Abstract: Provided herein are approaches for angle control of neutral reactive species ion beams. In one approach, a workpiece processing apparatus may include a plasma source operable to generate a plasma within a plasma chamber enclosed by a chamber housing, and an extraction plate coupled to the chamber housing. The extraction plate may include a plurality of channels for delivering one or more radical beams to a workpiece, wherein each of the plurality of channels has a lengthwise axis oriented at a non-zero angle relative to a perpendicular extending from a main surface of the workpiece, wherein each channel of the plurality of channels has a channel length and a channel width, and wherein the channel width varies along the channel length.

Abstract: Provided herein are approaches for angle control of neutral reactive species ion beams. In one approach, a workpiece processing apparatus may include a plasma source operable to generate a plasma within a plasma chamber enclosed by a chamber housing, and an extraction plate coupled to the chamber housing. The extraction plate may include a plurality of channels for delivering one or more radical beams to a workpiece, wherein each of the plurality of channels has a lengthwise axis oriented at a non-zero angle relative to a perpendicular extending from a main surface of the workpiece, wherein each channel of the plurality of channels has a channel length and a channel width, and wherein the channel width varies along the channel length.

Abstract: The present invention provides a direct current circuit breaker and its implementation method, which includes a cutout circuit, a commutation circuit and a energy absorption circuit connected in parallel. Through using power semiconductor switch module to cut off the current, it will have a quickly action, without generating electric arc, while the modular construction also reduces the consistency requirements of the power electronic component.

Abstract: The present invention provides a direct current circuit breaker and its implementation method, which includes the cutout circuit, the commutation circuit and the energy absorption circuit connected in parallel, wherein the cutout circuit includes cutout inductance and cutout unit connected in series, the commutation circuit includes commutation inductance, commutation unit and mechanical switch connected in series, commutation unit has a smaller on-resistance compared to cutout unit. The direct current circuit breaker topology of the present invention is novelty, concise, fully functional, easy to control and can flexible extend to apply to different voltage occasion.

Abstract: This present invention provides a high power water-cooling resistor used for high voltage direct current converter valve, which adopts water-cooling directly. It is characterized by that there are four resistance films, the resistance layer with required resistance, wherein the power of each resistance film can be up to 1500 w at least to form high power resistor. The water flows through one side of resistance film-substrate to take away the heat produced by resistor. The resistor adopts insulated cooling. The thermal resistance between resistor and water is extremely low, and the heat transfer area is also large, the temperature of the resistor declines greatly at the same power. It makes the high power water-cooling resistor have high power to volume ratio; its power can be up to 6 kW under adequate water flow condition. It is suitable for high power condition. The inside space of resistor body is large, so there are some advantages when water cut off is test.