Patents by Inventor Yuan-Fu YANG

Yuan-Fu YANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mechanisms for monitoring ion beam in ion implanter system
    Patent number: 9293331
    Abstract: In accordance with some embodiments, an assembly of an ion implanter system is provided. The assembly includes a control unit, a wafer holder and a detecting device. The wafer holder and the detecting device are respectively positioned at two sides of the control unit. The control unit is configured to drive the wafer holder and the detecting device to rotate about at least one rotation axis.
    Type: Grant
    Filed: August 29, 2013
    Date of Patent: March 22, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yuan-Fu Yang, Ping-Fang Chen
  • MECHANISMS FOR MONITORING ION BEAM IN ION IMPLANTER SYSTEM
    Publication number: 20150064814
    Abstract: In accordance with some embodiments, an assembly of an ion implanter system is provided. The assembly includes a control unit, a wafer holder and a detecting device. The wafer holder and the detecting device are respectively positioned at two sides of the control unit. The control unit is configured to drive the wafer holder and the detecting device to rotate about at least one rotation axis.
    Type: Application
    Filed: August 29, 2013
    Publication date: March 5, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yuan-Fu YANG, Ping-Fang CHEN