: A storage Pod for semiconductor substrates includes a top cover formed from a non-air permeable (NAP) material having faces including a top and a plurality of sides. A bottom base plate has a locking structure configured for providing a locking position for locking the sides, and for providing an unlocked position where the sides are detached from the bottom base plate. The top cover includes at least one aperture in the NAP material for allowing surrounding gases in an environment around the storage Pod to flow into the storage Pod to permit a gas sensor within the storage Pod to sense the target gas.