Patents by Inventor Yu-Ting Yen
Yu-Ting Yen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11984323Abstract: A chemical mechanical planarization (CMP) system including a capacitive deionization module (CDM) for removing ions from a solution and a method for using the same are disclosed. In an embodiment, an apparatus includes a planarization unit for planarizing a wafer; a cleaning unit for cleaning the wafer; a wafer transportation unit for transporting the wafer between the planarization unit and the cleaning unit; and a capacitive deionization module for removing ions from a solution used in at least one of the planarization unit or the cleaning unit.Type: GrantFiled: July 12, 2021Date of Patent: May 14, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Te-Chien Hou, Yu-Ting Yen, Cheng-Yu Kuo, Chih Hung Chen, William Weilun Hong, Kei-Wei Chen
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Publication number: 20240154008Abstract: Provided is a semiconductor device including a substrate, a channel layer, a gate structure, a first doped region, a second doped region, a third doped region and a channel cap layer. The channel layer is located on the substrate. The channel layer has a trench. The gate structure is disposed in the trench. The first doped region and the second doped region are located in the channel layer on two sides of the gate structure. The third doped region is located in the substrate below the channel layer. The channel cap layer is located between the gate structure and the first doped region, between the gate structure and the second doped region, and between the gate structure and the channel layer. An energy band gap of the channel cap layer is larger than an energy band gap of the channel layer.Type: ApplicationFiled: January 9, 2023Publication date: May 9, 2024Applicant: Industrial Technology Research InstituteInventors: Chih-Hung Yen, Yu-Ting Chen, Hua-Mao Chen
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Publication number: 20240145579Abstract: The present disclosure is directed to method for the fabrication of spacer structures between source/drain (S/D) epitaxial structures and metal gate structures in nanostructure transistors. The method includes forming a fin structure with alternating first and second nanostructure elements on a substrate. The method also includes etching edge portions of the first nanostructure elements in the fin structure to form cavities. Further, depositing a spacer material on the fin structure to fill the cavities and removing a portion of the spacer material in the cavities to form an opening in the spacer material. In addition, the method includes forming S/D epitaxial structures on the substrate to abut the fin structure and the spacer material so that sidewall portions of the S/D epitaxial structures seal the opening in the spacer material to form an air gap in the spacer material.Type: ApplicationFiled: January 10, 2024Publication date: May 2, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Yun PENG, Fu-Ting YEN, Keng-Chu LIN
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Publication number: 20240136438Abstract: Semiconductor devices and methods of forming the same are provided. A semiconductor device according to the present disclosure includes a first semiconductor channel member and a second semiconductor channel member over the first semiconductor channel member and a porous dielectric feature that includes silicon and nitrogen. In the semiconductor device, the porous dielectric feature is sandwiched between the first and second semiconductor channel members and a density of the porous dielectric feature is smaller than a density of silicon nitride.Type: ApplicationFiled: December 22, 2023Publication date: April 25, 2024Inventors: Yu-Yun Peng, Fu-Ting Yen, Ting-Ting Chen, Keng-Chu Lin, Tsu-Hsiu Perng
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Patent number: 11942652Abstract: The disclosure provides a limit device and a robot using the same. The limit device comprises a first connecting member, a transmission rod and a second connecting member. The first connecting member comprising a first main body portion and two first connecting elements. The two first connecting elements are arranged at intervals. The two first connecting elements are respectively connected to the first main body. The transmission rod comprising a first end and a second end. The first end and the second end are arranged at intervals. The first end penetrates through one of the two first connecting elements. The second end penetrates through the other one of the two first connecting element. The second connecting member provided with two indexing buckles. The two indexing buckles are arranged at intervals, each of the indexing buckles comprises a first limiting groove and a second limiting groove.Type: GrantFiled: April 13, 2022Date of Patent: March 26, 2024Assignees: Futaijing Precision Electronics (Yantai) Co., Ltd., HON HAI PRECISION INDUSTRY CO., LTD.Inventors: Chen-Ting Kao, Chi-Cheng Wen, Yu-Sheng Chang, Chih-Cheng Lee, Chiung-Hsiang Wu, Sheng-Li Yen, Yu-Cheng Zhang, Chang-Ju Hsieh, Chen Chao
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Patent number: 11942447Abstract: The present disclosure describes a semiconductor structure having bonded wafers with storage layers and a method to bond wafers with storage layers. The semiconductor structure includes a first wafer including a first storage layer with carbon, a second wafer including a second storage layer with carbon, and a bonding layer interposed between the first and second wafers and in contact with the first and second storage layers.Type: GrantFiled: August 27, 2021Date of Patent: March 26, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: De-Yang Chiou, Fu-Ting Yen, Yu-Yun Peng, Keng-Chu Lin
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Patent number: 11801585Abstract: A pliers includes a first pliers body (10) and a second pliers body (20). The first pliers body includes a first handle (11) and a first clamp (12). A first pliers knife (13) and a first pliers back (14) are disposed on the first clamp (12). The second pliers body (20) includes a second handle (21) and a second clamp (22). A second pliers knife (23) and a second pliers back (24) are disposed on the second clamp (22). The second clamp (22) is pivotally connected with the first clamp (12) to clamp or cut. The first pliers back (14) or the second pliers back (24) is provided with a chipping blade (50) configured in a concave arc shape for chipping.Type: GrantFiled: July 15, 2021Date of Patent: October 31, 2023Assignee: KAUW YEHI INDUSTRIAL CO., LTD.Inventor: Yu-Ting Yen
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Publication number: 20230015864Abstract: A pliers includes a first pliers body (10) and a second pliers body (20). The first pliers body includes a first handle (11) and a first clamp (12). A first pliers knife (13) and a first pliers back (14) are disposed on the first clamp (12). The second pliers body (20) includes a second handle (21) and a second clamp (22). A second pliers knife (23) and a second pliers back (24) are disposed on the second clamp (22). The second clamp (22) is pivotally connected with the first clamp (12) to clamp or cut. The first pliers back (14) or the second pliers back (24) is provided with a chipping blade (50) configured in a concave arc shape for chipping.Type: ApplicationFiled: July 15, 2021Publication date: January 19, 2023Inventor: Yu-Ting YEN
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Publication number: 20210343538Abstract: A chemical mechanical planarization (CMP) system including a capacitive deionization module (CDM) for removing ions from a solution and a method for using the same are disclosed. In an embodiment, an apparatus includes a planarization unit for planarizing a wafer; a cleaning unit for cleaning the wafer; a wafer transportation unit for transporting the wafer between the planarization unit and the cleaning unit; and a capacitive deionization module for removing ions from a solution used in at least one of the planarization unit or the cleaning unit.Type: ApplicationFiled: July 12, 2021Publication date: November 4, 2021Inventors: Te-Chien Hou, Yu-Ting Yen, Cheng-Yu Kuo, Chih Hung Chen, William Weilun Hong, Kei-Wei Chen
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Patent number: 11069533Abstract: A chemical mechanical planarization (CMP) system including a capacitive deionization module (CDM) for removing ions from a solution and a method for using the same are disclosed. In an embodiment, an apparatus includes a planarization unit for planarizing a wafer; a cleaning unit for cleaning the wafer; a wafer transportation unit for transporting the wafer between the planarization unit and the cleaning unit; and a capacitive deionization module for removing ions from a solution used in at least one of the planarization unit or the cleaning unit.Type: GrantFiled: July 18, 2019Date of Patent: July 20, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Te-Chien Hou, Yu-Ting Yen, Cheng-Yu Kuo, Chih Hung Chen, William Weilun Hong, Kei-Wei Chen
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Patent number: 10957609Abstract: A method includes performing Chemical Mechanical Polish (CMP) on a wafer, placing the wafer on a chuck, performing a post-CMP cleaning on the wafer, and determining cleanness of the wafer when the wafer is located on the chuck.Type: GrantFiled: December 17, 2018Date of Patent: March 23, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yu-Ting Yen, Chi-Ming Tsai, Hui-Chi Huang
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Publication number: 20210020449Abstract: A chemical mechanical planarization (CMP) system including a capacitive deionization module (CDM) for removing ions from a solution and a method for using the same are disclosed. In an embodiment, an apparatus includes a planarization unit for planarizing a wafer; a cleaning unit for cleaning the wafer; a wafer transportation unit for transporting the wafer between the planarization unit and the cleaning unit; and a capacitive deionization module for removing ions from a solution used in at least one of the planarization unit or the cleaning unit.Type: ApplicationFiled: July 18, 2019Publication date: January 21, 2021Inventors: Te-Chien Hou, Yu-Ting Yen, Cheng-Yu Kuo, Chih Hung Chen, William Weilun Hong, Kei-Wei Chen
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Patent number: 10800018Abstract: A crimping tool includes a base, a press handle, a slide module, a link and a fixed fix shaft. The base has two first side walls and to sliding space is defined therebetween. One end of the press handle is pivoted at an end of the base. The slide module is slidably accommodated in the sliding space and has a guiding groove. Two ends of the link are pivoted at the press handle and the slide module separately. The fix shaft is disposed across the two first side walls and inserted in the guiding groove. When the press handle drives the slide module sliding in the sliding space through the link, the guiding groove of the slide module will be guided and restricted by the fix shaft. Therefore, the guiding grooves will not be damaged and get dirt.Type: GrantFiled: April 4, 2018Date of Patent: October 13, 2020Assignee: KAUW YEHI INDUSTRIAL CO., LTD.Inventor: Yu-Ting Yen
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Patent number: 10461690Abstract: A defect inspection method and a defect inspection system for a solar cell are proposed, where the method includes the following steps. Output voltages and output currents of the solar cell are measured by a measuring device. A stepwise current-voltage curve (stepwise IV curve) and a fitted current-voltage curve (fitted IV curve) are generated by a processing device according to the output voltages and the output currents, and whether a first error of the fitted IV curve is less than a first error tolerance is determined by the processing device. When the first error is not less than the first error tolerance, whether there exists at least one surge in steps of the stepwise IV curve is determined by the processing device so as to determine whether the solar cell has a defect. Next, a determined result of the processing device is outputted by the output device.Type: GrantFiled: December 4, 2017Date of Patent: October 29, 2019Assignee: Industrial Technology Research InstituteInventors: Yean-San Long, En-Yun Wang, Ren-Chin Shr, Yu-Ting Yen, Hsiang-Ying Cheng
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Publication number: 20190308304Abstract: A crimping tool includes a base, a press handle, a slide module, a link and a fixed fix shaft. The base has two first side walls and to sliding space is defined therebetween. One end of the press handle is pivoted at an end of the base. The slide module is slidably accommodated in the sliding space and has a guiding groove. Two ends of the link are pivoted at the press handle and the slide module separately. The fix shaft is disposed across the two first side walls and inserted in the guiding groove. When the press handle drives the slide module sliding in the sliding space through the link, the guiding groove of the slide module will be guided and restricted by the fix shaft. Therefore, the guiding grooves will not be damaged and get dirt.Type: ApplicationFiled: April 4, 2018Publication date: October 10, 2019Inventor: Yu-Ting YEN
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Publication number: 20190173423Abstract: A defect inspection method and a defect inspection system for a solar cell are proposed, where the method includes the following steps. Output voltages and output currents of the solar cell are measured by a measuring device. A stepwise current-voltage curve (stepwise IV curve) and a fitted current-voltage curve (fitted IV curve) are generated by a processing device according to the output voltages and the output currents, and whether a first error of the fitted IV curve is less than a first error tolerance is determined by the processing device. When the first error s not less than the first error tolerance, whether there exists at least one surge in steps of the stepwise IV curve is determined by the processing device so as to determine whether the solar cell has a defect. Next, a determined result of the processing device is outputted by the output device.Type: ApplicationFiled: December 4, 2017Publication date: June 6, 2019Applicant: Industrial Technology Research InstituteInventors: Yean-San Long, En-Yun Wang, Ren-Chin Shr, Yu-Ting Yen, Hsiang-Ying Cheng
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Publication number: 20190122942Abstract: A method includes performing Chemical Mechanical Polish (CMP) on a wafer, placing the wafer on a chuck, performing a post-CMP cleaning on the wafer, and determining cleanness of the wafer when the wafer is located on the chuck.Type: ApplicationFiled: December 17, 2018Publication date: April 25, 2019Inventors: Yu-Ting Yen, Chi-Ming Tsai, Hui-Chi Huang
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Patent number: 10157801Abstract: A method includes performing Chemical Mechanical Polish (CMP) on a wafer, placing the wafer on a chuck, performing a post-CMP cleaning on the wafer, and determining cleanness of the wafer when the wafer is located on the chuck.Type: GrantFiled: January 4, 2016Date of Patent: December 18, 2018Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Ting Yen, Chi-Ming Tsai, Hui-Chi Huang
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Patent number: 10115848Abstract: A method of transferring a thin film includes: providing a first element structure, wherein the first element structure includes a first substrate and a functional film layer formed on the first substrate; completely removing the first substrate, wherein steps of the completely removing the first substrate includes: conducting an etching step to erode the first substrate, and conducting a grinding step to planarize the eroded first substrate; and after completely removing the first substrate, attaching the functional film layer on a second substrate to form a second element structure.Type: GrantFiled: September 26, 2016Date of Patent: October 30, 2018Assignee: NATIONAL TSING HUA UNIVERSITYInventors: Yu-Lun Chueh, Kuan-Chun Tseng, Yu-Ting Yen
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Publication number: 20170194217Abstract: A method includes performing Chemical Mechanical Polish (CMP) on a wafer, placing the wafer on a chuck, performing a post-CMP cleaning on the wafer, and determining cleanness of the wafer when the wafer is located on the chuck.Type: ApplicationFiled: January 4, 2016Publication date: July 6, 2017Inventors: Yu-Ting Yen, Chi-Ming Tsai, Hui-Chi Huang