Patents by Inventor Yuan-Yuan Lin

Yuan-Yuan Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240107640
    Abstract: An LED driving device with an adjustable dimming depth is provided. The LED driving device includes an LED driver and a dimming depth control circuit. The LED driver includes a dimming control circuit and a driving circuit. The dimming control circuit generates a first pulse-width modulation (PWM) signal according to a first brightness indication signal. The driving circuit drives a first light source and adjusts a brightness of the first light source. A duty ratio of the first PWM signal and the first driving current have a first relationship therebetween. The dimming depth control circuit includes a first variable resistance circuit, and the first variable resistance circuit controls a magnitude of a first variable resistance between a first current sampling terminal and a ground terminal according to a first dimming depth control signal. The first relationship defines a first dimming depth that varies with the first variable resistance.
    Type: Application
    Filed: August 7, 2023
    Publication date: March 28, 2024
    Inventors: XIAO-LEI ZHU, YUAN-YUAN LIN, SHENG-JU CHUNG
  • Publication number: 20240057334
    Abstract: The present disclosure provides a vertical memory structure including a semiconductor stack, a contact plug, gate electrodes and air gap structures. The semiconductor stack includes a lower semiconductor pattern structure filling a recess on a substrate and protruding from an upper surface of the substrate in a first direction substantially perpendicular to the upper surface of the substrate. The contact plug is disposed over the lower semiconductor patterns structure. The contact plug includes a lower portion and a middle portion over the lower portion. A width of the middle portion is less than a width of the lower portion. The gate electrodes are surrounding a sidewall of the semiconductor stack. The air gap structures are disposed at outer sides of the plurality of gate electrode respectively.
    Type: Application
    Filed: October 24, 2023
    Publication date: February 15, 2024
    Inventor: YUAN-YUAN LIN
  • Publication number: 20240047520
    Abstract: The present disclosure provides a semiconductor device includes a semiconductor substrate, a first metal plug, a second metal plug, a third metal plug, a fourth metal plug, and a boron nitride layer. The first metal plug and the second metal plug are disposed over a pattern-dense region of the semiconductor substrate. The third metal plug and the fourth metal plug are disposed over a pattern-loose region of the semiconductor substrate. The boron nitride layer is disposed over the semiconductor substrate. Each of the first metal plug and the second metal plug includes a barrier layer and a conductive feature. The barrier layer is contact with the semiconductor substrate. The conductive feature is disposed over the barrier layer. The conductive feature is separated from the semiconductor substrate by the barrier layer.
    Type: Application
    Filed: October 23, 2023
    Publication date: February 8, 2024
    Inventor: YUAN-YUAN LIN
  • Patent number: 11877455
    Abstract: The present disclosure provides a method for preparing a vertical memory structure with air gaps. The method includes providing a substrate; forming an impurity layer at an upper portion of the substrate; forming a semiconductor stack including a lower semiconductor pattern structure filling a recess on the substrate and protruding from an upper surface of the substrate in a first direction substantially perpendicular to the upper surface of the substrate; forming a plurality of gate electrodes surrounding a sidewall of the semiconductor stack, the plurality of gate electrodes being at a plurality of levels, respectively, so as to be spaced apart from each other in the first direction; and forming a plurality of air gap structures disposed at outer sides of the plurality of gate electrodes respectively.
    Type: Grant
    Filed: November 30, 2021
    Date of Patent: January 16, 2024
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Yuan-Yuan Lin
  • Publication number: 20230380135
    Abstract: A method for preparing the memory are provided. The method includes forming a trench at a front side of a semiconductor substrate, wherein the trench defines laterally separate active areas formed of surface regions of the semiconductor substrate; filling an isolation structure in the trench, wherein the isolation structure is filled to a height lower than top surfaces of the active areas; recessing a first group of the active areas from top surfaces of the first group of the active areas, while having top surfaces of a second group of the active areas covered; and forming contact enhancement sidewall spacers to laterally surround top portions of the active areas, respectively.
    Type: Application
    Filed: July 13, 2023
    Publication date: November 23, 2023
    Inventor: YUAN-YUAN LIN
  • Publication number: 20230352524
    Abstract: The present disclosure provides a semiconductor device includes a semiconductor substrate, a first metal plug, a second metal plug, a third metal plug, a fourth metal plug, and a boron nitride layer. The first metal plug and the second metal plug are disposed over a pattern-dense region of the semiconductor substrate. The third metal plug and the fourth metal plug are disposed over a pattern-loose region of the semiconductor substrate. The boron nitride layer is disposed over the semiconductor substrate. Each of the first metal plug and the second metal plug includes a barrier layer and a conductive feature. The barrier layer is contact with the semiconductor substrate. The conductive feature is disposed over the barrier layer. The conductive feature is separated from the semiconductor substrate by the barrier layer.
    Type: Application
    Filed: July 5, 2023
    Publication date: November 2, 2023
    Inventor: YUAN-YUAN LIN
  • Publication number: 20230354607
    Abstract: The present disclosure provides a vertical memory structure including a semiconductor stack, a contact plug, gate electrodes and air gap structures. The semiconductor stack includes a lower semiconductor pattern structure filling a recess on a substrate and protruding from an upper surface of the substrate in a first direction substantially perpendicular to the upper surface of the substrate. The contact plug is disposed over the lower semiconductor pattern structure. The contact plug includes a lower portion and a middle portion over the lower portion. A width of the middle portion is less than a width of the lower portion. The gate electrodes are surrounding a sidewall of the semiconductor stack. The air gap structures are disposed at outer sides of the plurality of gate electrode respectively.
    Type: Application
    Filed: July 10, 2023
    Publication date: November 2, 2023
    Inventor: YUAN-YUAN LIN
  • Patent number: 11785757
    Abstract: A method for preparing the memory are provided. The method includes forming a trench at a front side of a semiconductor substrate, wherein the trench defines laterally separate active areas formed of surface regions of the semiconductor substrate; filling an isolation structure in the trench, wherein the isolation structure is filled to a height lower than top surfaces of the active areas; recessing a first group of the active areas from top surfaces of the first group of the active areas, while having top surfaces of a second group of the active areas covered; and forming contact enhancement sidewall spacers to laterally surround top portions of the active areas, respectively.
    Type: Grant
    Filed: November 17, 2021
    Date of Patent: October 10, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Yuan-Yuan Lin
  • Patent number: 11742382
    Abstract: The present disclosure provides a method for preparing a semiconductor device. The method includes forming a first metal plug, a second metal plug, a third metal plug, and a fourth metal plug over a semiconductor substrate. The method also includes depositing a boron nitride layer over the first metal plug, the second metal plug, the third metal plug, and the fourth metal plug. A first portion of the boron nitride layer extends between the first metal plug and the second metal plug such that the first portion of the boron nitride layer and the semiconductor substrate are separated by an airgap while a second portion of the boron nitride layer extends between the third metal plug and the fourth metal plug such that the second portion of the boron nitride layer is in direct contact with the semiconductor substrate.
    Type: Grant
    Filed: November 30, 2021
    Date of Patent: August 29, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Yuan-Yuan Lin
  • Publication number: 20230156998
    Abstract: A method for preparing the memory are provided. The method includes forming a trench at a front side of a semiconductor substrate, wherein the trench defines laterally separate active areas formed of surface regions of the semiconductor substrate; filling an isolation structure in the trench, wherein the isolation structure is filled to a height lower than top surfaces of the active areas; recessing a first group of the active areas from top surfaces of the first group of the active areas, while having top surfaces of a second group of the active areas covered; and forming contact enhancement sidewall spacers to laterally surround top portions of the active areas, respectively.
    Type: Application
    Filed: November 17, 2021
    Publication date: May 18, 2023
    Inventor: YUAN-YUAN LIN
  • Publication number: 20230157007
    Abstract: The present disclosure provides a dynamic random access memory (DRAM) array with contact enhancement sidewall spacers. The memory array structure includes a semiconductor substrate, an isolation structure and contact enhancement sidewall spacers. The semiconductor substrate has a trench defining laterally separate active areas formed of surface regions of the semiconductor substrate. Top surfaces of a first group of the active areas are recessed with respect to top surfaces of a second group of the active areas. The isolation structure is filled in the trench and in lateral contact with bottom portions of the active areas. The contact enhancement sidewall spacers laterally surround top portions of the active areas, respectively.
    Type: Application
    Filed: November 17, 2021
    Publication date: May 18, 2023
    Inventor: Yuan-Yuan LIN
  • Patent number: 11610899
    Abstract: The present application provides a memory cell, a memory array and a method for preparing the memory cell. The memory cell includes an active area, an isolation structure and a contact enhancement layer. The active area is a surface portion of a semiconductor substrate. A top surface of the active area has a slop part descending toward an edge of the active area within a peripheral region of the active area. The isolation structure is formed in a trench of the semiconductor substrate laterally surrounding the active area. The contact enhancement layer covers the edge of the active area and in lateral contact with the isolation structure. The slope part of the top surface of the active area is covered by the contact enhancement layer, and the contact enhancement layer is formed of a semiconductor material.
    Type: Grant
    Filed: June 15, 2021
    Date of Patent: March 21, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Yuan-Yuan Lin
  • Publication number: 20220399348
    Abstract: The present application provides a memory cell, a memory array and a method for preparing the memory cell. The memory cell includes an active area, an isolation structure and a contact enhancement layer. The active area is a surface portion of a semiconductor substrate. A top surface of the active area has a slop part descending toward an edge of the active area within a peripheral region of the active area. The isolation structure is formed in a trench of the semiconductor substrate laterally surrounding the active area. The contact enhancement layer covers the edge of the active area and in lateral contact with the isolation structure. The slope part of the top surface of the active area is covered by the contact enhancement layer, and the contact enhancement layer is formed of a semiconductor material.
    Type: Application
    Filed: June 15, 2021
    Publication date: December 15, 2022
    Inventor: YUAN-YUAN LIN
  • Patent number: 11411019
    Abstract: The present disclosure provides a vertical memory structure with air gaps and a method for preparing the vertical memory structure. The vertical memory structure includes a semiconductor stack including a lower semiconductor pattern structure filling a recess on a substrate and protruding from an upper surface of the substrate in a first direction substantially perpendicular to the upper surface of the substrate; a plurality of gate electrodes surrounding a sidewall of the semiconductor stack, the plurality of gate electrodes being at a plurality of levels, respectively, so as to be spaced apart from each other in the first direction; and a plurality of air gap structures disposed at outer sides of the plurality of gate electrodes respectively.
    Type: Grant
    Filed: April 14, 2020
    Date of Patent: August 9, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Yuan-Yuan Lin
  • Patent number: 11380758
    Abstract: The present disclosure provides a semiconductor device with an air gap and a boron nitride cap for reducing capacitive coupling in a pattern-dense region and a method for preparing the semiconductor device. The semiconductor device includes a first metal plug and a second metal plug disposed over a pattern-dense region of a semiconductor substrate. The semiconductor device also includes a third metal plug and a fourth metal plug disposed over a pattern-loose region of the semiconductor substrate. The semiconductor device further includes a boron nitride layer disposed over the pattern-dense region and the pattern-loose region of the semiconductor substrate. A first portion of the boron nitride layer between the first metal plug and the second metal plug is separated from the semiconductor substrate by an air gap, and a second portion of the boron nitride layer between the third metal plug and the fourth metal plug is in direct contact with the semiconductor substrate.
    Type: Grant
    Filed: July 23, 2020
    Date of Patent: July 5, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Yuan-Yuan Lin
  • Publication number: 20220093640
    Abstract: The present disclosure provides a method for preparing a vertical memory structure with air gaps. The method includes providing a substrate; forming an impurity layer at an upper portion of the substrate; forming a semiconductor stack including a lower semiconductor pattern structure filling a recess on the substrate and protruding from an upper surface of the substrate in a first direction substantially perpendicular to the upper surface of the substrate; forming a plurality of gate electrodes surrounding a sidewall of the semiconductor stack, the plurality of gate electrodes being at a plurality of levels, respectively, so as to be spaced apart from each other in the first direction; and forming a plurality of air gap structures disposed at outer sides of the plurality of gate electrodes respectively.
    Type: Application
    Filed: November 30, 2021
    Publication date: March 24, 2022
    Inventor: YUAN-YUAN LIN
  • Publication number: 20220093732
    Abstract: The present disclosure provides a method for preparing a semiconductor device. The method includes forming a first metal plug, a second metal plug, a third metal plug, and a fourth metal plug over a semiconductor substrate. The method also includes depositing a boron nitride layer over the first metal plug, the second metal plug, the third metal plug, and the fourth metal plug. A first portion of the boron nitride layer extends between the first metal plug and the second metal plug such that the first portion of the boron nitride layer and the semiconductor substrate are separated by an airgap while a second portion of the boron nitride layer extends between the third metal plug and the fourth metal plug such that the second portion of the boron nitride layer is in direct contact with the semiconductor substrate.
    Type: Application
    Filed: November 30, 2021
    Publication date: March 24, 2022
    Inventor: YUAN-YUAN LIN
  • Publication number: 20220028970
    Abstract: The present disclosure provides a semiconductor device with an air gap and a boron nitride cap for reducing capacitive coupling in a pattern-dense region and a method for preparing the semiconductor device. The semiconductor device includes a first metal plug and a second metal plug disposed over a pattern-dense region of a semiconductor substrate. The semiconductor device also includes a third metal plug and a fourth metal plug disposed over a pattern-loose region of the semiconductor substrate. The semiconductor device further includes a boron nitride layer disposed over the pattern-dense region and the pattern-loose region of the semiconductor substrate. A first portion of the boron nitride layer between the first metal plug and the second metal plug is separated from the semiconductor substrate by an air gap, and a second portion of the boron nitride layer between the third metal plug and the fourth metal plug is in direct contact with the semiconductor substrate.
    Type: Application
    Filed: July 23, 2020
    Publication date: January 27, 2022
    Inventor: Yuan-Yuan LIN
  • Publication number: 20210320117
    Abstract: The present disclosure provides a vertical memory structure with air gaps and a method for preparing the vertical memory structure. The vertical memory structure includes a semiconductor stack including a lower semiconductor pattern structure filling a recess on a substrate and protruding from an upper surface of the substrate in a first direction substantially perpendicular to the upper surface of the substrate; a plurality of gate electrodes surrounding a sidewall of the semiconductor stack, the plurality of gate electrodes being at a plurality of levels, respectively, so as to be spaced apart from each other in the first direction; and a plurality of air gap structures disposed at outer sides of the plurality of gate electrodes respectively.
    Type: Application
    Filed: April 14, 2020
    Publication date: October 14, 2021
    Inventor: YUAN-YUAN LIN
  • Patent number: 10916639
    Abstract: The present application discloses a semiconductor device structure and a method for preparing the same. The method includes forming a ring structure over a substrate; performing an etching process to form an annular semiconductor fin under the ring structure; forming a lower source/drain region on the surface of the substrate in contact with a bottom portion of the annular semiconductor fin; forming an inner gate structure in contact with an inner sidewall of the annular semiconductor fin and forming an outer gate structure in contact with an outer sidewall of the annular semiconductor fin; and forming an upper source/drain region on an upper portion of the annular semiconductor fin.
    Type: Grant
    Filed: July 15, 2019
    Date of Patent: February 9, 2021
    Assignee: Nanya Technology Corporation
    Inventor: Yuan-Yuan Lin