Abstract: Disclosed are a device and method for detecting a subsurface defect of an optical component. According to the device and method, a spectral confocal technology, a laser scattering technology and a laser-induced ultrasonic technology are combined, excitation laser and detection laser are simultaneously focused to different depths of the optical component through a dispersion lens set, the excitation laser generates a transient thermal expansion effect on a subsurface of the optical component, the detection laser is used for observing and analyzing ultrasonic vibration of the subsurface defect under an action of the thermal expansion effect, and spatial distribution information and scattered spectral information of scattered light at a position of the subsurface defect are acquired by the spectral confocal technology. The device and method are suitable for nondestructive testing of a finished product of an ultra-precise optical component with a strict requirement on the subsurface defect.

Abstract: Disclosed are methods and devices for simultaneously detecting surface shapes and thickness distribution of inner and outer walls of a thin-walled rotating body. According to the invention, a chromatic confocal senor head is driven by a bottom rotary table, a main measuring head rotary table and a linear motion shaft mover to perform copy scanning along a surface of a thin-walled shell-type rotating body, so that the detection of the surface shapes and thickness distribution of the inner and outer walls of the thin-walled shell-type rotating body can be realized at the same time. By the method, mechanical interference caused by arranging a measuring head in the thin-walled shell-type rotating body can be avoided, and coordinate consistency of surface shape measurement data and thickness distribution data of the inner and outer walls in a three-dimensional space can be ensured, thus ensuring the overall measurement precision; and meanwhile.

Abstract: Disclosed are methods and devices for simultaneously detecting surface shapes and thickness distribution of inner and outer walls of a thin-walled rotating body. According to the invention, a chromatic confocal senor head is driven by a bottom rotary table, a main measuring head rotary table and a linear motion shaft mover to perform copy scanning along a surface of a thin-walled shell-type rotating body, so that the detection of the surface shapes and thickness distribution of the inner and outer walls of the thin-walled shell-type rotating body can be realized at the same time. By the method, mechanical interference caused by arranging a measuring head in the thin-walled shell-type rotating body can be avoided, and coordinate consistency of surface shape measurement data and thickness distribution data of the inner and outer walls in a three-dimensional space can be ensured, thus ensuring the overall measurement precision; and meanwhile.

Abstract: Disclosed are a device and method for detecting a subsurface defect of an optical component. According to the device and method, a spectral confocal technology, a laser scattering technology and a laser-induced ultrasonic technology are combined, excitation laser and detection laser are simultaneously focused to different depths of the optical component through a dispersion lens set, the excitation laser generates a transient thermal expansion effect on a subsurface of the optical component, the detection laser is used for observing and analyzing ultrasonic vibration of the subsurface defect under an action of the thermal expansion effect, and spatial distribution information and scattered spectral information of scattered light at a position of the subsurface defect are acquired by the spectral confocal technology. The device and method are suitable for nondestructive testing of a finished product of an ultra-precise optical component with a strict requirement on the subsurface defect.

Abstract: The present invention provides an electromagnetically driven fast tool servo system based on a flexible hinge combination mechanism, including a base, a voice coil motor arranged in the base, a tool mounting base connected to a coil of the voice coil motor by a first connecting portion, and a grating measurement device connected to the first connecting portion by a guide shaft arranged at a center of the voice coil motor, where the first connecting portion includes a first flexible hinge, a second flexible hinge, a first connecting member located between the first flexible hinge and the second flexible hinge, and a second connecting member located between the second flexible hinge and the coil of the voice coil motor; the tool mounting base, the first flexible hinge, the first connecting member, the second flexible hinge, the second connecting member, and an end of the guide shaft are coaxially connected in series by a first horizontal screw; the first flexible hinge and the second flexible hinge have sheet-l