Abstract: Provided is a turntable device for spin-coating a substrate having a central hole formed in the central portion thereof with an external coating material. The turntable device includes: a support unit having a flat surface with at least one vacuum hole which supply vacuum force to fixedly support the substrate thereon; an elastic body at the center of the support unit to be inserted into the central hole of the substrate, and closing the central hole by being elastically deformed due to an external force; and a pressing member disposed on the elastic body and pressing the elastic body to deform the elastic body elastically. Not having an additional element for closing the central hole of the substrate during spin-coating simplifies the apparatus and the coating process, and prevents the central portion of the substrate from being contaminated after the spin-coating.

Abstract: Provided are an apparatus for attaching and detaching a cap for optical disc spin-coating that can be easily attached to and detached from the cap for covering a center hole of an optical disc by including a permanent magnet when contaminated by a photocurable resin, an apparatus for spin-coating including the same, and a method of manufacturing an optical disc using the apparatus for attaching and detaching a cap for optical disc spin-coating. By using the apparatus for attaching and detaching a cap for optical disc spin-coating, the cap can be easily attached to and detached from the optical disc before and after the spin coating even when the viscosity of the photocurable resin is high. In addition, the use of the apparatus for optical disc spin coating and the method of manufacturing the optical disc results in high manufacturing efficiency.

Abstract: The present invention provides an apparatus for optical disc spin-coating that prevents leakage of a photocurable resin due to a capillary phenomenon by controlling a contact area between a cap and a disc so that contamination of the disc and manufacturing errors do not occur. Furthermore, the apparatus of the present invention can manufacture an optical disc having a central portion which is not contaminated by a photocurable resin and in which bubbles are not generated. In addition, the apparatus may further include a vacuum hole formed in the turntable, which can be opened and closed independently from the opening and closing of a vacuum hole formed in the central axis of the turntable, to prevent the lifting of the optical disc when the cap is removed. As a result, operability and the manufacturing efficiency of the apparatus can be increased significantly.

Abstract: There is provided an apparatus for optical disc spin-coating, comprising a cap having a tapered protruding portion or a recess in its central lower portion; a turntable for rotation that has a tapered recess or protruding portion formed in an end of its central axis that is inserted into a center hole of an optical disc, wherein the tapered recess or protruding portion of the turntable is coupled with the tapered protruding portion or recess of the cap in a convexo-concave structure; and a vacuum hole formed in an optical disc support of the turntable. When the cap is eccentrically placed on the optical disc, the cap can be easily attached. In addition, the cap can be easily detached from the optical disc by using vacuum pressure. As a result, the operability and manufacturing efficiency can be increased.

Abstract: A spin coating apparatus is provided. The spin coating apparatus includes a ring-shaped or polygonal member. An upper portion of the ring-shaped or polygonal member has an inclined portion extending downward and outward, and an inner portion of the inclined portion is adjacent to or in contact with an outer edge of a substrate. An inner side surface of the ring-shaped or polygonal member is inclined downward and outward. When a surface of the substrate is coated with a coating solution using the spin coating apparatus, a ski-jump phenomenon occurring at an outer edge of the substrate can be reduced and contamination of the substrate due to the coating solution can be prevented.